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Sub-wavelength aperture arrays with enhanced light transmission 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-003/14
출원번호 US-0979432 (1997-11-26)
발명자 / 주소
  • Ebbesen Thomas W.
  • Ghaemi Hadi F.
  • Thio Tineke
  • Wolff Peter A.
출원인 / 주소
  • NEC Research Institute, Inc.
대리인 / 주소
    Feig
인용정보 피인용 횟수 : 127  인용 특허 : 12

초록 ▼

A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array i

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for enhanced light transmission comprising:a metallic film; andan array of apertures in said film;said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby inciden

이 특허에 인용된 특허 (12)

  1. Grobman Warren D. (Yorktown Heights NY) Nelson ; Jr. David A. (Carmel NY) Warlaumont John M. (Croton-on-Hudson NY), Alignment method and apparatus for x-ray or optical lithography.
    상세보기
  2. Goodman Douglas S. (Yorktown Heights NY), Confocal method and apparatus for focusing in projection lithography.
    상세보기
  3. Murai Fumio (Nishitama JPX) Okazaki Shinji (Urawa JPX) Yoda Haruo (Nishitama JPX) Shibata Yukinobu (Ibaraki JPX) Tsukizoe Akira (Koganei JPX), Electron beam lithography using an aperture having an array of repeated unit patterns.
    상세보기
  4. Simon H. J. (Toledo OH) Wang Yu (Toledo OH), Liquid crystal flat panel color display with surface plasmon scattering.
    상세보기
  5. Isaacson Michael (Ithaca NY) Lewis Aaron (Ithaca NY), Method and apparatus for production and use of nanometer scale light beams.
    상세보기
  6. Isaacson Michael (Ithaca NY) Lewis Aaron (Ithaca NY), Method and apparatus for production and use of nanometer scale light beams.
    상세보기
  7. Tanaka Yoshiharu (Tokyo JPX) Kouno Eiichi (Tokyo JPX) Iwata Joji (Tokyo JPX), Method of alignment between mask and semiconductor wafer.
    상세보기
  8. Quate Calvin F. (Stanford CA), Near field scanning optical and force microscope including cantilever and optical waveguide.
    상세보기
  9. Thaxter James B. (Townsend MA), Optical alignment of masks for X-ray lithography.
    상세보기
  10. Wang Yu (40-57 Junction Blvd. Corona NY 11368), Surface plasmon high efficiency HDTV projector.
    상세보기
  11. King David A. (Palo Alto CA) Seher Jens-Peter (Stuttgart DEX), Surface plasmon resonance measuring instruments.
    상세보기
  12. Takasu Shinichiro (Tokyo JPX) Shinozaki Toshiaki (Yokohama JPX), System for transferring a fine pattern onto a target.
    상세보기

이 특허를 인용한 특허 (127)

