초록 ▼

A substrate holding apparatus holds a rotating substrate without idly rotating the substrate and keeps the substrate in proper balance while the substrate is rotated. In a revolvable holding member, a column-shaped holding part is disposed on a top surface of a column-shaped supporting part, at an e

A substrate holding apparatus holds a rotating substrate without idly rotating the substrate and keeps the substrate in proper balance while the substrate is rotated. In a revolvable holding member, a column-shaped holding part is disposed on a top surface of a column-shaped supporting part, at an eccentric position with respect to a rotation axis of the supporting part. The revolvable holding member is supported by a rotation base for free rotation, and linked to a magnet holding part which incorporates a permanent magnet. On the other hand, a ring-shaped magnet which is disposed in a processing liquid collecting cup is freely driven by an air cylinder in a vertical direction. As the ring-shaped magnet is moved upward or downward and crosses a predetermined line as viewed in a positional relationship relative to the permanent magnet, which is at a height where the permanent magnet is disposed, the direction of a magnetic line of flux of the ring-shaped magnet is reversed. As a result, the direction of the revolving force which acts upon the permanent magnet is reversed, whereby the revolvable holding member holds or releases a substrate.

대표청구항 ▼

[ We claim:] [1.] An apparatus for holding a substrate, which is used in a unit for processing said substrate by rotating said substrate, said apparatus comprising:a) a rotational stage for rotating around a first axis;b) fixed holding means for restricting a position of said substrate by being in c

[ We claim:] [1.] An apparatus for holding a substrate, which is used in a unit for processing said substrate by rotating said substrate, said apparatus comprising:a) a rotational stage for rotating around a first axis;b) fixed holding means for restricting a position of said substrate by being in contact with an edge of said substrate, said fixed holding means being fixed on said rotational stage;c) movable holding means for holding said substrate, said movable holding means being movably supported on said rotational stage and connected with first magnetic means;d) second magnetic means for generating a magnetic field and applying said magnetic field to said first magnetic means, said second magnetic means being arranged outside of said rotational stage; ande) inversion means for inverting direction of said magnetic field at said first magnetic means; rein said movable holding means is capable of holding said substrate in contact with said edge of said substrate and releasing said substrate in response to inversion of said direction of said magnetic field.