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Evacuation-driven SMIF pod purge system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/04
출원번호 US-0049461 (1998-03-27)
발명자 / 주소
  • Fosnight William J.
  • Bonora Anthony C.
  • Martin Raymond S.
  • Tatro Jay
출원인 / 주소
  • Asyst Technologies, Inc.
대리인 / 주소
    Fliesler, Dubb, Meyer & Lovejoy LLP
인용정보 피인용 횟수 : 55  인용 특허 : 4

초록

A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at th

대표청구항

[ We claim:] [1.] A purge system for providing a controlled and uniform flow of gas through a pod, comprising:an inlet to the pod capable of receiving a pressurized gas;an outlet from the pod capable of allowing gas to be drawn from the pod;a low pressure source for generating a negative pressure; a

이 특허에 인용된 특허 (4)

  1. Bonora Anthony C. (Menlo Park CA) Guerre Gilles (Les Loges en Josas CA FRX) Parikh Mihir (San Jose CA) Rosenquist Frederick T. (Redwood City CA) Jain Sudhir (Santa Clara CA), Method and apparatus for transferring articles between two controlled environments.
  2. Yamashita Teppei,JPX ; Murata Masanao,JPX ; Tanaka Tsuyoshi,JPX ; Kawano Hitoshi,JPX ; Morita Teruya,JPX, Portable closed container.
  3. Ushikawa Harunori (Kofu JPX), Treating device.
  4. Bonora Anthony C. ; Wartenbergh Robert P. ; Gomes Christopher, Two stage valve for charging and/or vacuum relief of pods.

이 특허를 인용한 특허 (55)

