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Process and device for drying of substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F26B-003/34
출원번호 US-0942540 (1997-10-01)
우선권정보 AT-0001734 (1996-10-01)
발명자 / 주소
  • Kruwinus Hans-Jurgen,ATX
대리인 / 주소
    Young & Thompson
인용정보 피인용 횟수 : 32  인용 특허 : 9

초록 ▼

To dry semiconductor substrates, especially silicon wafers subsequent to rinsing after etching, the substrate is exposed to the action of radiation which contains an IR portion and a UV portion, the IR portion being greater than the UV portion. The IR-UV radiation quickly dries the substrate and pre

대표청구항 ▼

[ I claim:] [1.] A drying process for semiconductor substrates comprising the step of:treating a substrate with radiation which comprises an infrared radiation component and an ultraviolet radiation component, wherein the ratio of the infrared radiation component to the ultraviolet radiation compone

이 특허에 인용된 특허 (9)

  1. Metzger Wesley A. (3107 Knoll Dr. Falls Church VA 22402), Apparatus and process for drying and curing coated substrates.
    상세보기
  2. Grant Robert W. (Excelsior MN) Novak Richard E. (Plymouth MN), Cluster tool dry cleaning system.
    상세보기
  3. Pearce ; Charles W. ; Zaleckas ; Vincent J., Gettering semiconductor wafers with a high energy laser beam.
    상세보기
  4. Sugino Rinshi (Atsugi JPX) Nara Yasuo (Zama JPX) Ito Takashi (Kawasaki JPX), Gettering treatment process.
    상세보기
  5. Knight Ronald Edward,GB2, Lamp assembly with filter producing variable proportions of ultraviolet and infrared radiation.
    상세보기
  6. Bersin Richard L. (Orange CT), Method and apparatus for dry processing of substrates.
    상세보기
  7. Engelsberg Audrey C. (Milton VT) Dehais Joseph A. (Washington DC), Removal of surface contaminants by irradiation from a high energy source.
    상세보기
  8. McNeilly Michael A. (Palo Alto CA), Semiconductor wafer processing apparatus.
    상세보기
  9. Kusuhara Masaki (Tokyo JPX), Vapor drying apparatus.
    상세보기

이 특허를 인용한 특허 (32)

