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Delivery system and manifold

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/16
출원번호 US-0893913 (1997-07-11)
발명자 / 주소
  • Jackson Robert M.
출원인 / 주소
  • Advanced Delivery & Chemical Systems, Ltd.
대리인 / 주소
    Jones, O'Keefe, Egan & Peterman
인용정보 피인용 횟수 : 19  인용 특허 : 12

초록

This invention concerns a manifold for use in refill of canister containing chemicals. The manifold may comprise a vacuum supply valve; a vacuum generator; a pressure vent valve; a gas inlet valve; a bypass valve; an isolation valve; a control valve; a canister inlet valve; a canister outlet valve;

대표청구항

[ What is claimed is:] [6.] A manifold useful for refillably connecting two canisters containing liquid chemicals, comprising:a vacuum supply valve connected to a vacuum generator;a pressure vent valve connected to the vacuum generator and to a gas inlet valve;a control valve connected to the vacuum

이 특허에 인용된 특허 (12)

  1. Geatz Tobin (Durham NC), Apparatus and method for the transfer and delivery of high purity chemicals.
  2. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  3. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  4. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Bulk containers for high purity chemical delivery systems.
  5. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf Ha, Chemical refill system.
  6. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H, Chemical refill system.
  7. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Chemical refill system for high purity chemicals.
  8. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (San Jose CA), Chemical refill system for high purity chemicals.
  9. Miyazaki Shinji (Yokohama JPX) Tsunashima Yoshitaka (Tokyo JPX), Liquid source container device.
  10. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Manifold systems for high purity chemical delivery systems.
  11. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX), Method and apparatus for feeding drug liquid from hermetic returnable can.
  12. McMenamin Joseph C. (Oceanside CA), Vapor mass flow control system.

이 특허를 인용한 특허 (19)

  1. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H., Automatic refill system for ultra pure or contamination sensitive chemicals.
  2. Christopher S. Blatt ; Richard H. Pearce ; Graham Williams GB; Edward H. Wentworth, III, Automatic refill system for ultra pure or contamination sensitive chemicals.
  3. Easton, Mark C, Automatic venting of refillable bulk liquid canisters.
  4. Craig M. Noah ; John N. Gregg ; Robert M. Jackson ; Craig Esser, Bulk chemical delivery system.
  5. Xu,Mindi; Sayasane,Tay; Paganessi,Joseph E.; Jursich,Gregory M.; Nakamoto,Naoyuki; Nishikawa,Yukinobu; Dulphy,Herve E.; Rameau,Guillaume; Honda,Lorrin, Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical.
  6. Choi, Sung-Yun; Song, Yong-Seok; Kim, Seung-Hyuk; Yoon, Ho-Byung, Liquefied gas transfer device for reducing boil-off gas.
  7. Yoshioka, Naoki; Kawamoto, Tatsushi; Kawao, Mitsushi; Matsuno, Shigeru; Yamada, Akira; Miyashita, Shoji; Uchikawa, Fusaoki, Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method.
  8. Yoshioka, Naoki; Kawamoto, Tatsushi; Kawao, Mitsushi; Matsuno, Shigeru; Yamada, Akira; Miyashita, Shoji; Uchikawa, Fusaoki, Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method.
  9. Yoshioka,Naoki; Kawamoto,Tatsushi; Kawao,Mitsushi; Matsuno,Shigeru; Yamada,Akira; Miyashita,Shoji; Uchikawa,Fusaoki, Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method.
  10. Yang, Jefferson Ys; Hsiao, Feng-Hsiang; Chang, Hong-Shi; Chen, Chih-Hsueh, Method and system of gas refilling management for gas storage canister utilizing identification accessing control.
  11. Jursich, Gregory M., Methods and apparatus for delivering high purity liquids with low vapor pressure.
  12. Zorich, Robert Sam; Roberts, David Allen; Voloshin, George Oleg, Multiple contents container assembly for ultrapure solvent purging.
  13. Steidl, Thomas Andrew; Vivanco, Gildardo; Birtcher, Charles Michael, Purgeable container for low vapor pressure chemicals.
  14. Birtcher, Charles Michael; Martinez, Martin Castaneda; Steidl, Thomas Andrew; Vivanco, Gil; Silva, David James, Purgeable manifold for low vapor pressure chemicals containers.
  15. Chism, Richard D.; Krell, Andy, Refillable ampoule with purge capability.
  16. Arisumi, Osamu; Kiyotoshi, Masahiro; Hieda, Katsuhiko, Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method.
  17. Kanjolia, Ravi; Platts, Chris; Nguyen, Nam; Wilkinson, Mark, Solid precursor delivery assemblies and related methods.
  18. Charles Michael Birtcher ; Robert Sam Zorich ; Thomas Andrew Steidl ; Gil Vivanco ; Cynthia Lee Trent ; David James Silva, Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals.
  19. Scholz, Christoph, Storage vessel for liquid high-purity substances.
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