초록 ▼

A method for chemical vapor deposition using a very fine atomization or vaporization of a reagent containing liquid or liquid-like fluid near its supercritical temperature, where the resulting atomized or vaporized solution is entered into a flame or a plasma torch, and a powder is formed or a coati

A method for chemical vapor deposition using a very fine atomization or vaporization of a reagent containing liquid or liquid-like fluid near its supercritical temperature, where the resulting atomized or vaporized solution is entered into a flame or a plasma torch, and a powder is formed or a coating is deposited onto a substrate. The combustion flame can be stable from 10 torr to multiple atmospheres, and provides the energetic environment in which the reagent contained within the fluid can be reacted to form the desired powder or coating material on a substrate. The plasma torch likewise produces the required energy environment, but, unlike the flame, no oxidizer is needed so materials stable in only very low oxygen partial pressures can be formed. Using either the plasma torch or the combustion plasma, coatings can be deposited and powders formed in the open atmosphere without the necessity of a reaction chamber, but a chamber may be used for various reasons including process separation from the environment and pressure regulation.

대표청구항 ▼

[ What is claimed is:] [1.] A method for coating a substrate with a selected material, comprising:a) at a first selected temperature and a first selected pressure, forming a transport solution in a liquid state by dissolving into a suitable carrier in a liquid state one or more reagents capable of r

[ What is claimed is:] [1.] A method for coating a substrate with a selected material, comprising:a) at a first selected temperature and a first selected pressure, forming a transport solution in a liquid state by dissolving into a suitable carrier in a liquid state one or more reagents capable of reacting to form the selected material; wherein the transport solution in the liquid state comprises the suitable carrier;b) positioning a substrate in a region having a second selected pressure;c) pressurizing the transport solution in the liquid state to a third selected pressure above the second selected pressure using a pressure regulating means;d) directing the transport solution in the liquid state to a fluid conduit having an input end and an opposed output end, wherein the output end further comprises an outlet port oriented to direct the fluid in the conduit into the region and in the direction of the substrate;e) maintaining the transport solution in the fluid conduit in the liquid state at a second selected temperature from about 50.degree. C. below the critical temperature, T.sub.c, of the solution to the T.sub.c of the solution and maintaining the third selected pressure above the second selected pressure and above the corresponding liquids or critical pressure, P.sub.c, of the transport solution in the liquid state at the second selected temperature using the pressure regulating means;f) directing the liquid transport solution through the outlet port of the fluid conduit into the region to produce a nebulized solution spray in the direction of the substrate;g) admixing one or more selected gases into the nebulized solution spray to form a reactable spray; andh) exposing the reactable spray to an energy source at a selected energization point whereby the energy source provides sufficient energy to react the reactable spray thereby forming the material and coating the substrate therewith.