초록 ▼

An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus comprises a plurality of storage locations positioned above the fabrication tool. The apparatus receives wafer carriers via a factory l

An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus comprises a plurality of storage locations positioned above the fabrication tool. The apparatus receives wafer carriers via a factory load port. The wafer carriers are transported between the factory load port and the storage locations via a first robot, and are transported between the fabrication tool load port and the storage locations via a second robot. Both robots access the respective load port from overhead, thus eliminating the need for a front loader robot, and reducing the apparatus' footprint. Each robot may access overhead factory transportation systems to provide further flexibility in wafer carrier transport. Additionally, the apparatus of the present invention may include a mechanism for opening pod type wafer carriers and for extracting wafers therefrom.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for buffering wafer carriers to be loaded to a wafer fabrication tool comprising:a first load port for receiving a wafer carrier to be stored;a first vertical transfer mechanism, operatively coupling said first load port, dedicated to transferring the wafer c

[ What is claimed is:] [1.] An apparatus for buffering wafer carriers to be loaded to a wafer fabrication tool comprising:a first load port for receiving a wafer carrier to be stored;a first vertical transfer mechanism, operatively coupling said first load port, dedicated to transferring the wafer carrier to be stored between the first load port and a height greater than that of the wafer fabrication tool;at least one storage location located above the wafer fabrication tool operatively coupling said first vertical transfer mechanism for receiving the wafer carrier to be stored;a second vertical transfer mechanism operatively coupling said at least one storage location and extending downward from said at least one storage location, dedicated to transferring the wafer carrier between the at least one storage location and the wafer fabrication tool; anda first wafer exchange port, operatively coupling said second vertical transfer mechanism for receiving the wafer carrier.