초록 ▼

An optical anti-reflection coating having multiple layers, where at least some of the layers are formed by a dry coating process and other layers are formed by a wet coating process. This combination of different types of anti-reflection layers provides superior performance in terms of low reflectan

An optical anti-reflection coating having multiple layers, where at least some of the layers are formed by a dry coating process and other layers are formed by a wet coating process. This combination of different types of anti-reflection layers provides superior performance in terms of low reflectance over a wide bandwidth of incident light wavelengths, and also low reflectance over a wide range of incident light angles. This is accomplished using fewer layers than would be needed using all dry process layers in the ARC. Alternatively, one may obtain an ARC having performance equivalent to that of an all dry process layer ARC but using fewer layers by using the combination of a wet process and a dry process. Furthermore, this combination of wet process and dry process layers provides a high performance anti-reflection coating which cannot be fabricated using only a dry process.

대표청구항 ▼

[ What is claimed is:] [1.] A method for forming an optical anti-reflection coating onto a substrate, comprising the acts of:forming an anti-reflection layer of a first material over the substrate using a dry process; andforming a second anti-reflection layer of a second material overlying the first

[ What is claimed is:] [1.] A method for forming an optical anti-reflection coating onto a substrate, comprising the acts of:forming an anti-reflection layer of a first material over the substrate using a dry process; andforming a second anti-reflection layer of a second material overlying the first layer using a wet process.