  1. Weber,Jonathan L., Active sensor receiver detector array for countermeasuring shoulder-fired missiles.
    상세보기
  2. Kuroda,Ryo; Mizutani,Natsuhiko; Yamaguchi,Takako; Inao,Yasuhisa; Yamada,Tomohiro, Chemical sensor.
    상세보기
  3. Kim,Hong Koo; Sun,Zhijun; Jung,Yun Suk, Chip-scale optical spectrum analyzers with enhanced resolution.
    상세보기
  4. Coe, James V.; Williams, Shaun M.; Rodriguez, Kenneth R., Coated biperiodic metallic mesh arrays with molecular monolayers and lipid bilayers thereon.
    상세보기
  5. Park, Se-Young; Kim, Jeong-Hyun; Yi, Sung-Chol; Lee, Chang-Gu; Lee, Cheol-Hwan, Color filter using surface plasmon and liquid crystal display device.
    상세보기
  6. Yoon, Min-Sung, Color filter using surface plasmon, liquid crystal display device and method for fabricating the same.
    상세보기
  7. Yoon, Min-Sung, Color filter using surface plasmon, liquid crystal display device and method for fabricating the same.
    상세보기
  8. Kornilovich,Pavel, Composite evanescent waveguides and associated methods.
    상세보기
  9. Kornilovich,Pavel, Composite evanescent waveguides and associated methods.
    상세보기
  10. Wu, Jigang; Pang, Shuo; Yang, Changhuei, Delayed emission detection devices and methods.
    상세보기
  11. King, Edward; Heaps, David; Sullivan, Mark, Dynamic measurement of density using terahertz radiation with real-time thickness measurement for process control.
    상세보기
  12. Mankos, Marian; Krishnamurthi, Vidhya; Lee, Kim Y., Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance.
    상세보기
  13. Ebbesen Thomas W. ; Grupp Daniel E. ; Thio Tineke ; Lezec Henri J.,FRX, Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography.
    상세보기
  14. Thio, Tineke; Linke, Richard A.; Pellerin, Kelly M.; Ebbesen, Thomas W.; Lezec, Henri J., Enhanced optical transmission apparatus with improved aperture geometry.
    상세보기
  15. Kim Tae Jin ; Krishnan Ajit ; Thio Tineke ; Lezec Henri Joseph,FRX ; Ebbesen Thomas W.,FRX, Enhanced optical transmission apparatus with improved inter-surface coupling.
    상세보기
  16. Inao, Yasuhisa; Kuroda, Ryo; Yamaguchi, Takako, Exposure method and exposure apparatus using near-field light and exposure mask.
    상세보기
  17. Craighead, Harold G.; Webb, Watt W.; Xu, Huizhong; Zhu, Pangshun, Extraordinary light transmission apparatus and method.
    상세보기
  18. Cui, Xiquan; Lee, Lap Man; Yang, Changhuei, Focal plane adjustment by back propagation in optofluidic microscope devices.
    상세보기
  19. Satzke,Klaus, Focusing device.
    상세보기
  20. Wang,Jian, Freespace tunable optoelectronic device and method.
    상세보기
  21. Lee, Cheol-Hwan; Kim, Jeong-Hyun; Yi, Sung-Chol; Lee, Chang-Gu; Park, Se-Young, Fringe field switching mode liquid crystal display device and method for fabricating the same.
    상세보기
  22. Kinz-Thompson, Colin; Gonzalez, Jr., Ruben L.; Hone, James C.; Palma, Matteo; Godarenko, Alexander Alexeevich; Chenet, Daniel Alexandre; Wind, Samuel J., Functionalized surfaces and methods related thereto.
    상세보기
  23. Pavani, Sri Rama Prasanna; Yang, Changhuei; Wu, Jigang, High resolution imaging devices with wide field and extended focus.
    상세보기
  24. Arend,Mark; Crouse,David, High responsivity high bandwidth metal-semiconductor-metal optoelectronic device.
    상세보기
  25. Guha, Supratik; Gunawan, Oki, Holey electrode grids for photovoltaic cells with subwavelength and superwavelength feature sizes.
    상세보기
  26. Guha, Supratik; Gunawan, Oki, Holey electrode grids for photovoltaic cells with subwavelength and superwavelength feature sizes.
    상세보기
  27. Yang, Changhuei; Wu, Jigang; Pang, Shuo, Holographically illuminated imaging devices.
    상세보기
  28. Mouli,Chandra, Image sensor, an image sensor pixel, and methods of forming the same.
    상세보기
  29. Shen, Jung-Tsung; Shen, Yuecheng; Wang, Lihong, Imaging using metamaterials.
    상세보기
  30. Shen, Jung-Tsung; Shen, Yuecheng; Wang, Lihong, Imaging using metamaterials.
    상세보기
  31. Catrysse,Peter B.; Wandell,Brian A., Integrated color pixel (ICP).
    상세보기
  32. Kuroda, Ryo; Shimada, Yasuhiro; Seki, Junichi; Yamaguchi, Takako; Inao, Yasuhisa, Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof.
