초록 ▼

A gas flow pass has a gas flow direction deflecting member arranged in the gas flow pass for deflecting a gas flow direction outward with respect to a center of the gas flow pass, and a foreign substance trapping member arranged at a downstream position of the gas flow direction deflecting member an

A gas flow pass has a gas flow direction deflecting member arranged in the gas flow pass for deflecting a gas flow direction outward with respect to a center of the gas flow pass, and a foreign substance trapping member arranged at a downstream position of the gas flow direction deflecting member and arranged on a part of or all of an inner surface of the gas flow pass. Therefore, it is possible to obtain the gas flow pass which can prevent a damage of the foreign substances in the gas flow and have a long term reliability.

대표청구항 ▼

[ What is claimed is:] [1.] A gas flow Pass having a gas flow direction deflecting means located therein for deflecting a gas flow direction outward with respect to the center of said gas flow pass, and a foreign substance trapping means located at a downstream position of said gas flow direction de

[ What is claimed is:] [1.] A gas flow Pass having a gas flow direction deflecting means located therein for deflecting a gas flow direction outward with respect to the center of said gas flow pass, and a foreign substance trapping means located at a downstream position of said gas flow direction deflecting means and located on at least a part of an inner surface of said gas flow pass,wherein, an inner diameter of a gas passing portion of said gas flow sass at said foreign substance trapping means is D, a depth in a radial direction of said foreign substance trapping means is t, and a length in a gas flow direction of said foreign substance trapping means is L, a ratio of t/D is larger than 0.1 and a ratio of L/t is larger than 2 preferably larger than 3.