초록

A method and apparatus for cooling different media which separately control the temperature of a plurality of chambers. A common refrigerant is used for cooling the different media.

대표청구항 ▼

[ What is claimed is:] [1.] An exposure apparatus having a main system for transcribing a pattern formed by a mask onto a plate through a projection lens, said apparatus comprising:a chamber enclosing said main system;a first supply system for supplying a first medium within said chamber;a second su

[ What is claimed is:] [1.] An exposure apparatus having a main system for transcribing a pattern formed by a mask onto a plate through a projection lens, said apparatus comprising:a chamber enclosing said main system;a first supply system for supplying a first medium within said chamber;a second supply system for supplying a second medium, different from said first medium, within said chamber;a cooling system for cooling said first and second media through a common refrigerant andwherein the first supply system supplies said first medium to said projection lens.