초록 ▼

Apparatus for cleaning, assembling, testing and inspecting contamination sensitive hardware. The apparatus includes an environmental process enclosure having an inner processing chamber, and a carbon dioxide jet spray cleaning system. The enclosure includes a loadlock pass-through having front and r

Apparatus for cleaning, assembling, testing and inspecting contamination sensitive hardware. The apparatus includes an environmental process enclosure having an inner processing chamber, and a carbon dioxide jet spray cleaning system. The enclosure includes a loadlock pass-through having front and rear access doors for providing access to the inner processing chamber. A blower is disposed in the enclosure for circulating purified gas therethrough. A prefilter disposed prior to an inlet of the blower, and a high purity filter and laminar flow screen are disposed in the inner processing chamber. A heater is provided for heating the purified gas and a temperature controller is coupled to the heater for controlling the temperature of the purified gas. A table is disposed in the inner processing chamber upon which contamination sensitive hardware and testing and assembly apparatus may be placed. The carbon dioxide jet spray cleaning system includes a carbon dioxide delivery system for storing liquid carbon dioxide, and a valve assembly coupled to the carbon dioxide tank that is disposed in the inner processing chamber. The valve assembly is coupled to a nozzle and orifice assembly, which produces a spray of gas and solid carbon dioxide that is used to clean the contamination sensitive hardware.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for use with contamination sensitive hardware, said apparatus comprising:an environmental process enclosure having an inner processing chamber;a loadlock pass-through communicating with said enclosure, said loadlock pass-through having front and rear access d

[ What is claimed is:] [1.] An apparatus for use with contamination sensitive hardware, said apparatus comprising:an environmental process enclosure having an inner processing chamber;a loadlock pass-through communicating with said enclosure, said loadlock pass-through having front and rear access doors for providing access to the inner processing chamber;a blower and at least one filter disposed in said inner processing chamber for circulating purified gas through the enclosure;a heater communicating with said enclosure for heating the purified gas;a temperature controller coupled to the heater for controlling the temperature of the purified gas;means disposed in the inner processing chamber for supporting said contamination sensitive hardware; anda carbon dioxide jet spray cleaning system disposed in the inner processing chamber for cleaning said contamination sensitive hardware, said cleaning system comprising:a carbon dioxide delivery system for storing liquid carbon dioxide; anda nozzle and orifice assembly connected to the carbon dioxide delivery system, which nozzle and orifice assembly produces a spray of gas and solid carbon dioxide that is directed towards said contamination sensitive hardware to clean the contamination sensitive hardware;wherein said contamination sensitive hardware is selected from the group consisting of optical disk drives, hard disk drives, and pick-up heads for optical or hard disk drives, said apparatus further comprising testing means including a test assembly coupled to the contamination sensitive hardware and coupled to a computer to read and write data to a test disk to test the contamination sensitive hardware.