초록 ▼

A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS

A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

대표청구항 ▼

[ That which is claimed is:] [1.] A microelectromechanical relay comprising:a microelectronic substrate;a first pair of contacts on said microelectronic substrate; anda first microelectromechanical actuator on said microelectronic substrate for controllably establishing electrical contact between sa

[ That which is claimed is:] [1.] A microelectromechanical relay comprising:a microelectronic substrate;a first pair of contacts on said microelectronic substrate; anda first microelectromechanical actuator on said microelectronic substrate for controllably establishing electrical contact between said first pair of contacts, said first microelectromechanical actuator comprising:spaced apart supports on said microelectronic substrate;an arched beam extending between said spaced apart supports;an actuator member operably coupled to said arched beam and extending outwardly therefrom toward said first pair of contacts; andmeans for heating said arched beam to cause further arching of said beam such that said actuator member moves between an open position in which said actuator member is spaced from said first pair of contacts and a closed position in which said actuator member contacts said first pair of contacts and establishes an electrical connection therebetween.