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Process for making a silicon carbide sintered body 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C04B-035/569
출원번호 US-0853719 (1997-05-09)
우선권정보 JP-0155670 (1996-06-17)
발명자 / 주소
  • Takahashi Yoshitomo,JPX
  • Wada Hiroaki,JPX
  • Miyamoto Taro,JPX
출원인 / 주소
  • Bridgestone Corporation, JPX
대리인 / 주소
    Oliff & Berridge, PLC
인용정보 피인용 횟수 : 21  인용 특허 : 12

초록 ▼

A silicon carbide sintered body according to the present invention is a silicon carbide sintered body having a density of 2.9 g/cm.sup.3 or higher, obtained by means of hot pressing a mixture of silicon carbide powder and a non-metal-based sintering additive such as an organic compound which produce

대표청구항 ▼

[ What is claimed is:] [1.] A process for making a silicon carbide sintered body, comprising:providing a silicon carbide powder consisting essentially of silicon carbide particles that have an average particle diameter of 0.01 to 10 .mu.m and are formed by the same powder making process; anda sinter

이 특허에 인용된 특허 (12)

  1. Talbert Lloyd G. (Alexander AR) Brazil Steven M. (Benton AR), Graphite-loaded silicon carbide.
    상세보기
  2. Kijima Kazunori (131 ; Fukakusa Goudou Shukusha ; Nishidate-cho Kanyuuchi ; Fukakusa ; Fushimi-Ku Kyoto-shi ; Kyoto JPX) Arai Eiki (Narashino JPX) Miyazawa Youichi (Narashino JPX) Konishi Mikio (Nara, Highly pure sintered carbide with high electric conductivity and process of producing the same.
    상세보기
  3. Krstic Vladimir D. (Queen\University ; Department of Materials and Metallurgical Eng. ; Nicol Hall Kingston ; Ontario CAX) Vlajic Milan (Queen\University ; Department of Materials and Metallurgical E, Making of sintered silicon carbide bodies.
    상세보기
  4. Kawasaki Shinji (Nagoya JPX), Method for producing high density SiC sintered body.
    상세보기
  5. Kurachi Yasuo (Kodaira JPX) Arai Katsuhiko (Iruma JPX) Irako Koichi (Higashimurayama JPX), Process for producing a sintered cubic silicon carbide.
    상세보기
  6. Kawasaki, Shinji; Kajita, Masaharu; Matsuhiro, Keiji, Process for producing high density SiC sintered bodies.
    상세보기
  7. Kanemoto Masashi,JPX ; Endo Shinobu,JPX ; Hashimoto Masao,JPX, Process for producing high purity silicon carbide powder for preparation of a silicon carbide single crystal and single.
    상세보기
  8. Sakaguchi Mikio (Wakayama JPX) Otsuka Kazuhiro (Wakayama JPX), Process for the production of carbon-filled ceramic composite material.
    상세보기
  9. Kriegesmann Jochen (Durach-Bechen DEX) Hunold Klaus (Kempten DEX) Lipp Alfred (Bad Worishofen DEX) Reinmuth Klaus (Durach DEX) Schwetz Karl A. (Sulzberg DEX), Shaped polycrystalline silicon carbide articles and isostatic hot-pressing process.
    상세보기
  10. Tani Toshihiko (Aichi JPX) Wada Shigetaka (Mie JPX), Silicon carbide composite ceramic.
    상세보기
  11. Kijima Kazunori (Kyoto JPX) Arai Eiki (Narashino JPX) Miyazawa Youichi (Narashino JPX) Konishi Mikio (Narashino JPX) Kato Ken (Funabashi JPX), Sintered silicon carbide body with high thermal conductivity and process of producing the same.
    상세보기
  12. Schwetz Karl A. (Sulzberg DEX) Reinmuth Klaus (Durach DEX) Hunold Klaus (Kempten DEX) Isemann Franz (Oberstdorf DEX), Substantially pore-free sintered polycrystalline articles of a 상세보기

