초록 ▼

A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the he

A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

대표청구항 ▼

[ What is claimed:] [1.] A method for pumping a processing chamber operated at less than atmospheric pressures, comprising the steps of:a) providing an in situ getter pump disposed within said chamber having a conductance of greater than about 75% and comprising a plurality of getter elements and a

[ What is claimed:] [1.] A method for pumping a processing chamber operated at less than atmospheric pressures, comprising the steps of:a) providing an in situ getter pump disposed within said chamber having a conductance of greater than about 75% and comprising a plurality of getter elements and a radiative heater, whereby each said getter element is a porous sintered disk of getter material having an aperture extending therethrough and a hub disposed within said aperture, each said hub being provided with a hub aperture, and said radiative heater is situated such that radiation emanating therefrom contacts at least some of said getter elements;b) sealing said chamber from the external atmosphere;c) pumping said chamber with a first pump to a first pressure below atmospheric pressure; andd) pumping said chamber with said in situ getter pump to a second pressure below said first pressure.