초록 ▼

This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature s

This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature sensor to calibrate the substrate temperature sensor and an actuator to position the temperature-sensitive probe relative to the substrate during a calibration cycle. The actuator and temperature-sensitive probe of the automatic calibration system can be incorporated into the thermal processing equipment in order to maintain the thermal processing equipment cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment of this invention, the temperature-sensitive probe and its actuator are implemented in the gas showerhead assembly of a rapid thermal processing system.

대표청구항 ▼

[ What is claimed is:] [1.] An automatic calibration method for in-situ calibration of at least one substrate temperature sensor in a microelectronics manufacturing equipment for processing a substrate, comprising:extending at least one in-situ temperature-sensitive probe onto the substrate located

[ What is claimed is:] [1.] An automatic calibration method for in-situ calibration of at least one substrate temperature sensor in a microelectronics manufacturing equipment for processing a substrate, comprising:extending at least one in-situ temperature-sensitive probe onto the substrate located within a process chamber of said manufacturing equipment while maintaining the process ambient integrity of the process chamber;ramping the substrate temperature between a first temperature and a second temperature at a sufficiently slow rate;collecting a set of substrate temperature measurement data from said substrate temperature sensor and said temperature-sensitive probe in real time using an automated data acquisition system;extracting a set of calibration data for said substrate temperature sensor; andretracting and at least one temperature-sensitive probe away from said substrate upon conclusion of a calibration cycle; and calibrating any further substrate temperature measurement data obtained with said substrate temperature sensor using said calibration data.