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Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/22
  • B01D-053/047
출원번호 US-0046092 (1998-03-23)
발명자 / 주소
  • Yang James Hsu-Kuang
  • Chernyakov Iosif
  • Hsiung Thomas Hsiao-Ling
  • Schwarz Alexander
출원인 / 주소
  • Air Products and Chemicals, Inc.
대리인 / 주소
    Chase
인용정보 피인용 횟수 : 26  인용 특허 : 36

초록

A process for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane system in combination with an adsorption system, the adsorption system used either before or after the membrane system. In either c

대표청구항

[ We claim:] [1.] A process for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane, comprising the steps of:(a) compressing a gas stream containing a diluent gas and fluorochemicals to an elevated

이 특허에 인용된 특허 (36)

  1. Prasad Ravi, Advanced membrane system for separating gaseous mixtures.
  2. Prasad Ravi ; Cook Pauline Jane ; Gottzman Christian Friedrich, Air separation system and method.
  3. Xu Jianguo (Fogelsville PA), Compressed permeate sweep membrane separation process.
  4. Jin Yijian (Tonawanda NY) Fisher Theodore F. (Amherst NY), Cryogenic rectification system for fluorine compound recovery.
  5. Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander ; Yang James Hsu-Kuang, Fluorochemical recovery and recycle using membranes.
  6. Heki ; Hideaki ; Ozaki ; Osamu ; Ohno ; Masayoshi, Gas separator.
  7. Xu Jianguo (Fogelsville PA), High pressure feed membrane separation process.
  8. Prasad Ravi (East Amherst NY), High purity membrane nitrogen.
  9. Prasad Ravi (East Amherst NY) Notaro Frank (Amherst NY) Haas Oscar W. (Cheektowaga NY), Hybrid prepurifier for cryogenic air separation plants.
  10. Rao Madhukar B. (Allentown PA) Sircar Shivaji (Wescosville PA) Abrardo Joseph M. (Schnecksville PA) Baade William F. (Breinigsville PA), Hydrocarbon fractionation by adsorbent membranes.
  11. Graham Tommy E. (Raleigh NC), Membrane gas separation processes.
  12. Campbell Michael J. (Clarence Center NY) Smolarek James (Boston NY) Van Lente Timothy S. (Buffalo NY), Membrane separation system and process.
  13. Campbell Michael J. (Clarence Center NY) Smolarek James (Boston NY) Van Lente Timothy S. (Buffalo NY), Membrane separation system and process.
  14. Choe Jun S. (Harleysville PA) Kellogg ; Jr. Lyndon J. (Slatington PA), Membrane-assisted process to produce ammonia.
  15. Kusuki Yoshihiro (Ichihara JPX) Ishihara Kazuhiko (Minato JPX), Method of preparing high purity light gas by multiple-step gas separation.
  16. Sircar Shivaji (Wescosville PA), Moisture removal from a wet gas.
  17. Callahan Richard A. (Burlington VT), Multiple stage semi-permeable membrane process and apparatus for gas separation.
  18. Barbe Christian (Paris Cedex FRX) Masurel Dominique (Paris Cedex FRX), Multistage cascade-sweep process for membrane gas separation.
  19. Nemser Stuart M. (Wilmington DE) Roman Ian C. (Wilmington DE), Perfluorodioxole membranes.
  20. Fuentes Franois (Paris FRX) Dolle Pierre-Olivier (Levallois-Perret FRX) Willemot Antoine (Sceaux FRX) Barry Lionel (Versailles FRX) Fillet Frederic (Issy les Moulineaux FRX) Gelot Jean-Louis (Elancou, Process and apparatus for separation of a gaseous mixture by successive membranes of different selectivities.
  21. Brugerolle Jean-Renaud (Paris FRX) Ferenczi Laurent (Paris FRX), Process and equipment for separating a component of intermediate permeability from a gaseous mixture.
  22. Li Yao-En ; Duchateau Eric L., Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases.
  23. Li Yao-En ; Paganessi Joseph E. ; Vassallo David ; Fleming Gregory K., Process and system for separation and recovery of perfluorocompound gases.
  24. Rice Arthur W. (O\Fallon MO), Process for capturing nitrogen from air using gas separation membranes.
  25. Burr Peter S. (Munich DEX), Process for fractionation of a gaseous mixture employing side stream withdrawal, separation, and recycle.
  26. Li Yao-En, Process for recovering CF.sub.4 and C.sub.2 F.sub.6 from a gas.
  27. Li Yao-En ; Meimari Magdy,CAX, Process for recovering SF6 from a gas.
  28. Choe Jung S. (Allentown PA) Agrawal Rakesh (Allentown PA) Auvil Steven R. (Macungie PA), Process for recovering helium from a multi-component gas stream.
  29. Auvil Steven R. (Macungie PA) Agrawal Rakesh (Allentown PA), Process for recovering hydrogen from a multi-component gas stream.
  30. Anumakonda Amar ; Gaita Romulus ; Yates Stephen ; Zhou Jim, Process for recovering sulfur hexafluoride.
  31. Graham Tommy E. (Raleigh NC), Process for separating aggressive gases from gas mixtures.
  32. O'Brien William G. ; Mahler Barry A., Process for separating and recovering fluorocarbons and HCI from gaseous mixtures thereof.
  33. Choe Jung S. (Allentown PA) Auvil Steven R. (Macungie PA) Agrawal Rakesh (Allentown PA), Process for separating components of a gas stream.
  34. Graham Tommy E. (Raleigh NC) MacLean Donald L. (Raleigh NC), Processes.
  35. McNeill John M. (14021 Marquesas Way Marina Del Rey CA 90292), Production of membrane-derived nitrogen from combustion gases.
  36. Tamhankar Satish S. (Scotch Plains NJ) Ramachandran Ramakrishnan (Allendale NJ) Blow Martin (Basking Ridge NJ) Galica Theodore R. (Glen Gardner NJ), Removal of perfluorocarbons from gas streams.

