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Micromechanical memory sensor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01H-071/22
  • H01H-029/84
  • H01H-037/10
  • H01L-023/58
출원번호 US-0868705 (1997-06-04)
발명자 / 주소
  • Mehregany Mehran
  • Goldman Kenneth G.
  • Dhuler Vijayakumar R.
출원인 / 주소
  • Case Western Reserve University
대리인 / 주소
    Fay, Sharpe, Fagan, Minnich & McKee
인용정보 피인용 횟수 : 24  인용 특허 : 18

초록

A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the s

대표청구항

[ Having thus described the invention, we claim:] [1.] A micromechanical sensor comprising:a mechanical latch being latched upon detection of a threshold value of a variable temperature condition, latching occurring by movement of components of the latch induced by the variable temperature condition

이 특허에 인용된 특허 (18)

  1. Ciarlo Dino R. (Livermore CA), (110) Oriented silicon wafer latch accelerometer and process for forming the same.
  2. Overman David L. (Silver Spring MD) Johnson Robert N. (Silver Spring MD), Acceleration switch.
  3. Hutter ; III ; Charles G. ; Hutter ; Peter S., Air exhausted mixing bowl.
  4. Stanley Ian W. (Ipswich GB2) Shepherd John N. (Birmingham GB2) Dobson Peter S. (Stourport GB2), Cantilever beam radiation deflector assembly.
  5. Morris Harold D. (Orinda CA), Counting accelerometer apparatus.
  6. Bell Lon E. (Altadena CA), Crash and rollover cutoff switch.
  7. Schneider ; Jr. Clayton J. (East Aurora NY), Fiber optic acceleration sensor.
  8. Smits Johannes G. (Quincy MA), Integrated micromechanical piezoelectric motor.
  9. MacDonald Noel C. (Ithaca NY) Chen Liang-Yuh (Ithaca NY) Zhang Zuoying L. (Ithaca NY), Microdynamic release structure.
  10. Zavracky Paul M. (Norwood MA) Morrison ; Jr. Richard H. (Taunton MA), Micromechanical electric shunt and encoding devices made therefrom.
  11. Benecke Wolfgang (Berlin DEX), Micromechanical manipulator.
  12. Mehregany Mehran ; Goldman Kenneth G. ; Dhuler Vijayakumar R., Micromechanical memory sensor.
  13. Hk Bertil (Sportfiskaregatan 53 Vsters SEX S-723 48) Tenerz Lars (Ringgatan 20C Uppsala SEX S-752 27) Tirn Jonas (Geijersgatan 13C Uppsala SEX S-752 26), Micromechanical non-reverse valve.
  14. Murdock Bruce (Beaverton OR), Micromechanical sensor employing a SQUID to detect movement.
  15. Brand John H. (Harford County MD), Micromechanical vibration sensor.
  16. Devaney Howard F. (Cedar Crest NM), Multiple-stage integrating accelerometer.
  17. Kroll John W. (Greendale WI), Thin-film magnetically operated micromechanical electric switching device.
  18. Allen Henry V. (Fremont CA) Jerman John H. (Palo Alto CA) Terry Stephen C. (Palo Alto CA), Trimmable microminiature force-sensitive switch.

이 특허를 인용한 특허 (24)

  1. Lemke, Marko; Tegen, Stefan, Apparatus, storage device, switch and methods, which include microstructures extending from a support.
  2. Boutaghou, Zine-Eddine; Hipwell, Jr., Roger L.; Bonin, Wayne A., Armor coated MEMS devices.
  3. Schuh William C., Dew point sensor using mems.
  4. Jingkuang Chen ; Feixia Pan ; Joel A. Kubby, Electromechanical memory cell.
  5. Lin,Pinyen; Chen,Jingkuang; Ma,Jun, Electromechanical memory cell with torsional movement.
  6. Watters, David G.; Huestis, David L.; Bahr, Alfred J.; Vidmar, Robert J., Event-recording devices with identification codes.
  7. Chaparala, Murali, Magnetic position detection apparatus for micro machined optical element.
  8. Chaparala, Murali, Magnetic position detection for micro machined optical element.
  9. Yazdi, Navid, Method and system for monitoring environmental conditions.
  10. Polosky,Marc A.; Lukens,Laurance L., Micro environmental sensing device.
  11. Zuniga-Ortiz, Edgar Rolando; Krenik, William R., Micro-electro-mechanical system having movable element integrated into substrate-based package.
  12. Zuniga-Ortiz, Edgar R.; Krenik, William R., Microelectromechanical system having movable element integrated into substrate-based package.
  13. Cho Dong-Il,KRX ; Lee Sangwoo,KRX ; Park Sangjun,KRX, Micromechanical system fabrication method using (111) single crystalline silicon.
  14. Cho, Dong-Il; Lee, Sangwoo; Park, Sangjun, Micromechanical system fabrication method using (111) single crystalline silicon.
  15. Receveur, Rogier; Habets, Philippe; Danzl, Ralph B.; Houben, Richard P. M.; Mattes, Michael F., Multi-stable micro electromechanical switches and methods of fabricating same.
  16. Receveur, Rogier; Habets, Philippe; Danzl, Ralph B.; Houben, Richard P. M.; Mattes, Michael F., Multi-stable micro electromechanical switches and methods of fabricating same.
  17. Daneman,Michael J.; Wall,Franklin; Behin,Behrang; Chaparala,Murali; Chang,Mark W.; Dalton,Scott; Beerling,Timothy; Panyko,Stephen; Kiang,Meng Hsiung; Kobrin,Boris; Lin,Chuang Chia, Optical cross-connect system.
  18. Mahameed, Rashed; Sinha, Nipun; Piazza, Gianluca, Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators.
  19. Hower, Robert William; Zhang, Yafan; Yazdi, Navid, Sensing modules and methods of using.
  20. Watters, David G.; Huestis, David L.; Bahr, Alfred J.; Priyantha, Namal; Jayaweeera, Palitha, Sensor devices for structural health monitoring.
  21. Watters,David G.; Huestis,David L.; Bahr,Alfred J.; Priyantha,Namal; Jayaweera,Palitha, Sensor devices for structural health monitoring.
  22. Naumann, Michael, Shock sensor with latch mechanism and method of shock detection.
  23. Hsu, Ying Wen; Baytan, Norlito; Cuan, Shauhwa, Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials.
  24. Watters, David G.; Huestis, David L.; Bahr, Alfred J., Wireless event-recording device with identification codes.
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