초록 ▼

A gas curtain for use with a semiconductor processing system to prevent unwanted gases from entering a processing chamber. The gas curtain includes both upward and downward flows of gas surrounding an isolation valve adjacent a delivery port into the processing chamber. In the valve open position, t

A gas curtain for use with a semiconductor processing system to prevent unwanted gases from entering a processing chamber. The gas curtain includes both upward and downward flows of gas surrounding an isolation valve adjacent a delivery port into the processing chamber. In the valve open position, the downward flows extends between the valve and the delivery port, and the upward flow extends in an opposite direction behind the isolation valve. In the valve closed position, one of the flows extends through a slot in the isolation valve, while the other flow is directed in an opposite direction on the rear side of the isolation valve. In a method of using the gas curtain apparatus, a pick-up wand operating on a Bernoulli principal uses gases which are unwanted in the processing chamber, and just prior to loading wafers into the processing chamber, the gas flow in the Bernoulli wand is switched from a first gas to a second gas. Desirably, the second gas is hydrogen. The Bernoulli wand passes through the gas curtain before entering the processing chamber to remove any fugitive particles, moisture and unwanted gases. An exhaust located proximate to an input/output chamber creates a continuous pressure gradient in the handling chamber toward the input/output chamber further helping to prevent unwanted gases from entering the processing chamber.

대표청구항 ▼

[ What is claimed is:] [1.] A gas curtain apparatus for a wafer processing system, the system including a handling chamber and a reaction chamber with a delivery port therebetween having an isolation valve adapted for alternately opening and closing the port, comprising:a first series of apertures i

[ What is claimed is:] [1.] A gas curtain apparatus for a wafer processing system, the system including a handling chamber and a reaction chamber with a delivery port therebetween having an isolation valve adapted for alternately opening and closing the port, comprising:a first series of apertures in an upper member adapted to direct gas generally downward in a first curtain on the handling chamber side of the delivery port and on the reaction chamber side of at least a portion of the isolation valve; anda second series of apertures in a lower member adapted to direct gas upward in a second curtain on the handling chamber side of the deliver port.