이 특허를 인용한 특허 (26)

  1. Yamamoto, Osamu; Kinouchi, Masayuki; Takada, Naoki; Kase, Yoji; Kikuchi, Masao, Device and method for separating and collecting halide gas.
  2. Abe, Tetsuya; Tanzawa, Sadamitsu; Hiroki, Seiji; Tajima, Yoshinori; Futatsuki, Takashi, Gas separation apparatus.
  3. Abe, Tetsuya; Tanzawa, Sadamitsu; Hiroki, Seiji; Tajima, Yoshinori; Futatsuki, Takashi, Gas separation apparatus.
  4. Tajima, Yoshinori; Futatsuki, Takashi, Gas separation apparatus and gas separation method.
  5. Pittroff, Michael; Schwarze, Thomas; Belt, Heinz-Joachim, Isolation of SF6 from insulating gases in gas-insulated lines.
  6. Ishihara, Yoshio; Hayashida, Shigeru; Nagasaka, Toru; Kimijima, Tetsuya; Ohmi, Tadahiro, Method and apparatus for collecting rare gas.
  7. Fumio Kawasaki JP; Rosuke Matsubayashi JP, Method and apparatus for separating and recovering perfluoro compound.
  8. Yao-En Li, Method and apparatus for separation of SF6 from CF4 /air-containing gas stream.
  9. Belt, Heinz-Joachim; Pittroff, Michael; Rieland, Matthias; Schwarze, Thomas, Method for recovering and/or separating sulfur oxyfluorides from gas mixtures.
  10. Ezell, Edward Frederick; Hogle, Richard A.; Whitlock, Walter H.; McFarlane, Graham A., Method of recycling fluorine using an adsorption purification process.
  11. Chandler, Phil; Clark, Daniel O.; Vermeulen, Robbert M.; Jung, Jay J.; Johnson, Roger M.; Loldj, Youssef A.; Smith, James L., Methods and apparatus for assembling and operating electronic device manufacturing systems.
  12. Raoux, Sebastien; Curry, Mark W.; Porshnev, Peter; Fox, Allen, Methods and apparatus for improving operation of an electronic device manufacturing system.
  13. Curry, Mark W.; Raoux, Sebastien; Porshnev, Peter, Methods and apparatus for pressure control in electronic device manufacturing systems.
  14. Chiu, Ho-Man Rodney; Clark, Daniel O.; Crawford, Shaun W.; Jung, Jay J.; Loldj, Youssef A.; Vermeulen, Robbert M., Methods and apparatus for smart abatement using an improved fuel circuit.
  15. Arman, Bayram; Prosser, Neil Mark; Rashad, M. Abdul-Aziz; Howard, Henry Edward, Multicomponent refrigerant fluids for low and cryogenic temperatures.
  16. Nozomu Tanihara JP; Yoshihiro Kusuki JP, Partially carbonized asymmetric hollow fiber separation membrane, process for its production, and gas separation method.
  17. Yao-En Li ; Jospeh E. Paganessi ; David Vassallo ; Gregory K. Fleming, Process and system for separation and recovery of perfluorocompound gases.
  18. Park, Yong Chul; Jeong, Woo Sik; Hyun, Kwang Chul; Lee, Jang Won; Kwon, Ik Hyeon, Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite.
  19. Park, Yong-Chul; Jeong, Woo-Sik; Hyun, Kwang-Chul; Lee, Jang-Won; Kwon, Ik-Hyeon, Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite.
  20. Fraysse, Philippe, Process for removing the fluorocompounds or fluorosulphur compounds from a stream of xenon and/or krypton by permeation.
  21. Nel, Johannes Theodorus; Van Der Walt, Izak Jacobus; Grunenberg, Alfred Teo; Bruinsma, Odolphus Simon Leo; Le Roux, Marco; Krieg, Henning Manfred; Marx, Sanette, Recovery of a gaseous component from a mixture of gaseous compounds.
  22. Roh, Young-Seok, Separation and recycling system of perfluorinated compounds.
  23. Henderson, Philip Bruce; Golden, Timothy Christopher, Separation of C2F6 from CF4 by adsorption on activated carbon.
  24. Michael Pittroff DE; Thomas Schwarze DE; Heinz-Joachim Belt DE; Pierre Barthelemy BE, Separation of gases containing SF6.
  25. Sadakata Takayuki,JPX ; Yoshinaga Hiroshi,JPX ; Ozaki Katsuhiro,JPX, System and method for discharging gas.
  26. Arun Acharya ; Bayram Arman ; Walter Joseph Olszewski ; Dante Patrick Bonaquist ; Joseph Alfred Weber, Variable load refrigeration system particularly for cryogenic temperatures.
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