초록 ▼

The micropump (11) has at least two first plate-forming means (10, 12) together defining a pump chamber (9), and the filter comprises liquid feed means, liquid collection means, second plate-forming means (10), and silicon plate-forming means (12; 15), said second plate-forming means (10) and said s

The micropump (11) has at least two first plate-forming means (10, 12) together defining a pump chamber (9), and the filter comprises liquid feed means, liquid collection means, second plate-forming means (10), and silicon plate-forming means (12; 15), said second plate-forming means (10) and said silicon plate-forming means (12; 15) facing each other and forming between them a cavity (13) for receiving a liquid, the cavity being partially closed by at least one transverse partition (20; 20') whose height is less than the depth of the cavity (13) and which separates it into an upstream portion and a downstream portion. Said silicon plate-forming means (12; 15) are fixed at least partially in leakproof manner to said second plate-forming means (10), the downstream portion of the cavity (13) communicates with said pump chamber (9), and the assembly comprising all of the plate-forming means (10, 12) constitutes a sandwich structure.

대표청구항 ▼

[ We claim:] [1.] A micropump comprising a micro-machined filter and at least two first plate-forming means defining a pump chamber, said filter comprising liquid feed means, liquid collection means, second plate-forming means and silicon plate-forming means, said second plate-forming means and said

[ We claim:] [1.] A micropump comprising a micro-machined filter and at least two first plate-forming means defining a pump chamber, said filter comprising liquid feed means, liquid collection means, second plate-forming means and silicon plate-forming means, said second plate-forming means and said silicon plate-forming means facing each other and forming, between them, a cavity designed to receive a liquid, said cavity being partially closed by at least one transverse partition that is of a height smaller than a depth of said cavity, that separates said cavity into an upstream portion and a downstream portion relative to said partition, and that extends in a continuous manner between side walls of said cavity, said silicon plate-forming means being fixed at least in part in a leakproof manner on said second plate-forming means, said downstream portion of said cavity communicating with said pump chamber, an assembly comprising both of said first plate-forming means, said silicon plate-forming means, and said second plate-forming means, forming a sandwich structure.