초록 ▼

A substrate support apparatus for supporting one or more substrates in a substrate carrier for achieving a minimum amount of sagging of the substrates. A first support rod is positioned to support one side of each substrate along a first support contact line and a second support rod is positioned to

A substrate support apparatus for supporting one or more substrates in a substrate carrier for achieving a minimum amount of sagging of the substrates. A first support rod is positioned to support one side of each substrate along a first support contact line and a second support rod is positioned to support the other side of the substrate along a second support contact line. The first and second support contact lines are referenced to a centerline of the substrate. In particular, both contact lines are offset by a certain distance on either side of the centerline, where the particular offset of the support lines is determined by finite element analysis of the substrate to achieve as little sag as possible. The rod support member preferably includes two cantilevered beams mounted on either side of each of the support rods. Also, a plurality of support rods and corresponding rod support members are provided for supporting as many substrates as necessary in the carrier. In one embodiment, a single support rod is provided for each contact support line, where the rod may extend the entire length of the substrate. In another embodiment, two support rods are provided for each contact support line, the total length of each pair of rods being less than the length of the substrate.

대표청구항 ▼

[ I claim:] [1.] A substrate support apparatus for supporting at least one substrate in a substrate carrier, comprising:a first support for mounting to the substrate carrier and positioned to support a substrate at a plurality of points along a first support line on a surface and substantially offse

[ I claim:] [1.] A substrate support apparatus for supporting at least one substrate in a substrate carrier, comprising:a first support for mounting to the substrate carrier and positioned to support a substrate at a plurality of points along a first support line on a surface and substantially offset from a peripheral edge of the substrate; anda second support for mounting to the substrate carrier and positioned to support the substrate at a plurality of points along a second support line on the surface and substantially offset from the peripheral edge of the substrate, wherein the first and second supports support the substrate with reduced sag.