초록

A semiconductor wafer storage apparatus includes a wafer storage unit main body and a gas supply unit with a chemical filter, the gas supply unit being arranged independently of the wafer storage unit.

대표청구항 ▼

[ What is claimed is:] [1.] A semiconductor device fabricating apparatus in a semiconductor device fabricating line, comprising:a first semiconductor wafer storing means, installed within a clean room, in which a gas is supplied from a gas supplying means located independently of said semiconductor

[ What is claimed is:] [1.] A semiconductor device fabricating apparatus in a semiconductor device fabricating line, comprising:a first semiconductor wafer storing means, installed within a clean room, in which a gas is supplied from a gas supplying means located independently of said semiconductor wafer storing means and exteriorly of the clean room;a chemical filter removably attached to the outside of the gas supplying means; anda second semiconductor wafer storing means in which said semiconductor wafer storing means installed within the clean room is ventilated by air supplied from the clean room, wherein the second semiconductor wafer storing means is used before a semiconductor device has undergone a wet etching treatment and the first semiconductor wafer storing means is used after the wet etching treatment.