초록 ▼

A system for reusing water soluble slurry waste fluid wherein separated available abrasive grains and extracted water soluble coolant are reused. This system is capable of reducing a disposal cost due to a reduction of a load to a waste water disposal plant by effectively reusing water soluble slurr

A system for reusing water soluble slurry waste fluid wherein separated available abrasive grains and extracted water soluble coolant are reused. This system is capable of reducing a disposal cost due to a reduction of a load to a waste water disposal plant by effectively reusing water soluble slurry waste fluid, and making a contribution to a reduction of a total slicing cost by reusing abrasive grains and water soluble coolant.

대표청구항 ▼

[ What is claimed is:] [1.] A process for reusing water soluble slurry waste fluid used when semiconductor ingots are sliced with a wire saw slicing apparatus, which comprises the steps of:(a) decreasing viscosity of water soluble slurry waste fluid(b) separating the water soluble slurry waste fluid

[ What is claimed is:] [1.] A process for reusing water soluble slurry waste fluid used when semiconductor ingots are sliced with a wire saw slicing apparatus, which comprises the steps of:(a) decreasing viscosity of water soluble slurry waste fluid(b) separating the water soluble slurry waste fluid of low viscosity into separated abrasive grains and waste liquid consisting of a suspended solid part and a liquid part;(c) extracting water soluble coolant from the waste liquid consisting of the suspended solid part and the liquid part with a coagulation separating operation including the sub-steps of:(c1) adding bentonite as a coagulating agent to the waste liquid consisting of the suspended solid part and the liquid part;(c2) concentrating the liquid part from the waste liquid added with the coagulating agent to form coagulation flocks;(c3) extracting the water soluble coolant by solid-liquid separation of the waste liquid consisting of the suspended solid adsorbed to the coagulation flocks and the concentrated liquid part,thereafter discarding the suspended solid part as useless sludge; and(d) reusing the separated grains and the extracted water soluble coolant.