    상세보기
  33. Park, Se-Young; Kim, Jeong-Hyeon; Yi, Sung-Chol; Lee, Chang-Gu, Liquid crystal display device and method of fabricating the same.
    상세보기
  34. Dvorsky, Edward Frank; Wagener, Fred J., Low temperature deposition of dielectric materials in magnetoresistive random access memory devices.
    상세보기
  35. Ogawa, Yuichi; Hayashi, Shinichiro; Kato, Eiji, Measurement apparatus and measurement method.
    상세보기
  36. Kim,Hong Koo; Sun,Zhijun; Jung,Yun Suk, Metal nanowire based bandpass filter arrays in the optical frequency range.
    상세보기
  37. Kim,Hong Koo; Sun,Zhijun; Capelli,Christopher C., Metallic nano-optic lenses and beam shaping devices.
    상세보기
  38. Kim,Hong Koo; Sun,Zhijun; Capelli,Christopher C., Metallic nano-optic lenses and beam shaping devices.
    상세보기
  39. Ye, Jun; Chen, Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  40. Ye, Jun; Chen, Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  41. Ye, Jun; Chen, Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  42. Ye, Jun; Chen, Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  43. Ye, Jun; Chen, Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  44. Ye,Jun; Chen,Xun, Method and apparatus for monitoring integrated circuit fabrication.
    상세보기
  45. Crouse, David, Method and device for concentrating light in optoelectronic devices using resonant cavity modes.
    상세보기
  46. Wang,Jian; Park,Yong Kewan, Method and system for performing wavelength locking of an optical transmission source.
    상세보기
  47. Yoon, Min-Sung, Method for fabricating color filter using surface plasmon and method for fabricating liquid crystal display device.
    상세보기
  48. Kamba, Seiji; Kondo, Takashi; Tanaka, Koji; Takigawa, Kazuhiro; Ogawa, Yuichi, Method for measuring characteristic of object to be measured, structure causing diffraction phenomenon, and measuring device.
    상세보기
  49. Coe, James V.; Williams, Shaun M., Method for uniform electrochemical reduction of apertures to micron and submicron dimensions using commercial biperiodic metallic mesh arrays and devices derived therefrom.
    상세보기
  50. Chagovetz, Alexander M.; Blair, Steven M.; Jensen, Randy L.; Lowder, Bryan J., Methods and compositions related to quantitative, array based methylation analysis.
    상세보기
  51. King, Edward E.; Heaps, David A.; Self, Gregory Scott; McKay, Richard R.; Sullivan, Mark J., Methods, sampling device and apparatus for terahertz imaging and spectroscopy of coated beads, particles and/or microparticles.
    상세보기
  52. Wang, Jian, Monolithic tunable lasers and reflectors.
    상세보기
  53. Wang, Jian, Monolithic tunable lasers and reflectors.
    상세보기
  54. Creazzo, Timothy; Zablocki, Mathew, Multi-layer extraordinary optical transmission filter systems, devices, and methods.
    상세보기
  55. Maldonado,Juan R.; Coyle,Steven T., Multiple electron beam system with electron transmission gates.
    상세보기
  56. Hill, Henry A., Multiple-source arrays with optical transmission enhanced by resonant cavities.
    상세보기
  57. Mizutani, Natsuhiko; Yamada, Tomohiro, Near-field light generating method and near-field optical head using a light blocking metal film having a fine opening whose size is not more than a wavelength of irradiated light, and near-field optical microscope having the optical head.
    상세보기
  58. Mamabu Oumi JP; Yasuyuki Mitsuoka JP; Norio Chiba JP; Nobuyuki Kasama JP; Kenji Kato JP; Takashi Niwa JP, Near-field optical probe.
    상세보기
  59. Kurtin,Juanita, Near-field photo-lithography using nano light emitting diodes.
    상세보기
  60. Pavani, Sri Rama Prasanna; Yang, Changhuei, Nondiffracting beam detection devices for three-dimensional imaging.
    상세보기
  61. Cui, Xiquan; Yang, Changhuei; Scherer, Axel; Psaltis, Demetri; Heng, Xin, On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference.
    상세보기
  62. Rettner, Charles T.; Stipe, Barry C., Optical aperture for data recording having transmission enhanced by waveguide mode resonance.
    상세보기
  63. Yamada, Tomohiro, Optical apparatus, optical detector, optical modulator, imaging apparatus, and camera.
