초록 ▼

A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-inter

A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-interrupted path-to-ground extends from each wafer support shelf to the machine interface. Additionally, the side walls of the shell have a recess portion with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to rotatably lock such handles into place on the side walls of the carrier.

대표청구항 ▼

[ We claim:] [1.] A transport module for wafers having a top, a bottom, and open interior, and an open front for insertion and removal of wafers, the module comprising:a) a shell having a left side wall, a right side wall, an open front, and a bottom with at least one lower opening;b) a central supp

[ We claim:] [1.] A transport module for wafers having a top, a bottom, and open interior, and an open front for insertion and removal of wafers, the module comprising:a) a shell having a left side wall, a right side wall, an open front, and a bottom with at least one lower opening;b) a central support structure comprising at least two columns of wafer support shelves to support wafers in an axially aligned stacked relationship and a lower equipment engagement portion integral with the two columns and exposed through said lower opening, said wafer support shelves fixed with respect to the shell in the open interior of the shell and defining a wafer receiving region; andc) a door for closing the open front of the module. [5.] A transport module for wafers having a top, a bottom, and open interior, and an open front for insertion and removal of wafers, the module comprising:a) a shell having a left side wall, a right side wall, an open front, and a bottom;b) a central support structure comprising at least two columns of wafer support shelves to support wafers in an axially aligned stacked relationship and a lower equipment engagement portion connecting with the two columns,c) a door for closing the open front of the module.d) a pair of handles rotatably engageable and disengageable to the shell and extending from the right side and left side of the shell. [6.] A transport module for wafers having a top, a bottom, and open interior, and an open front for insertion and removal of wafers, the module comprising:a) a shell having a left side wall, a right side wall, a top wall, an open front, and a bottom;b) a central support structure comprising at least two columns of wafer support shelves to support wafers in an axially aligned stacked relationship;c) a door for closing the open front of the module;d) a handle rotatably engageable and disengageable to the shell at one of said walls;wherein the handle engages the shell without utilizing any openings through said wall. [7.] A wafer transport module having an open interior and an open front for insertion and removal of wafers, the module comprising:a) an outer shell having a top with an aperture, a bottom with a bottom opening with a periphery, and an open interior,b) an integral central support structure having a top portion and a bottom portion having a machine interface, the central support engaged with the shell at the aperture and at the bottom opening, the central support structure having a downward facing machine interface, andc) a door for closing the open front. [13.] A wafer transport module comprising a top, a bottom, a front side with a door opening, a left side wall, a right side wall, a door sized to close the door opening, and a pair of handles, the left side wall and the right side wall each having a first engagement structure thereon, each handle having a cooperating second engagement structure slidably engageable and disengageable with one of said first engagement structures whereby each of said handles is placeable and removable from the right and left sides of said module without utilizing any openings in said right and left walls, and wherein each first engagement structure and each respective cooperating second engagement structure comprise a detent whereby said first engagement structure and said second engagement structure are slidably engageable in a rotational direction with respect to the first engagement structure. The transport module of claim 13, wherein each of the first engagement structures comprise an inwardly-extending recess in each of the respective left and right side walls. A transport module comprising:a) a shell having a top with an aperture, a front with a front opening for receiving and withdrawing of wafers, and an open interior;b) a door for closing the open front;c) a central support structure comprising a plurality of columns of wafer supports positioned to support the wafers in the open interior and a top portion integral with the plurality of column of wafer supports and engaged with the shell at the aperture; andd) a robotic pickup handle connecting to said top portion at said aperture and extending above said shell. A transport module comprising:a) a shell having a top, a front with a front opening for receiving and withdrawing of wafers, and an open interior;b) a door for closing the open front;c) a central support structure comprising a plurality of columns of wafer supports positioned to support the wafers in the open interior and an integral top portion engaged with the shell at the top;d) a robotic pickup handle connecting to said top and extending above said shell,wherein the shell further comprises a lower opening, wherein the central support structure further comprises an equipment engagement portion exposed downwardly at said lower opening, wherein the shell is secured to the central support structure at said lower opening, and wherein the equipment engagement portion is integral with the columns of wafer supports. A composite transport module comprising a container portion with an open interior and an open front for insertion and removal of wafers, a closed left side wall and a closed right side wall, the container portion further comprising an equipment interface integral with at least one wafer support column, the equipment interface and wafer support column separately molded from the left side wall and the right side wall, the transport module further comprising a door for closing the open front, and wherein the container portion comprises a transparent shell and wherein the top of the shell has an aperture and the transport module further comprises a top portion extending into the aperture and integral with the wafer support column. The composite transport module of claim 17 further comprising a elastomeric seal engaged between the top portion and the shell at said aperture. The composite transport module of claim 17, further comprising a robotic lifting flange in a connecting relation with the top portion, the lifting flange extending above the shell.