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Infrared sensor and infrared detector

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01J-005/20
  • G01J-005/24
출원번호 US-0873703 (1997-06-12)
우선권정보 JP-0129917 (1997-05-20)
발명자 / 주소
  • Endo Haruyuki,JPX
출원인 / 주소
  • Ishizuka Electronics Corporation, JPX
대리인 / 주소
    McDermott, Will & Emery
인용정보 피인용 횟수 : 65  인용 특허 : 4

초록 ▼

A chip-shaped infrared sensor comprising a substrate formed with a cavity, an infrared radiation receiving portion supported in the form of a micro air bridge in the cavity by four hook-shaped beam portions extending from the substrate, two thermistor films for infrared radiation detection formed on

대표청구항 ▼

[ What is claimed is:] [7.] An infrared sensor chip comprising:a subsrtate formed with a cavity;an infrared radiation recieving portion supported in the form of a micro air bridge in said cavity by a set four hook-shaped beam portions extending from said substrate;two thermomistor films for infrared

이 특허에 인용된 특허 (4)

  1. Agnese Patrick,FRX ; Sajer Jean-Michel,FRX, Bolometric detection device for millimeter and sub-millimeter waves and a method for manufacturing this device.
    상세보기
  2. Kimura Mitsuteru (2-56 ; Shiomidai 3-chome ; Shichigahama-cho Miyagi-gun ; Miyagi-ken JPX) Kudo Takeshi (Kanagawa JPX), Infrared radiation sensor.
    상세보기
  3. Kudo Takeshi (Kanagawa JPX) Mori Takehisa (Kanagawa JPX) Komatsu Kiyoshi (Kanagawa JPX), Infrared sensor.
    상세보기
  4. Komatsu Kiyoshi (Ashigarakami JPX) Mori Takehisa (Ashigarakami JPX) Sone Atsushi (Ashigarakami JPX) Kimura Mitsuteru (Miyagi JPX), Infrared sensor and method for production thereof.
    상세보기

이 특허를 인용한 특허 (65)