  1. Danese Michael J., Apparatus for treating an object using ultra-violet light.
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  2. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao, Automatic POS-based digital image capturing and processing system employing object motion controlled area-type illumination and imaging operations.
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  3. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao, Automatic omnidirectional bar code symbol reading system employing linear-type and area-type bar code symbol reading stations within the system housing.
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  4. Kotlarsky, Anatoly; Au, Ka Man; Veksland, Michael; Zhu, Xiaoxun; Meagher, Mark; Good, Timothy; Hou, Richard; Hu, Daniel, Automatic point-of-sale based code symbol reading system employing automatic object motion detection and illumination control, and digital video image capturing and processing techniques.
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  5. Kotlarsky, Anatoly; Au, Ka Man; Zhu, Xiaoxun, Automatically-triggered digital video-imaging based code symbol reading system for use in a point-of-sale (POS) environment.
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  6. Kotlarsky, Anatoly; Au, Ka Man; Zhu, Xiaoxun, Automatically-triggered digital video-imaging based code symbol reading system supporting dynamically controlled object illumination and digital video-imaging operations.
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  7. Kotlarsky, Anatoly; Zhu, Xiaoxun; Veksland, Mikhail; Au, Ka Man; Giordano, Patrick; Yan, Weizhen; Ren, Jie; Smith, Taylor; Miraglia, Michael; Knowles, C. Harry; Mandal, Sudhin; De Foney, Shawn; Allen, Christopher; Wilz, Sr., David M., Code symbol reading system.
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  8. Weber Klaus,DEX ; Speer Ulrich,DEX, Device for drying substrates.
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  9. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John A.; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Device for producing a laser beam of reduced coherency using high-frequency modulation of the laser diode current and optical multiplexing of the output laser beam.
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  10. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao, Digital image capturing and processing system employing a plurality of coplanar illuminating and imaging stations projecting a complex of coplanar illumination and imaging planes into a 3D imaging volume so as to support pass-through and presentation modes of digital imaging at a point of sale (POS) environment.
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  11. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John A.; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Digital image capturing and processing system employing automatic object detection and spectral-mixing based illumination techniques.
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  12. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John A.; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Digital image capturing and processing system for automatically recognizing objects in a POS environment.
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  13. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Veksland, Michael; Kotlarsky, Anatoly; Furlong, John; Hernandez, Mark; Ciarlante, Nicola; Schmidt, Mark, Digital image capturing and processing system for producing and projecting a complex of coplanar illumination and imaging planes into a 3D imaging volume and controlling illumination control parameters in said system using the detected motion and velocity of object.
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  14. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao, Digital-imaging based code symbol reading system employing a plurality of coplanar illumination and imaging subsystems, each having a local object motion detection subsystem for automatic detecting objects within the 3D imaging volume, and a local control subsystem for transmitting object detection state data to a global control subsystem for managing the state of operation of said coplanar illumination and imaging subsystems.
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  15. Tsikos, Constantine J.; Schnee, Michael D.; Zhu, Xiaoxun; Amundsen, Thomas; Naylor, Charles A.; Dobbs, Russell Joseph; Knowles, Carl Harry, Hand-supportable LED-based planar illumination and imaging system.
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  16. Kotlarsky, Anatoly; Zhu, Xiaoxun, Hand-supportable digital image capture and processing system supporting a multi-tier modular software architecture.
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  17. Zhu, Xiaoxun; Liu, Yong; Au, Ka Man; Hou, Rui; Yu, Hongpeng; Tao, Xi; Liu, Liang; Zhang, Wenhua; Kotlarsky, Anatoly; Ghosh, Sankar; Schnee, Michael; Spatafore, Pasqual; Amundsen, Thomas; Byun, Sung; Schmidt, Mark; Russell, Garrett; Bonanno, John; Knowles, C. Harry, Hand-supportable digital image-processing based bar code symbol reading system employing image cropping zone (ICZ) framing and post-image capture cropping.
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  18. Kotlarsky, Anatoly; Zhu, Xiaoxun, Image capture and processing system supporting a multi-tier modular software architecture.
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  19. Kotlarsky, Anatoly; Zhu, Xiaoxun, Image capture and processing system supporting a multi-tier modular software architecture.
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  20. Kotlarsky, Anatoly; Zhu, Xiaoxun, Image capture and processing system supporting a multi-tier modular software architecture.
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  21. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John A.; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Laser beam generation system employing a laser diode and high-frequency modulation circuitry mounted on a flexible circuit.
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  22. Li, Jia, Low temperature poly-silicon thin film preparation apparatus and method for preparing the same.
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  23. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Veksland, Michael; Kotlarsky, Anatoly; Furlong, John; Hernandez, Mark; Ciarlante, Nicola; Schmidt, Mark, Method for intelligently controlling the illumination and imagine of objects as they are moved through the 3D imaging volume of a digital image capturing and processing system.
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  24. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Method of illuminating objects during digital image capture operations by mixing visible and invisible spectral illumination energy at point of sale (POS) environments.
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  25. Smith, Taylor; Kotlarsky, Anatoly; Wilz, Sr., David M.; Mandal, Sudhin; De Foney, Shawn; Allen, Christopher; Murashka, Pavel, Method of programming the system configuration parameters of a digital image capture and processing system during the implementation of its communication interface with a host system without reading programming-type bar code symbols.
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  26. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John A.; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Method of reading bar code symbols on objects at a point-of-sale station by passing said objects through a complex of stationary coplanar illumination and imaging planes projected into a 3D imaging volume.
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  27. Zhu, Xiaoxun; Liu, Yong; Au, Ka Man; Hou, Rui; Yu, Hongpeng; Tao, Xi; Liu, Liang; Zhang, Wenhua; Kotlarsky, Anatoly, Method of reading code symbols using a digital image capturing and processing system employing a micro-computing platform with an event-driven multi-tier software architecture.
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  28. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Veksland, Michael; Kotlarsky, Anatoly; Furlong, John; Hernandez, Mark; Ciarlante, Nicola; Schmidt, Mark, Omni-directional digital image capturing and processing system employing coplanar illumination and imaging planes and area-type illumination and imaging zones within the system housing.
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  29. Kotlarsky, Anatoly; Zhu, Xiaoxun; Veksland, Michael; Au, Ka Man; Giordano, Patrick; Yan, Weizhen; Ren, Jie; Smith, Taylor; Miraglia, Michael V.; Knowles, C. Harry; Mandal, Sudhin; De Foney, Shawn; Allen, Christopher; Wilz, Sr., David M., Optical code symbol reading system employing an acoustic-waveguide structure for coupling sonic energy, produced from an electro-transducer, to sound wave ports formed in the system housing.
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  30. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, POS-based digital image capturing and processing system employing automatic object motion detection and spectral-mixing based illumination techniques.
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  31. Knowles, C. Harry; Zhu, Xiaoxun; Good, Timothy; Xian, Tao; Kotlarsky, Anatoly; Veksland, Michael; Hernandez, Mark; Gardner, John; Essinger, Steven; Giordano, Patrick; Kearney, Sean; Schmidt, Mark; Furlong, John; Ciarlante, Nicholas; Liu, Yong; Ren, Jie; Tao, Xi; Liu, JiBin; Zhuo, Ming; Ellis, Duane, Pos-based digital image capturing and processing system using automatic object detection, spectral-mixing based illumination and linear imaging techniques.
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  32. Kotlarsky, Anatoly; Zhu, Xiaoxun, digital image capturing and processing system allowing third-parties to extend the features and functions of said system, and modify the standard behavior thereof without permanently modifying the standard features and functions thereof.
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