초록 ▼

A method and apparatus for characterizing dimensions and parasitic capacitance between integrated-circuit interconnects are disclosed. The apparatus is a test structure including at least two substantially identical oscillators, at least two substantially identical counters, and a pulse generator. E

A method and apparatus for characterizing dimensions and parasitic capacitance between integrated-circuit interconnects are disclosed. The apparatus is a test structure including at least two substantially identical oscillators, at least two substantially identical counters, and a pulse generator. Each of the oscillators is connected to an integrated-circuit interconnect. Each of the counters is coupled to a respective oscillator. The pulse generator is utilized to inject a series of fixed-length clock pulses to each of the oscillators such that the parasitic capacitance of the integrated-circuit interconnects can be characterized by the ratio of oscillation periods of the oscillators to parasitic capacitances of the integrated-circuits.

대표청구항 ▼

[ What is claimed is:] [1.] A test structure for characterizing relative parasitic capacitances of a plurality of integrated-circuit interconnects, wherein said test structure is embedded within an integrated-circuit, said test structure comprising:at least one oscillator connected to a plurality of

[ What is claimed is:] [1.] A test structure for characterizing relative parasitic capacitances of a plurality of integrated-circuit interconnects, wherein said test structure is embedded within an integrated-circuit, said test structure comprising:at least one oscillator connected to a plurality of integrated-circuit interconnects; anda counting mechanism, coupled to said at least one oscillator and to said plurality of integrated-circuit interconnects, that detects a ratio of oscillations on said plurality of integrated-circuit interconnects induced by said at least one oscillator such that relative parasitic capacitances of said plurality of integrated-circuit interconnects is determined.