    상세보기
  64. Engelhardt, Johann; Ulrich, Heinrich; Gugel, Hilmar, Optical arrangement provided for a spectral fanning out of a light beam.
    상세보기
  65. Wang, Jian; Kostal, Hubert, Optical components exhibiting enhanced functionality and method of making same.
    상세보기
  66. Wang,Jian; Deng,Xuegong, Optical device and method for making same.
    상세보기
  67. Rettner,Charles T.; Stipe,Barry C., Optical devices having transmission enhanced by surface plasmon mode resonance, and their use in data recording.
    상세보기
  68. Oigawa, Makoto; Yamada, Tomohiro, Optical element.
    상세보기
  69. Nakada,Matsafumi; Thio,Tineke, Optical element for enhanced transmission of light and suppressed increase in temperature.
    상세보기
  70. Handa, Yoichiro, Optical element, image sensor including the optical element, and image pickup apparatus including the image sensor.
    상세보기
  71. Yamada, Tomohiro; Kuroda, Ryo, Optical filter.
    상세보기
  72. Yamada, Tomohiro; Ogino, Masaya; Inao, Yasuhisa, Optical filter.
    상세보기
  73. Yamada, Tomohiro; Ogino, Masaya; Inao, Yasuhisa, Optical filter.
    상세보기
  74. Nakano, Takashi; Nakura, Mitsuru; Ishihara, Kazuya; Awaya, Nobuyoshi; Natsuaki, Kazuhiro; Takimoto, Takahiro; Uchida, Masayo, Optical filter configured to transmit light of a predetermined wavelength.
    상세보기
  75. Sugiura, Satoshi; Yamakawa, Yuzo, Optical near-field generating element and optical apparatus including the same.
    상세보기
  76. Sugiura, Satoshi; Yamakawa, Yuzo, Optical near-field generating element and optical apparatus including the same.
    상세보기
  77. Nikolov, Anguel; Chou, Stephen Y., Optical polarization beam combiner/splitter.
    상세보기
  78. Blumberg,Girsh; Dennis,Brian S; Egorov,Dmitro M., Optical routers based on surface plasmons.
    상세보기
  79. Blumberg,Girsh; Dennis,Brian S; Egorov,Dmitro M., Optical routers based on surface plasmons.
    상세보기
  80. Blumberg,Girsh; Dennis,Brian S; Egorov,Dmitro M., Optical routers based on surface plasmons.
    상세보기
  81. Howard,Robert J., Optical transistor with sub-wavelength aperture.
    상세보기
  82. Kim Tae Jin ; Thio Tineke ; Ebbesen Thomas Wren, Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes.
    상세보기
  83. Cui, Xiquan; Heng, Xin; Lee, Lap Man; Yang, Changhuei, Optofluidic microscope device with photosensor array.
    상세보기
  84. Dixon, Peter E., Perforated blocking layer for enhanced broad band response in a focal plane array.
    상세보기
  85. Takimoto, Takahiro; Natsuaki, Kazuhiro; Uchida, Masayo; Awaya, Nobuyoshi; Ishihara, Kazuya; Nakano, Takashi; Nakura, Mitsuru, Photoelectric conversion device.
    상세보기
  86. Natsuaki, Kazuhiro; Uchida, Masayo; Takimoto, Takahiro; Awaya, Nobuyoshi; Ishihara, Kazuya; Nakano, Takashi; Nakura, Mitsuru, Photoelectric conversion device and method for manufacturing same.
    상세보기
  87. Blumberg,Girsh, Plasmon-enhanced tapered optical fibers.
    상세보기
  88. Lezec, Henri J.; Walter, Erich C.; Agrawal, Amit; Talin, Albert Alec; Xu, Ting, Plasmonic enhancement of material properties.
    상세보기
  89. Sarychev, Andrey K.; Shalaev, Vladimir M.; Dykhne, Alexander M.; Podolskiy, Viktor A., Plasmonic nanophotonics methods, materials, and apparatuses.
    상세보기
  90. Park, No Cheol; Lee, Won Sup; Kim, Do Hyung; Moon, Hyungbae; Choi, Guk Jong; Jeon, Sungbin; Lim, Geon, Plasmonic optical waveguide using plasmonic coupling between nano-aperture and nano-particle.
    상세보기
  91. Nikolov,Anguel; Wang,Wang; Deng,Xuegong; Zhang,Wei; Blonder,Greg, Precision phase retardation devices and method of making same.
    상세보기
  92. Masunaga, Kumi; Fujimoto, Akira; Nakanishi, Tsutomu; Tsutsumi, Eishi; Kitagawa, Ryota; Asakawa, Koji; Nishizawa, Hideyuki, Process for manufacturing solar cell equipped with electrode having mesh structure.
    상세보기
  93. Nakauchi, Akihiro, Projection exposure apparatus and aberration measurement method.
    상세보기
  94. Nakauchi, Akihiro; Sato, Ryuichi, Projection exposure apparatus having aberration measurement device.
    상세보기
  95. Cui, Xiquan; Yang, Changhuei, Quantitative differential interference contrast (DIC) devices for computed depth sectioning.
