초록 ▼

A high performance, high density sputtering target and a method of making. An aluminum and non-aluminum reactive metal powder blend is subjected to cold pressing under pressure, machining, evacuating, and hot pressing under pressure. The aluminum and non-aluminum metal react directly to yield a high

A high performance, high density sputtering target and a method of making. An aluminum and non-aluminum reactive metal powder blend is subjected to cold pressing under pressure, machining, evacuating, and hot pressing under pressure. The aluminum and non-aluminum metal react directly to yield a high performance, high density sputter target containing greater than about 2% aluminum with substantially uniform composition across the body.

대표청구항 ▼

[ Having described the invention, what is claimed is:] [22.] A method of making a high performance, high density sputter target, comprising:blending a powder of substantially pure non-aluminum metal capable of reacting with aluminum and a powder of substantially pure aluminum metal to form a uniform

[ Having described the invention, what is claimed is:] [22.] A method of making a high performance, high density sputter target, comprising:blending a powder of substantially pure non-aluminum metal capable of reacting with aluminum and a powder of substantially pure aluminum metal to form a uniform mixture of the powders of the metals, thencold pressing the blended powders by a method selected from the group consisting of cold pressing and cold isostatic pressing,assembling a mosaic of the cold pressed powders, andisostatically pressing the mosaic by a method selected from the group consisting ofhot isostatic pressing,vacuum hot pressing, andinert gas hot pressing a temperature below 0.9 T.sub.m of aluminum to obtain a high density target material consisting of a homogeneous mixture containing essentially no macroscopic segregation of aluminum, containing at most only traces of microsegregation of aluminum, and containing essentially no intermetallic compounds of the metals.