  1. Forray, Deborah Derfelt; Liu, Puwei; delos Santos, Benedicto, B-stageable die attach adhesives.
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  2. Forray,Deborah Derfelt; Liu,Puwei; Santos,Benedicto delos, B-stageable die attach adhesives.
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  3. Lin,Alice L., Bolometer having an amorphous titanium oxide layer with high resistance stability.
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  4. Weiblen,Kurt; Arndt,Michael; Ludwig,Ronny, Chip assembly in a premold housing.
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  5. Herrnsdorf, Johannes; Stute, Georg; Roessinger, Stefan Andreas; Winterfeldt, Joachim; Enderlein, Dirk, Device for the detection of electromagnetic waves and method for producing such a device.
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  6. Giebeler, Carsten; Schreiter, Matthias; Zapf, Jörg, Device with a sandwich structure for detecting thermal radiation, and method for the production thereof.
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  7. Lane, William A.; Hynes, Eamon; Coyne, Edward John, Die temperature sensors.
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  8. Hatanaka, Hidefumi; Taniguchi, Tomohiko, Electronic component module and radio comunications equipment.
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  9. Ludwig,Ronny, Gas sensor module for the spectroscopic measurement of a gas concentration.
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  10. Gooch, Roland W.; Black, Stephen H.; Kocian, Thomas A.; Diep, Buu, Incident radiation detector packaging.
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  11. Hu, Chun-Hua; Liu, Chang-Hong; Fan, Shou-Shan, Infrared detector.
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  12. Suzuki, Kazuhiro; Fujiwara, Ikuo; Sasaki, Keita; Kwon, Honam; Yagi, Hitoshi; Honda, Hiroto; Ishii, Koichi; Ogata, Masako; Ueno, Risako; Funaki, Hideyuki, Infrared imaging device and method of manufacturing the same.
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  13. Freeborn, Scott, Infrared light detector having high resolution.
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  14. Kurz, Alexander, Infrared receiver chip.
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  15. Ishii, Koichi; Funaki, Hideyuki, Infrared sensor.
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  16. Ito, Satoru; Wakamiya, Isamu, Infrared sensor.
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  17. Nakamura, Kenzo; Kitaguchi, Sei; Ishikawa, Mototaka, Infrared sensor.
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  18. Tari, Kazuyoshi; Ishikawa, Mototaka; Shirata, Keiji; Nakamura, Kenzo, Infrared sensor.
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  19. Nakamura, Kenzo; Kitaguchi, Sei; Ishikawa, Mototaka, Infrared sensor and a circuit board equipped therewith.
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  20. Sugino, Takaki, Infrared sensor and infrared sensor array.
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  21. Hayashi, Koji; Sasaki, Dai, Infrared sensor and its manufacturing method.
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  22. Lee, Tzong-Sheng, Infrared sensor and manufacturing method thereof.
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  23. Ushimi, Yoshimitsu; Aizawa, Naoko; Fujino, Hiroyuki; Yamada, Hajime, Infrared sensor and method for producing same.
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  24. Iida, Yoshinori; Shigenaka, Keitaro; Mashio, Naoya, Infrared sensor device and manufacturing method thereof.
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  25. Buydens, Luc; Maddalena, Sam, Infrared sensor package.
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  26. Taniguchi,Ryo; Takada,Yuji; Kodoh,Masahiro; Shinotani,Masato; Tanaka,Hisanobu; Hironaka,Atsushi, Infrared sensor package.
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  27. Arno,Jose, Infrared thermopile detector system for semiconductor process monitoring and control.
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  28. Lazarov, Kalin V.; Meinel, Walter B., Integrated infrared sensors with optical elements, and methods.
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  29. Lambert, David K.; Lee, Han-Sheng; Chilcott, Dan W.; Borzabadi, Hamid R.; Jiang, Qin; Logsdon, James H., Integrated light concentrator.
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  30. Iida,Yoshinori; Shigenaka,Keitaro; Mashio,Naoya, Method for manufacturing an infrared sensor device.
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  31. Lermer, Markus; Haushalter, Martin, Method for producing a plurality of optoelectronic semiconductor components in combination, semiconductor component produced in such a way, and use of said semiconductor component.
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  32. Franz Laermer DE; Wilhelm Frey DE, Method of producing a radiation sensor.
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  33. Reichenbach, Frank; Hoefer, Holger, Microstructured sensor.
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  34. Arno, Jose I., Monitoring system comprising infrared thermopile detector.
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  35. Arno,Jose I., Monitoring system comprising infrared thermopile detector.
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  36. Arno,Jose I., Monitoring system comprising infrared thermopile detector.
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  37. Tsang, Koon-Wing; Shih, Cheng-Chung, Multi-cavity optical sensing and thermopile infrared sensing system.
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  38. Nakamura, Kenzo; Nishiyama, Masashi; Matsumoto, Fumio, Non-contact temperature sensor.
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  39. Ryan, Vivian, On-chip sensor array for temperature management in integrated circuits.
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  40. Poutous, Menelaos K.; Aggarwal, Ishwar D.; Sanghera, Jasbinder S.; Busse, Lynda E.; Shaw, Brandon L., Optical detector based on an antireflective structured dielectric surface and a metal absorber.
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  41. Arno, Jose I., Photometrically modulated delivery of reagents.
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  42. Arno, Jose I., Photometrically modulated delivery of reagents.
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  43. Arno,Jose I., Photometrically modulated delivery of reagents.
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  44. Skidmore, George D.; Howard, Christopher G., Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption.
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  45. Noda, Takafumi, Pyroelectric detector, pyroelectric detection device, and electronic instrument.
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  46. Saito, Masahiro, Pyroelectric-type infrared sensor.
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  47. Ludwig,Ronny, Radiation detector, sensor module having a radiation detector, and method for manufacturing a radiation detector.
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  48. Lambkin, Paul; Lane, William A.; Bain, Andrew David, Radiation sensor with cap and optical elements.
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  49. Kawamura, Hiromitsu, Semiconductor device and chip carrier.
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  50. Machida, Shuntaro; Kobayashi, Takashi, Semiconductor device and method of manufacturing the same.
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  51. Endoh, Tsutomu, Semiconductor device having thin film resistors made of bolometer materials.
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  52. Tsutomu Endoh JP, Semiconductor device having thin film resistors made of bolometer materials.
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  53. Lane, William A.; Hynes, Eamon; Coyne, Edward John, Sensor.
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  54. Pillans, Luke Alexander, Sensor device with improved sensitivity to temperature variation in a semiconductor substrate.
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  55. Ernst, Henrik; Karagözoglu, Hermann; Hausner, Martin; Lauck, Guido; Schilz, Jürgen, Sensor element.
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  56. Sato,Tsuneo; Ishihara,Atsuhiko; Uchida,Akihiro; Kaseda,Koji; Kato,Masahiro; Kondo,Shigeru, Solid state imaging device having electromagnetic wave absorber attached to a mounting board.
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  57. Van Herpen, Maarten Marinus Johannes Wilhelmus; Soer, Wouter Anthon, Spectral purity filter and lithographic apparatus.
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  58. Arno, Jose I.; Despres, Joseph R.; Letaj, Shkelqim; Lurcott, Steven M.; Baum, Thomas H.; Zou, Peng, TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same.
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  59. Ishizuya, Tohru; Suzuki, Junji, Thermal displacement element and radiation detector using the element.
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  60. Takahashi, Hiroyuki; Yoshida, Kazuhiko, Thermal oxide film formation method for silicon single crystal wafer.
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  61. Lane,William A.; Lyden,Colin Gerard; Hynes,Eamon; Coyne,Edward John, Thermal sensor with increased sensitivity.
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  62. Lane, William A.; Hynes, Eamon; Coyne, Edward John, Thermal sensor with thermal barrier.
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  63. Leneke, Wilhelm; Simon, Marion; Schulze, Mischa; Storck, Karlheinz; Schieferdecker, Joerg, Thermopile infrared sensor array.
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  64. Forg, Bodo; Herrmann, Frank; Leneke, Wilhelm; Schieferdecker, Joerg; Simon, Marion; Storck, Karlheinz; Schulze, Mischa, Thermopile infrared sensor by monolithic silicon micromachining.
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  65. Tailhades, Philippe; Presmanes, Lionel; Bonningue, Corinne; Ouvrier-Buffet, Jean-Louis; Astier, Astrid; Capdeville, Stephanie; Vialle, Claire; Imperinetti, Pierre, Use of spinel ferrites as sensitive material for bolometric infrared detector devices.
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