    상세보기
  96. Won Ho Jhe KR; Myong R. Kim KR; Ki Hyun Kim KR, Recording medium having planar aperture array and fabrication method thereof, and near-field optical recording/reproducing device using same and method therefor.
    상세보기
  97. Pang, Shuo; Yang, Changhuei, Reflective focusing and transmissive projection device.
    상세보기
  98. Kuroda, Ryo; Mizutani, Natsuhiko; Yamaguchi, Takako; Inao, Yasuhisa; Yamada, Tomohiro, Sensor device and testing method utilizing localized plasmon resonance.
    상세보기
  99. Blumberg,Girsh; Dennis,Brian S, Spectral analysis with evanescent field excitation.
    상세보기
  100. Soer, Wouter Anthon; Banine, Vadim Yevgenyevich; Loopstra, Erik Roelof; Yakunin, Andrei Mikhailovich; Jak, Martin Jacobus Johan, Spectral purity filter.
    상세보기
  101. Blair, Steven M.; Diwekar, Mohit; Attavar, Sachin; Chagovetz, Alexander; Davis, Mark Alan; Dredge, John, Sub-wavelength metallic apertures as light enhancement devices.
    상세보기
  102. Zheng, Guoan; Yang, Changhuei; Yang, Samuel; Lee, Seung Ah, Super resolution optofluidic microscopes for 2D and 3D imaging.
    상세보기
  103. Stark,Peter Randolph Hazard, Surface plasmon enhanced illumination apparatus having non-periodic resonance configurations.
    상세보기
  104. Stark, Peter Randolph Hazard, Surface plasmon enhanced illumination system.
    상세보기
  105. Stark,Peter Randolph Hazard; Larson,Dale N., Surface plasmon enhanced illumination system.
    상세보기
  106. Kim,Dai Sik; Hohng,Sung Chul; Lienau,Christoph; Malyarchuck,Victor; Park,Jong Wan; Yoon,Yeo Chan; Ryu,Han Youl; Yoo,Kyeong Hwa, Surface plasmon optic devices and radiating surface plasmon sources for photolithography.
    상세보기
  107. Kim,Hong Koo; Sun,Zhijun; Jung,Yun Suk, Surface plasmon-enhanced nano-optic devices and methods of making same.
    상세보기
  108. Zheng, Guoan; Cui, Xiquan; Heng, Xin; Yang, Changhuei; Scherer, Axel, Surface wave assisted structures and systems.
    상세보기
  109. Tineke Thio, Surface-plasmon enhanced photovoltaic device.
    상세보기
  110. Pease, R. Fabian W.; Ye, Jun, System and method for aerial image sensing.
    상세보기
  111. Atwater, Harry A.; Burgos, Stanley; Yokogawa, Sozo, System and method for color imaging with integrated plasmonic color filters.
    상세보기
  112. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  113. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  114. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  115. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  116. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  117. Ye, Jun; Pease, R. Fabian W.; Chen, Xun, System and method for lithography process monitoring and control.
    상세보기
  118. Ye,Jun; Pease,R. Fabian W.; Chen,Xun, System and method for lithography process monitoring and control.
    상세보기
  119. Pang, Shuo; Yang, Changhuei, Talbot imaging devices and systems.
    상세보기
  120. Wu, Jigang; Pang, Shuo; Li, Zheng; Zheng, Guoan; Yang, Changhuei, Talbot-illuminated imaging devices, systems, and methods for focal plane tuning.
    상세보기
  121. Kim, Dae-Sik; Jeoung, Sae Chae; Lee, Joong Wook; Seo, Min Ah, Terahertz or infrared filter using shape resonance.
    상세보기
  122. Ogawa, Yuichi; Hayashi, Shinichiro; Kato, Eiji, Terahertz wave measuring apparatus having space arrangement structure and measuring method.
    상세보기
  123. Shaner, Eric A.; Wasserman, Daniel, Tunable surface plasmon devices.
    상세보기
  124. Wang, Jian, Universal broadband polarizer, devices incorporating same, and method of making same.
    상세보기
  125. Nakauchi, Akihiro; Sato, Ryuichi, Wavefront aberration measurement method and projection exposure apparatus.
    상세보기
  126. Cui, Xiquan; Yang, Changhuei; Tearney, Guillermo J., Wavefront imaging devices comprising a film with one or more structured two dimensional apertures and their applications in microscopy and photography.
    상세보기
  127. Cui, Xiquan; Yang, Changhuei, Wavefront imaging sensor.
    상세보기

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AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

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