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Gas source and dispensing system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/02
  • C01B-006/10
  • C01B-025/00
  • C01B-035/06
출원번호 US-0859578 (1997-05-20)
발명자 / 주소
  • Tom Glenn M.
  • McManus James V.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist
인용정보 피인용 횟수 : 66  인용 특허 : 4

초록

A system for the storage and delivery of a sorbable fluid, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for the sorbable fluid, and from which the fluid is desorbable by pressure-mediated and/or thermally-mediated desorption, wherein the sorbent m

대표청구항

[ What is claimed is:] [1.] A system for the storage and delivery of B.sub.2 H.sub.6, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for B.sub.2 H.sub.6 and effective when B.sub.2 H.sub.6 is contacted with the sorbent to convert B.sub.2 H.sub.6 to a

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  1. Doughty David T. ; Hayden Richard A. ; Cobes ; III John W. ; Matviya Thomas M., Purification of air in enclosed spaces.
  2. Tamhankar Satish S. (Scotch Plains NJ) Ramachandran Ramakrishnan (Allendale NJ) Blow Martin (Basking Ridge NJ) Galica Theodore R. (Glen Gardner NJ), Removal of perfluorocarbons from gas streams.
  3. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
  4. Schaub Herbert R. (East Amherst NY) Smolarek James (Boston NY) Leavitt Frederick W. (Amherst NY) Toussaint Lee J. (Lockport NY) LaSala Kimberly A. (Lexington KY), Tuning of vacuum pressure swing adsorption systems.

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