초록 ▼

Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorptio

Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

대표청구항 ▼

[ What is claimed is:] [1.] A chamber effluent monitoring system, comprising:a chamber having an exhaust line connected thereto, the exhaust line including a sample region, wherein substantially all of a chamber effluent passes through the sample region;an absorption spectroscopy measurement system

[ What is claimed is:] [1.] A chamber effluent monitoring system, comprising:a chamber having an exhaust line connected thereto, the exhaust line including a sample region, wherein substantially all of a chamber effluent passes through the sample region;an absorption spectroscopy measurement system adapted to measure a concentration of a gas phase molecular species, comprising a light source and a main detector in optical communication with the sample region through one or more light transmissive window, the light source directing a light beam into the sample region through one of the one or more light transmissive window, wherein the light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window, and the main detector responding to the light beam exiting the sample region, wherein the light beam is reflected within the sample region by one or more light reflective surfaces.