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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Fluid control device

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F16K-011/20   
미국특허분류(USC) 137/240 ; 137/606
출원번호 US-0853347 (1997-05-08)
우선권정보 JP-0116204 (1996-05-10)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Armstrong, Westerman, Hattori, McLeland and Naughton
인용정보 피인용 횟수 : 67  인용 특허 : 6
초록

A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.

대표
청구항
▼

[ What is claimed is:] [1.] A method for operating a fluid control device for alternatively passing one of three fluids of varying degrees of purity to be assured to a channel in a controller for regulating pressure or flow rate of fluids, said fluid control device including a valve main body having a main channel communicating with an inlet or an outlet of said channel in said controller, said main body further having three subchannels communicating with said main channel and separate actuators associated with the respective subchannels for alternativel...

이 특허에 인용된 특허 (6)

  1. George Mark (23 N. 12th St. Allentown PA 18102). Delivery of reactive gas from gas pad to process tool. USP1992085137047.
  2. Okumura Katsuya (Yokohama JPX) Sudo Yoshihisa (Niiza JPX) Goshima Kenichi (Kasugai JPX) Itafuji Hiroshi (Kasugai JPX) Kojima Akihiro (Kasugai JPX). Gas supplying system and gas supplying apparatus. USP1994115368062.
  3. Yokoyama Ikuo (Nobeoka JPX). Non-stagnant piping system. USP1995125476118.
  4. DeMild ; Jr. Leonard C. (Peabody MA). Radial gas manifold. USP1988054741354.
  5. Wienke Volker (Lbeck DEX) Scheel Heinrich (Lbeck DEX). Valve for a gas vessel. USP1988094768543.
  6. Hunkapiller, Michael W.. Zero dead volume valve. USP1985124558845.

