초록 ▼

An apparatus for growing single-polytype, single crystals of silicon carbide utilizing physical vapor transport as the crystal growth technique. The apparatus has a furnace which has a carbon crucible with walls that border and define a crucible cavity. A silicon carbide source material provided at

An apparatus for growing single-polytype, single crystals of silicon carbide utilizing physical vapor transport as the crystal growth technique. The apparatus has a furnace which has a carbon crucible with walls that border and define a crucible cavity. A silicon carbide source material provided at a first location of the crucible cavity, and a monocrystalline silicon carbide seed is provided at a second location of the crucible cavity. A heat path is also provided in the furnace above the crucible cavity. The crucible has a stepped surface that extends into the crucible cavity. The stepped surface has a mounting portion upon which the seed crystal is mounted. The mounting portion of the stepped surface is bordered at one side by the crucible cavity and is bordered at an opposite side by the furnace heat path. The stepped surface also has a sidewall that is bordered at one side by and surrounds the furnace heat path. The apparatus may also have a thermal insulating member, in which a side of the stepped surface sidewall opposite to the furnace heat path is bordered by the thermal insulating member.

대표청구항 ▼

[ It is claimed:] [1.] A method for growing large silicon carbide single crystals, comprising the steps of:(A) placing a silicon carbide source material at a first location within a crucible;(B) placing a monocrystalline silicon carbide seed crystal at a second location within said crucible spaced f

[ It is claimed:] [1.] A method for growing large silicon carbide single crystals, comprising the steps of:(A) placing a silicon carbide source material at a first location within a crucible;(B) placing a monocrystalline silicon carbide seed crystal at a second location within said crucible spaced from said first location;(C) placing an insulating jacket around said crucible;(D) providing an aperture through said insulating jacket;(E) positioning said aperture in line with said silicon carbide seed crystal to remove heat therefrom during crystal growth, by heat radiation through said aperture;(F) at pressure conditions suitable for crystal growth, heating said source material and said silicon carbide seed crystal to different temperatures to promote silicon carbide seed crystal growth by physical vapor transport, with the temperature gradient between said first and second locations being in the range of around 10.degree. C./cm to 60.degree. C./cm.