초록 ▼

A method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a

A method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

대표청구항 ▼

[ What is claimed is:] [1.] A method for removing at least one impurity from a liquid-phase, corrosive gas compound comprising the steps of:heating said liquid-phase, corrosive gas compound containing said at least one impurity in a first container to a temperature above the boiling point of said li

[ What is claimed is:] [1.] A method for removing at least one impurity from a liquid-phase, corrosive gas compound comprising the steps of:heating said liquid-phase, corrosive gas compound containing said at least one impurity in a first container to a temperature above the boiling point of said liquid-phase, corrosive gas compound to form gas-phase, corrosive gas compound;providing a second container in fluid communication with said first container through at least a first fluid line; andtransferring said gas-phase, corrosive gas compound from said first container through said first fluid line to said second container by pressure differential, wherein the compound in the second container which has been transferred from the first container includes a reduced concentration of said at least one impurity compared to the concentration of said at least one impurity in said liquid-phase, corrosive gas compound in the first containers;wherein said step of transferring further comprises transferring said compound in gas phase only; andwherein said step of transferring further comprises the step of maintaining said gas-phase compound in said first fluid line above a temperature sufficient to maintain said compound in gas phase. [7.] A method for removing at least one impurity from a liquid-phase, corrosive gas compound comprising the steps of:heating said liquid-phase, corrosive gas compound containing said at least one impurity in a first container to a temperature above the boiling point of said liquid-phase, corrosive gas compound to form gas-phase, corrosive gas compound;providing a second container in fluid communication with said first container through at least a first fluid line; andtransferring said gas-phase, corrosive gas compound in gas phase only from said first container through said first fluid line to said second container by pressure differential, wherein the compound in the second container which has been transferred from the first container includes a reduced concentration of said at least one impurity compared to the concentration of said at least one impurity in said liquid-phase, corrosive gas compound in the first container;wherein said step of transferring further comprises controlling the flow rate of the gas-phase compound from said first container to said second container; andproviding a first valve for controlling fluid flow into and out of said first container, and providing a second valve for controlling fluid flow into and out of said second container, wherein said step of controlling the flow rate comprises adjusting the flow rate through at least one of said first valve and said second valve.