이 특허를 인용한 특허 피인용횟수: 67

  1. Loeffler, Stephen D.; Wolf, Seth B.; Albrecht, Charles W.. Close-coupled purgeable vaporizer valve. USP2012028122903.
  2. Deng, David. Control valves for heaters and fireplace devices. USP2012118317511.
  3. Deng, David. Dual fuel control device with auxiliary backline pressure regulator. USP2015059022064.
  4. Mateos Martin, Ruben; Antxia Uribetxebarria, José Joaquin. Dual fuel gas heater. USP2014128899971.
  5. Deng, David. Dual fuel heater. USP2012108281781.
  6. Deng, David. Dual fuel heater. USP2013088516878.
  7. Deng, David. Dual fuel heater. USP2009107607426.
  8. Deng, David. Dual fuel heater. USP2011067967006.
  9. Mateos Martin, Ruben. Dual fuel heater. USP2013038403661.
  10. Mateos Martin, Ruben. Dual fuel heater. USP2014078777609.
  11. Mateos Martin, Ruben. Dual fuel heater. USP201702RE46308.
  12. Deng, David. Dual fuel heater with selector valve. USP20190310222057.
  13. Deng, David. Dual fuel heater with selector valve. USP2014128915239.
  14. Deng, David. Dual fuel heater with selector valve. USP2017099752782.
  15. Deng, David. Dual fuel heater with selector valve. USP2015109170016.
  16. Deng, David. Dual fuel heater with selector valve. USP2015129200802.
  17. Deng, David. Dual fuel heater with selector valve. USP2016129523497.
  18. Deng, David. Dual fuel heater with selector valve. USP2015119175848.
  19. Deng, David. Dual fuel heating assembly with reset switch. USP20190310240789.
  20. Deng, David. Dual fuel heating source. USP2013088517718.
  21. Deng, David. Dual fuel heating source. USP2014068757202.
  22. Deng, David. Dual fuel heating source with nozzle. USP2017119829195.
  23. Deng, David. Dual fuel heating system. USP20180910066838.
  24. Deng, David. Dual fuel heating system and air shutter. USP2015099140457.
  25. Deng, David. Dual fuel heating system and air shutter. USP2014068757139.
  26. Deng, David. Dual fuel heating system with pressure sensitive nozzle. USP2014108851065.
  27. Deng, David. Dual fuel valve with air shutter adjustment. USP2015079091431.
  28. Manning, John Stephen (Steve); Antxia Uribetxebarria, José Joaquín; Mateos Martin, Ruben. Dual fuel vent free gas heater. USP2012028118590.
  29. Manning, John Stephen (Steve); Antxia Uribetxebarria, José Joaquín; Mateos Martin, Ruben. Dual fuel vent free gas heater. USP2011118057219.
  30. Manning, Steve. Dual fuel vent free gas heater. USP2010087766006.
  31. Manning, Steve. Dual fuel vent free gas heater. USP2011118061347.
  32. Ohmi Tadahiro,JPX ; Hirao Keiji,JPX ; Minami Yukio,JPX ; Yamaji Michio,JPX ; Hirose Takashi,JPX ; Ikeda Nobukazu,JPX. Fluid control device. USP2001076257270.
  33. Deng, David. Fuel selectable heating devices. USP2012048152515.
  34. Deng, David. Fuel selection valve assemblies. USP2012088241034.
  35. Deng, David. Fuel selection valve assemblies. USP2015129200801.
  36. Hirose, Takashi; Yamaji, Michio. Gas supplying apparatus. USP2017019556966.
  37. Deng, David. Gas-fueled heater. USP2017029581329.
  38. Deng, David. Heat engine with nozzle. USP2013068465277.
  39. Deng, David. Heater configured to operate with a first or second fuel. USP2012088235708.
  40. Deng, David. Heater configured to operate with a first or second fuel. USP2016089416977.
  41. Deng, David. Heater configured to operate with a first or second fuel. USP2013108568136.
  42. Deng, David. Heater configured to operate with a first or second fuel. USP2010037677236.
  43. Deng, David. Heater configured to operate with a first or second fuel. USP2011067967007.
  44. Deng, David. Heating apparatus with air shutter adjustment. USP2013088506290.
  45. Deng, David. Heating apparatus with fan. USP2016099441840.
  46. Deng, David. Heating assembly. USP2016099441833.
  47. Deng, David. Heating assembly. USP2016129518732.
  48. Deng, David. Heating assembly. USP2017099752779.
  49. Deng, David. Heating system. USP2014068752541.
  50. Deng, David. Heating system. USP2015059021859.
  51. Deng, David. Heating system. USP2015038985094.
  52. Deng, David. Heating system. USP20180910073071.
  53. Deng, David. Heating system. USP2017089739389.
  54. Deng, David. Heating system with pressure regulator. USP2015129222670.
  55. Manofsky, Jr., William L.; Redemann, Eric J.; Julian, Donald H.. Manifold system for gas and fluid delivery. USP2015028950433.
  56. Ted G. Yoshidome ; Tushar Mandrekar ; Nitin Khurana ; Anish Tolia. Method and apparatus for removing processing liquid from a processing liquid path. USP2002026345642.
  57. Jean-Marc Girard FR; James McAndrew FR; Eric Duchateau FR; Bertrand Lefevre FR. Method and device for filling a distribution line with corrosive gas. USP2002126499502.
  58. Nguyen, Nhan. Modular fluid delivery apparatus. USP2004056729353.
  59. Deng, David. Oxygen depletion sensor. USP2010067730765.
  60. Deng, David. Pilot assemblies for heating devices. USP2012108297968.
  61. Itoh Masahito,JPX ; Inagaki Toshiyasu,JPX. Process gas supply unit. USP2001046209571.
  62. Somani, Bhushan. Real time diagnostics for flow controller systems and methods. USP20180810054959.
  63. Deng, David. Safety pressure switch. USP2016089423123.
  64. Deng, David. Valve assemblies for heating devices. USP2013108545216.
  65. Deng, David. Valve assemblies for heating devices. USP2016059328922.
  66. Deng, David. Valve assemblies for heating devices. USP2014078764436.
  67. Deng, David. Valve assemblies for heating devices. USP2011098011920.

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