  1. Naylor, Stuart, Apparatus for purging containers for storing sensitive materials.
  2. Takahara, Masahiro; Ueda, Toshihito, Article storage facility and article storage method.
  3. Takahara, Masahiro; Ueda, Toshihito, Article storage facility and article storage method.
  4. Fosnight, William; Banner, Isaac Sarek; Miner, Stephen Bradley, Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port.
  5. Babbs, Daniel; Fosnight, William, Carrier gas system and coupling substrate carrier to a loadport.
  6. Miyajima Toshihiko,JPX, Clean box, clean transfer method and apparatus therefor.
  7. Friedman, Gerald M.; Bufano, Michael L.; Hofmeister, Christopher; Gilchrist, Ulysses; Fosnight, William, Elevator-based tool loading and buffering system.
  8. Friedman, Gerald M.; Bufano, Michael L.; Hofmeister, Christopher; Gilchrist, Ulysses; Fosnight, William, Elevator-based tool loading and buffering system.
  9. Friedman, Gerald M.; Bufano, Michael L.; Hofmeister, Christopher; Gilchrist, Ulysses; Fosnight, William, Elevator-based tool loading and buffering system.
  10. Miyajima, Toshihiko; Suzuki, Hitoshi; Igarashi, Hiroshi, Enclosed container lid opening/closing system and enclosed container lid opening/closing method.
  11. Aggarwal, Ravinder, Front opening unified pod.
  12. Natsume, Mitsuo; Ochiai, Mitsutoshi; Mizokawa, Takumi, Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method.
  13. Wang, Sheng-Hung; Chiu, Ming-Long, Gas filling apparatus.
  14. Wang, Sheng-Hung; Chiu, Ming-Long, Gas filling apparatus.
  15. Shuen, Pan Yung; Chen, Li Nien, Gas filling apparatus for photomask box.
  16. Murata, Masanao; Yamaji, Takashi, Gas injection device and assisting member.
  17. Emoto, Jun; Iwamoto, Tadamasa, Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method.
  18. Iwamoto, Tadamasa, Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method.
  19. Okabe, Tsutomu; Miyajima, Toshihiko; Suzuki, Hitoshi, Gas replacement system.
  20. Shin, Takeshi; Nishikawa, Tadashi; Takahara, Masahiro; Ueda, Toshihito, Inactive gas supply facility and inactive gas supply method.
  21. Natsume, Mitsuo; Kawahisa, Shin; Mizokawa, Takumi, Load port.
  22. Tominaga, Tadamasa, Load port device, transport system, and container carrying out method.
  23. Jeong, Gyu-Chan; Kim, Ki-Sang, Load port of a semiconductor manufacturing apparatus having integrated kinematic coupling pins and sensors, and method of loading wafers using the same.
  24. Lai, Wei-Yu; Chen, Hung-Wen, Mechanisms for charging gas into cassette pod.
  25. Kaise, Seiichi; Amemiya, Shigeki; Onodera, Shinobu; Fujita, Hiroki; Nishino, Masaru; Rikukawa, Atsushi, Method for purging a substrate container.
  26. Spiegelman, Jeffrey J.; Alvarez, Jr., Daniel; Holmes, Russell J.; Tram, Allan, Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures.
  27. Tokunaga, Kenji, Method of purging wafer receiving jig, wafer transfer device, and method of manufacturing semiconductor device.
  28. Chen, Ching-hua, Method of stabilizing material layer.
  29. Shah, Vinay K.; Englhardt, Eric; Hudgens, Jeffrey C.; Elliott, Martin, Methods and apparatus for purging a substrate carrier.
  30. Shah, Vinay K.; Englhardt, Eric; Hudgens, Jeffrey C.; Elliott, Martin R., Methods and loadport apparatus for purging a substrate carrier.
  31. Shah, Vinay K.; Englhardt, Eric; Hudgens, Jeffrey C.; Elliott, Martin R., Methods and loadport for purging a substrate carrier.
  32. Roland Bernard FR; Eric Chevalier FR, Mini-environment control system and method.
  33. Fosnight William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  34. Fosnight,William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  35. Fosnight William J. ; Shenk Joshua W., Passively activated valve for carrier purging.
  36. Otsuka, Hiroshi; Kawamura, Shinsuke; Yoshimoto, Tadahiro, Processing facility.
  37. Goto, Fumiki; Adachi, Naruto, Purge apparatus.
  38. Tieben, Anthony Mathius; Halbmeier, David L.; Kolbow, Steven P., Purge system for a substrate container.
  39. Miyajima, Toshihiko; Igarashi, Hiroshi; Suzuki, Hitoshi, Purging apparatus and purging method.
  40. Miyajima,Toshihiko; Kagaya,Takeshi; Suzuki,Hitoshi; Sasaki,Mutsuo, Purging system and purging method for the interior of a portable type hermetically sealed container.
  41. Gilchrist, Ulysses; Bufano, Michael L.; Fosnight, William; Hofmeister, Christopher; Friedman, Gerarld M., Reduced capacity carrier and method of use.
  42. Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Friedman, Gerald M.; Bufano, Michael L., Reduced capacity carrier and method of use.
  43. Rice, Michael Robert; Hudgens, Jeffrey C., Sealed substrate carriers and systems and methods for transporting substrates.
  44. Rice, Michael Robert; Hudgens, Jeffrey C., Sealed substrate carriers and systems and methods for transporting substrates.
  45. Babbs, Daniel; Fosnight, William; May, Robert C.; Weaver, William, Side opening unified pod.
  46. Babbs, Daniel; Fosnight, William; May, Robert C.; Weaver, William, Side opening unified pod.
  47. Tieben, Anthony Mathius; Lystad, John; Halbmaier, David L., Substrate container with fluid-sealing flow passageway.
  48. Tieben,Anthony Mathius; Lystad,John; Halbmaier,David L., Substrate container with fluid-sealing flow passageway.
  49. Smith, Mark V.; Burns, John, Substrate container with purge ports.
  50. Ra, Byung-Koog; Yun, Tae-Sik; Lee, Kunhyung; Kim, Hyunjoon; Kim, Hyeogki; Kim, KiDoo, Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same.
  51. Aggarwal, Ravinder; Kusbel, Jim; Alexander, Jim, System for the improved handling of wafers within a process tool.
  52. Dickinson, Colin John; Murphy, Daimhin Paul, Vacuum load lock, system including vacuum load lock, and associated methods.
  53. Hitoshi Murayama JP; Tatsuyuki Aoike JP; Toshiyasu Shirasuna JP; Kazuyoshi Akiyama JP; Takashi Ohtsuka JP; Daisuke Tazawa JP; Kazuto Hosoi JP; Yukihiro Abe JP, Vacuum processing methods.
  54. Fosnight, William J.; Waite, Stephanie; Miner, Stephen B.; Robinson, John, Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication.
  55. Fosnight, William J.; Waite, Stephanie; Miner, Stephen B.; Robinson, John, Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication.
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