초록 ▼

Method and apparatus for growing semiconductor grade silicon carbide boules (84). Pure silicon feedstock (36) is melted and vaporized. The vaporized silicon is reacted with a high purity carbon-containing gas (64), such as propane, and the gaseous species resulting from the reaction are deposited on

Method and apparatus for growing semiconductor grade silicon carbide boules (84). Pure silicon feedstock (36) is melted and vaporized. The vaporized silicon is reacted with a high purity carbon-containing gas (64), such as propane, and the gaseous species resulting from the reaction are deposited on a silicon carbide seed crystal (50), resulting in the growth of monocrystalline silicon carbide.

대표청구항 ▼

[ What is claimed is:] [1.] A method of growing a high purity single crystal silicon carbide boule within the interior of a physical vapor transport furnace system comprising the steps of:(A) placing a seed crystal within said furnace system in a growth structure having a growth cavity therein to ac

[ What is claimed is:] [1.] A method of growing a high purity single crystal silicon carbide boule within the interior of a physical vapor transport furnace system comprising the steps of:(A) placing a seed crystal within said furnace system in a growth structure having a growth cavity therein to accommodate crystal growth along a vertical longitudinal axis, with said growth structure surrounding said vertical longitudinal axis;(B) placing a high purity silicon feedstock in a receptacle below said growth cavity and in line with said longitudinal axis, defining a reaction zone located between said receptacle and said growth structure;(C) heating said silicon to a temperature sufficient to melt and vaporize said silicon;(D) heating said seed crystal to a temperature of at least 2000.degree. C. sufficient to promote crystal boule growth;(E) introducing a high purity carbon-containing gas into the interior of said furnace system from a source outside of said furnace system to react with said vaporized silicon, in said reaction zone;(F) maintaining a temperature distribution within said furnace system to cause silicon carbide boule growth along said longitudinal axis by deposition of silicon carbide onto said seed crystal as a result of said reaction of said high purity carbon-containing gas with said vaporized silicon.