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Apparatus and method for sensing motion in a microelectro-mechanical system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01D-005/34
출원번호 US-0018456 (1998-02-04)
발명자 / 주소
  • Dickey Fred M.
  • Holswade Scott C.
출원인 / 주소
  • Sandia Corporation
대리인 / 주소
    Hohimer
인용정보 피인용 횟수 : 46  인용 특허 : 9

초록

An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature

대표청구항

[ What is claimed is:] [1.] Optical apparatus for sensing motion of a moveable member in a microelectromechanical system formed on a substrate, comprising:(a) source means located proximate to the microelectromechanical system for generating light and directing the light to intercept a corrugated po

이 특허에 인용된 특허 (9)

  1. Abe Hiraku (Furukawa JPX) Takahashi Yoshihiro (Furukawa JPX) Shimojima Yoji (Furukawa JPX), Code wheel for a reflective type optical rotary encoder.
  2. Worley Eugene R. (Irvine CA), Electro-micro-mechanical shutters on transparent substrates.
  3. Carr William N. (Wayne NJ) Yang Hsu-Nien (Ping-Tong NJ TWX) Cho Dong-Il D. (Princeton Junction NJ), Electrostatic microactuator.
  4. Howe Roger T. (Belmont MA) Lang Jeffrey H. (Waltham MA) Schlecht Martin F. (Lexington MA) Schmidt Martin A. (Brookline MA) Senturia Stephen D. (Boston MA), Electrostatic micromotor.
  5. Forkel Werner (Stuttgart DEX), Fiber optic sensor with an optical modulator having a permanent magnet for the detection of the movement or position of.
  6. Wu Ming C. (Pacific Palisades CA) Lin Lih-Yuan (Los Angeles CA), Free-space integrated micro-pickup head for optical data storage and a micro-optical bench.
  7. MacDonald Noel C. (Ithaca NY) Jazairy Ali (Ithaca NY), Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures.
  8. Sampsell Jeffrey B. (Plano TX), Micro-mechanical optical shutter.
  9. Garcia Ernest J. (Albuquerque NM) Sniegowski Jeffry J. (Albuquerque NM), Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process.

이 특허를 인용한 특허 (46)

  1. Telkamp,Arthur R.; Hsu,Ying Wen, 1?N or N?1 optical switch having a plurality of movable light guiding microstructures.
  2. Miller, Samuel, Configurations for an optical crossconnect switch.
  3. Dong, Jingyan; Ferreira, Placid M., Displacement actuation and sensing for an electrostatic drive.
  4. Kleytman, Fred, Feedback sensor for M.E.M.S. mirrors.
  5. Swierkowski, Steve P., Fiber optic micro accelerometer.
  6. Schürmann-Mader, Eveline; Abel, Andreas Peter; Bopp, Martin Andreas; Duveneck, Gert Ludwig; Ehrat, Markus; Kresbach, Gerhard Matthias; Pawlak, Michael; Schärer-Hernández, Nania Graciela; Schick, Eginhard, Flow cell array and the utilization thereof for multianalyte determination.
  7. Cvancara, Dustin M., In-situ testing of a MEMS accelerometer in a disc storage system.
  8. Flannery,Michael R., Integrated circuit with unified input device, microprocessor and display systems.
  9. Gutierrez Roman C. ; Shcheglov Kirill V. ; Tang Tony, Interferometric system for precision imaging of vibrating structures.
  10. Sinclair, Michael B.; DeBoer, Maarten P.; Smith, Norman F., Long working distance interference microscope.
  11. Hsu, Ying Wen; Telkamp, Arthur R., Low loss optical switching system.
  12. Hsu,Ying Wen; Telkamp,Arthur R., Low loss optical switching system.
  13. Telkamp,Arthur; Bindrup,Randy, Low-loss optical waveguide crossovers using an out-of-plane waveguide.
  14. Telkamp,Arthur; Bindrup,Randy, Low-loss optical waveguide crossovers using an out-of-plane waveguide.
  15. Barry K. Witherspoon, MEMS optical backplane interface.
  16. Helbig Herbert F. ; Burns Daniel J., Measuring the characteristics of oscillating motion.
  17. Hsu, Ying Wen, Method and apparatus for changing the optical intensity of an optical signal using a movable light transmissive structure.
  18. Hsu, Ying Wen, Method and apparatus for switching optical signals using rotatable optically transmissive microstructure.
  19. K��sters,J��rgen; Daszkowski,Stefan, Method and device for carrying out a measurement on a claw coupling.
  20. Holmes Richard B., Method and device for switching wavelength division multiplexed optical signals using micro-electromechanical mirrors.
  21. North, Jr., Howard L., Method for electronic damping of electrostatic positioners.
  22. Sniegowski, Jeffry J.; Rodgers, M. Steven, Method for making a microstructure by surface micromachining.
  23. Govil, Alok, Methods for characterizing the behavior of microelectromechanical system devices.
  24. Govil, Alok, Methods for measurement and characterization of interferometric modulators.
  25. Govil, Alok, Methods for measurement and characterization of interferometric modulators.
  26. Govil, Alok; Mignard, Marc; Khazeni, Kasra, Methods for measurement and characterization of interferometric modulators.
  27. Gilton, Terry L., Micro-machine and a method of powering a micro-machine.
  28. Gilton,Terry L., Micro-machine and a method of powering a micro-machine.
  29. Tai, Yu-Chong; Lin, Qiao; Wu, Shuyun, Microelectromechanical system sensor assembly.
  30. Abnet, Cameron; Feldkhun, Daniel; McAllister, Abraham; Mermelstein, Michael, Microscopic motion measuring.
  31. Gutierrez, Adolfo O.; Aceto, Steven C.; Simkulet, Michelle D., Microsystems integrated testing and characterization system and method.
  32. Thorson,Kevin J.; Kryzak,Charles J.; Leininger,Brian S.; Stevens,Rick C., Mounted MEMs optical diagnostic switch.
  33. Pouteau Patrick,FRX ; Labeye Pierre,FRX, Optical microstructure positioning system.
  34. Hsu, Ying Wen, Optical switching element having movable optically transmissive microstructure.
  35. Hsu, Ying Wen, Optical switching system that uses movable microstructures to switch optical signals in three dimensions.
  36. Govil, Alok, Sensing to determine pixel state in a passively addressed display array.
  37. Baxter, John; Eisenhauer, Karl Yarnos, Sensor for sensing absolute angular position of a rotatable body.
  38. Sniegowski, Jeffry J.; Rodgers, M. Steven, Surface micromachined optical system with reinforced mirror microstructure.
  39. Sniegowski, Jeffry J.; Rodgers, M. Steven, Surface micromachined optical system with reinforced mirror microstructure.
  40. Sniegowski, Jeffry J.; Rodgers, M. Steven, Surface micromachined optical system with reinforced mirror microstructure.
  41. Sniegowski, Jeffry J.; Rodgers, M. Steven, Surface micromachined optical system with reinforced mirror microstructure.
  42. Gibson, Gregory T.; James, Richard A.; Davis, Wyatt O., System for determining an operational state of a MEMS based display.
  43. Gibson, Gregory T.; James, Richard A.; Davis, Wyatt O., System for determining an operational state of a MEMS based laser scanner.
  44. Jeremy A. Walraven ; Edward I. Cole, Jr., Thermally-induced voltage alteration for analysis of microelectromechanical devices.
  45. Klody, Kelly A.; Habbit, Jr., Robert D., Three-dimensional microelectromechanical tilting platform operated by gear-driven racks.
  46. Trutna, Jr., William Richard, Tuning mechanism for a tunable external-cavity laser.
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