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Two-axis magnetically coupled robot 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G21K-005/10
  • B25J-009/14
출원번호 US-0049035 (1998-03-27)
발명자 / 주소
  • Lowrance Robert B.
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Kenyon & Kenyon
인용정보 피인용 횟수 : 1  인용 특허 : 77

초록

A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the

대표청구항

[ What is claimed is:] [1.] A robot, comprising:a motor chamber;first and second arm member assemblies, each supported by the motor chamber at a first end thereof for movement about a common axis, and each having a second end coupled to a common robot element; anda drive mechanism mounted in the mot

이 특허에 인용된 특허 (77)

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  45. Hartman Emil T. (Detroit MI), Permanent magnet propulsion system.
  46. Narushima Masaki (Yamanashi JPX) Takao Itaru (Yamanashi JPX), Plate-like member receiving apparatus.
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  60. Hirokawa Toshio (Kawasaki JPX) Uchida Norio (Yokohama JPX) Kuwabara Osamu (Yokohama JPX) Kikuiri Nobutaka (Tokyo JPX), Synchrotron radiation apparatus.
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  64. Lowrance Robert B., Two-axis magnetically coupled robot.
  65. Lowrance Robert B. (Los Gatos CA), Two-axis magnetically coupled robot.
  66. Lowrance Robert B. (Los Gatos CA), Two-axis magnetically coupled robot.
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  72. Chrisos John M. (Beverly MA) Fowler ; Jr. Bertram F. (Danvers MA) Muka Richard S. (Topsfield MA), Wafer handling apparatus.
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  74. Goodwin Dennis L. (Tempe AZ) Crabb Richard (Mesa AZ) Robinson McDonald (Paradise Valley AZ) Ferro Armand P. (Scottsdale AZ), Wafer handling system with bernoulli pick-up.
  75. Christensen Richard G. (Pine Plains NY) Mack Alfred (Poughkeepsie NY), Wafer transfer apparatus.
  76. Tada Keishi (Kanagawa JPX), Wafer transfer device for a semiconductor device fabricating system.
  77. Stark Mark M. (Kamakura JPX) Nakajima Shu (Fujisawa CA JPX) Lachenbruch Roger B. (Sausalito CA), Xenon enhanced plasma etch.

이 특허를 인용한 특허 (1)

  1. Tomoji Watanabe JP; Nobuyuki Mise JP; Toshiyuki Uchino JP; Norio Suzuki JP; Yoshihiko Sakurai JP; Toshiya Uenishi JP; Yohsuke Inoue JP; Yasuhiro Inokuchi JP; Fumihide Ikeda JP, Semiconductor wafer processing apparatus for transferring a wafer mount.
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