초록 ▼

A valve array system including microelectromechanical valves embedded in a dielectric substrate is disclosed. These microelectromechanical valves can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable com

A valve array system including microelectromechanical valves embedded in a dielectric substrate is disclosed. These microelectromechanical valves can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching.

대표청구항 ▼

[ What is claimed is:] [13.] A system for supporting an array of valved fluid jets comprisinga fluid pressure source,a laminate having a dielectric base material and an impregnated resin, with a plurality of conduits defined in the laminate in contact with the fluid pressure source, anda plurality o

[ What is claimed is:] [13.] A system for supporting an array of valved fluid jets comprisinga fluid pressure source,a laminate having a dielectric base material and an impregnated resin, with a plurality of conduits defined in the laminate in contact with the fluid pressure source, anda plurality of electrically controlled electrostatic valves, with at least some of the plurality of electrostatic valves embedded in the conduits defined in the laminate to control fluid flow therethrough.