이 특허를 인용한 특허 (21)

  1. Parkhe, Vijay D.; Ahmann, Kurt J.; Tsai, Matthew C.; Sansoni, Steve, Coating for reducing contamination of substrates during processing.
    상세보기
  2. Parkhe, Vijay D.; Ahmann, Kurt J; Tsai, Matthew C; Sansoni, Steve, Cooling pedestal with coating of diamond-like carbon.
    상세보기
  3. Kobayashi, Hiromichi, Corrosion-resistive ceramic materials and members for semiconductor manufacturing.
    상세보기
  4. Parkhe, Vijay D; Ahmann, Kurt J; Tsai, Matthew C; Sansoni, Steve, Heat exchange pedestal with coating of diamond-like material.
    상세보기
  5. Goela,Jitendra S.; Pickering,Michael A., Low resistivity silicon carbide.
    상세보기
  6. Fukuda Makoto,JPX ; Chikuba Masanori,JPX, Method for manufacturing conductive wafers, method for manufacturing thin-plate sintered compacts, method for manufacturing ceramic substrates for thin-film magnetic head, and method for machining co.
    상세보기
  7. Otsuki Masashi,JPX ; Wada Hiroaki,JPX ; Takahashi Yoshitomo,JPX ; Saito Tasuku,JPX, Method for producing sintered silicon carbide.
    상세보기
  8. Pickering, Michael A.; Goela, Jitendra S., Opaque low resistivity silicon carbide.
    상세보기
  9. Takahashi Yoshitomo,JPX ; Wada Hiroaki,JPX ; Satou Akira,JPX, Process for making heater member.
    상세보기
  10. Matsunaga, Kenji; Kajii, Shinji; Kodama, Tsutomu, Process for producing SiC fiber-bonded ceramics.
    상세보기
  11. Nakamura, Masaharu; Miyamoto, Yoshinari; Tojo, Tetsuro, Process for production of silicon-carbide-coated carbon base material, silicon-carbide-coated carbon base material, sintered (silicon carbide)-carbon complex, ceramic-coated sintered (silicon carbide)-carbon complex, and process for production of sintered (silicon carbide)-carbon complex.
    상세보기
  12. Adams, Dale, Process for sintering silicon carbide.
    상세보기
  13. Adams, Dale, Process for sintering silicon carbide.
    상세보기
  14. Ramamurthy, Sundar; Hegedus, Andreas G.; Thakur, Randhir, Processing multilayer semiconductors with multiple heat sources.
    상세보기
  15. Kajiwara Meisetsu,JPX ; Hashimoto Masao,JPX ; Wada Hiroaki,JPX, Production method of silicon carbide particles.
    상세보기
  16. Sorabji, Khurshed; Ranish, Joseph Michael; Aderhold, Wolfgang; Hunter, Aaron Muir; Lerner, Alexander N., Rapid thermal processing chamber with shower head.
    상세보기
  17. Han, Jung Eun; Shin, Dong Geun; Kim, Byung Sook, Silicon carbide powder, method for manufacturing the same and silicon carbide sintered body, method for manufacturing the same.
    상세보기
  18. Hiroyuki Yokote JP; Tatsuya Kimura JP, Silicon carbide substrate for forming magnetic head.
    상세보기
  19. Otsuki Masashi,JPX ; Wada Hiroaki,JPX ; Takahashi Yoshitomo,JPX ; Saito Tasuku,JPX, Sintered silicon carbide and method for producing the same.
    상세보기
  20. Ramachandran,Balasubramanian; Ranish,Joseph Michael; Jallepally,Ravi; Ramamurthy,Sundar; Achutharaman,Raman; Haas,Brian; Hunter,Aaron, Tailored temperature uniformity.
    상세보기
  21. Sorabji, Khurshed; Lerner, Alexander; Ranish, Joseph; Hunter, Aaron; Adams, Bruce; Behdjat, Mehran; Ramanujam, Rajesh, Temperature measurement and control of wafer support in thermal processing chamber.
    상세보기

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