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Scrubber control system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05B-015/00
  • G06F-017/00
출원번호 US-0687977 (1996-07-29)
발명자 / 주소
  • Simmons Mark A.
  • McGrath Martin J.
  • Thrasher David L.
출원인 / 주소
  • OnTrak Systems, Inc.
대리인 / 주소
    Blakely, Sokoloff, Taylor & Zafman LLP
인용정보 피인용 횟수 : 19  인용 특허 : 20

초록

A control system. An apparatus having a motor; a host processor for generating a message containing motor control information; a control board for receiving the message and for transmitting a command, corresponding to the message, to the motor; and a communications medium coupling the host processor

대표청구항

[ What is claimed is:] [10.] A control system comprising:a slave controlling a first motor in response to receipt of a first message addressed to the slave;a host processor for executing a multi-tasking operating system, a control process to initiate an action by the slave, and a transmit process to

이 특허에 인용된 특허 (20)

  1. Frank Walter (Burgkirchen DEX) Pemwieser Albert (Ach ATX) Spatzier Gerhard (Eggelsberg ATX), Apparatus and method of automatically separating stacked wafers.
  2. Hillman Gary (Livingston NJ) Devico Michael J. (Chatham NJ), Automated single cassette load mechanism for scrubber.
  3. Mowers David L. (Muskegon MI) LaMantia Santo A. (Woodridge IL) Mueller David J. (Naperville IL) Barczyk Victor S. (Upland CA) Pierce Gerald A. (Redwood City CA) Wyland David C. (San Jose CA), Automatic bowling center system.
  4. Kudo Hideo (Fukushima JPX), Automatic cleaning apparatus for disks.
  5. Gill ; Jr. Gerald L. (3502 E. Atlanta Ave. Phoenix AZ 85040), Centrifugal spin dryer for semiconductor wafer.
  6. Fleming ; Alan J. ; Holmstrom ; Larry W., Computer controlled distribution apparatus for distributing transactions to and from controlled machine tools having me.
  7. Yamamoto Toshihiro (Yokohama JPX) Yasuhara Masateru (Kawasaki JPX), Controller for automated apparatus, and method of controlling said apparatus.
  8. Muller Alois (Tann DEX) Seidl Helmut (Burghausen DEX) Wimmer Erich (Stammham DEX) Eigner Laszlo (Kirchdorf DEX), Device for transporting and positioning semiconductor wafer-type workpieces.
  9. Burney Roger D. (Sunnyvale CA), Distributed routing unit for fully-automated flexible manufacturing system.
  10. Lutz Rick A. (San Jose CA), Double-sided wafer scrubber with a wet submersing silicon wafer indexer.
  11. Schiller Robert J. (Simsbury CT) Alderman Neal M. (Manchester CT), Fuel delivery control and registration system.
  12. Tam Johann (Santa Clara CA), Method and apparatus for drying wafers.
  13. Steck Ricky B. (West Jordan UT), Method for rinsing, cleaning and drying silicon wafers.
  14. Burks Rupert T. (New York NY) Boska Joseph M. (Sandy UT), Product distribution equipment and method.
  15. Floro William E. (Willoughby Hills OH) Burkholder Raymond R. (Stowe OH), Programmable controller for stepping motor control.
  16. Dummermuth Ernst (Chesterland OH), Programmable controller with intelligent positioning I/O modules.
  17. Maskovyak George D. (Parma OH), Programmable controller with module identification and diagnostic mechanism.
  18. Aigo Seiichiro (3-15-13 Negishi ; Daito-ku JPX), Spin drier for semiconductor material.
  19. Campbell ; Jr. Robert L. (Hickory NC), Uncoordinated machine initialization system and method.
  20. Ohtani Masami (Kyoto JPX) Nishida Masami (Kyoto JPX), Wafer transfer apparatus having an improved wafer transfer portion.

이 특허를 인용한 특허 (19)

  1. Wyatt, Christopher K.; Fox, Ivan E., Control systems and methods for electric drive utility vehicles.
  2. Hauser, Raymond; Wyatt, Christopher K.; Todd, Michael; Rousser, Donald; Fox, Ivan E.; Butler, Josh, Controller assemblies for electric drive utility vehicles.
  3. Combs, Charles R.; Knapke, James P.; Petrov, Dimitar I.; Barnes, Timothy A.; Sellers, David W., Conveyor controllers.
  4. Combs, Charles R.; Knapke, James P.; Petrov, Dimitar I.; Barnes, Timothy A.; Sellers, David W., Conveyor controllers.
  5. Combs, Charles R.; Knapke, James P.; Petrov, Dimitar Ivanov; Barnes, Timothy A.; Sellers, David W., Conveyor controllers.
  6. Wyatt, Christopher K.; Fox, Ivan E., Electric drive vehicle control system.
  7. Wyatt, Christopher K.; Fox, Ivan E., Electric drive vehicle control system.
  8. Wyatt, Christopher K.; Fox, Ivan E., Electric drive vehicle control system.
  9. Ko,Clyde Miin Arng; Carlson,Randall J; Sinen,Roger L; Triesenberg,Thomas H; Lemke,Donald E, Integrated control card for conveying systems.
  10. Yeh Renn-Shyan,TWX ; Huang Der-Fang,TWX ; Lin Tzu-Yu,TWX ; Chang Chao-Hsin,TWX, Method for determining stress effect on a film during scrubber clean.
  11. Extra, Johannes; Jartyn, Hermann, Method for transmitting telegrams between a control device and a peripheral element via an intermediate device.
  12. Wall, Simon R.; Gilbreth, Mark G.; Wacknov, Joel B., Multiple power generator connection method and system.
  13. Phipps,William H.; Bell,Scott J.; Rodriguez,Alberto; Rommelmann,Heiko; Boucher,Ronald P., Replaceable unit monitor reader with auto polling capabilities.
  14. Hessburg Merilly Ann ; Lindsley Timothy John ; Darrow David Craig ; Sheffield John Edgar, System and method for hydrodynamic loading and unloading of objects into and out of substantially touchless hydrodynamic transport systems.
  15. Red, Walter E.; Baxter, Michael S.; Thompson, Daniel J., Systems and methods for controlling and monitoring multiple electronic devices.
  16. Liu, Zhi (Lewis); Kashkoush, Ismail; Lee, Hanjoo, Systems and methods for drying a rotating substrate.
  17. Liu, Zhi (Lewis); Kashkoush, Ismail; Lee, Hanjoo, Systems and methods for drying a rotating substrate.
  18. Liu, Zhi Lewis; Lee, Hanjoo; Kashkoush, Ismail, Systems and methods for drying a rotating substrate.
  19. Liu, Zhi Lewis; Lee, Hanjoo; Kashkoush, Ismail, Systems and methods for drying a rotating substrate.
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