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Microfabrication of cantilevers using sacrificial templates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-007/34
출원번호 US-0020816 (1998-02-09)
발명자 / 주소
  • Viani Mario B.
  • Hansma Paul
  • Chand Ami
  • Wendman Mark A.
  • Morrett Hal J.
출원인 / 주소
  • The Regents of the University of California
대리인 / 주소
    Fulbright & Jaworski
인용정보 피인용 횟수 : 60  인용 특허 : 3

초록

A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.

대표청구항 ▼

[ We claim:] [1.] A method for fabricating at least one cantilever for an atomic force microscope formed of a first material, comprising:forming a structure integral with a chip having an outer surface, at least a portion thereof being in the desired shape of said cantilever and serving as a sacrifi

이 특허에 인용된 특허 (3)

  1. Matsuyama Katsuhiro,JPX, Cantilever chip.
    상세보기
  2. Miyazaki Toshihiko (Hiratsuka JPX) Nose Hiroyasu (Zama JPX) Kuroda Ryo (Machida JPX) Kawase Toshimitsu (Atsugi JPX) Shinjo Katsuhiko (Isehara JPX), Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, i.
    상세보기
  3. Buser Rudolf A. (Neuchatel CHX) Brugger Juergen (Neuchatel CHX) Linder Christian (Neuchatel CHX), Microprobe for surface-scanning microscopes.
    상세보기

이 특허를 인용한 특허 (60)

  1. Hoh,Jan H., AFM cantilevers and methods for making and using same.
    상세보기
  2. Miles, Mark W.; Batey, John; Chui, Clarence; Kothari, Manish; Tung, Ming-Hau, Controlling electromechanical behavior of structures within a microelectromechanical systems device.
    상세보기
  3. Floyd,Philip D., Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator.
    상세보기
  4. Wang, Hsin Fu; Tung, Ming Hau; Zee, Stephen, Diffusion barrier layer for MEMS devices.
    상세보기
  5. Chou, Chen Jean; Wu, Chun chen; Brinkley, Patrick F., Electrical conditioning of MEMS device and insulating layer thereof.
    상세보기
  6. Xu,Gang; Gousev,Evgeni, Electrode and interconnect materials for MEMS devices.
    상세보기
  7. Palmaz, Julio C.; Sprague, Eugene A.; Simon, Cristina; Marton, Denes; Wiseman, Roger W.; Banas, Christopher E., Endoluminal device exhibiting improved endothelialization and method of manufacture thereof.
    상세보기
  8. Boyle, Christopher T.; Bailey, Steven R.; Palmaz, Julio C.; Banas, Christopher E., Endoluminal stent, self-supporting endoluminal graft and methods of making same.
    상세보기
  9. Deng, Tao; Arias, Francisco; Ismagilov, Rustem F.; Kenis, Paul J. A.; Whitesides, George M., Fabrication of metallic microstructures via exposure of photosensitive compostion.
    상세보기
  10. Miles, Mark W; Gally, Brian J.; Chui, Clarence, Film stack for manufacturing micro-electromechanical systems (MEMS) devices.
    상세보기
  11. Boyle, Christopher T.; Marton, Denes; Banas, Christopher E., Implantable graft and methods of making same.
    상세보기
  12. Boyle, Christopher T.; Marton, Denes; Banas, Christopher E., Implantable graft and methods of making same.
    상세보기
  13. Bailey, Steven R.; Boyle, Christopher T.; Marton, Denes; Banas, Christopher E., In vivo sensor and method of making same.
    상세보기
  14. Bailey, Steven R.; Boyle, Christopher T.; Marton, Denes; Banas, Christopher E., In vivo sensor and method of making same.
    상세보기
  15. Douglas, Joel S.; Hugo, Robert L.; Zhang, Cynthia, Infusion hub assembly and fluid line disconnect system.
    상세보기
  16. Lin,Wen Jian, Interference display cell and fabrication method thereof.
    상세보기
  17. Lin, Wen-Jian; Tsai, Hsiung-Kuang, Interferometric modulation pixels and manufacturing method thereof.
    상세보기
  18. Gousev, Evgeni; Xu, Gang; Mienko, Marek, Interferometric optical display system with broadband characteristics.
    상세보기
  19. Chui,Clarence, MEMS device fabricated on a pre-patterned substrate.
    상세보기
  20. Kocis, Joseph T.; Tornello, James; Petrarca, Kevin S.; Volant, Richard; Subbanna, Seshadri, MEMS encapsulated structure and method of making same.
    상세보기
  21. Chui, Clarence; Sampsell, Jeffrey B., MEMS using filler material and method.
    상세보기
  22. Chui,Clarence, Method and device for a display having transparent components integrated therein.
    상세보기
  23. Floyd,Philip D., Method and device for protecting interferometric modulators from electrostatic discharge.
    상세보기
  24. Miles,Mark W., Method for fabricating a structure for a microelectromechanical system (MEMS) device.
    상세보기
  25. Miles, Mark W., Method for fabricating a structure for a microelectromechanical systems (MEMS) device.
    상세보기
  26. Miles,Mark W., Method for manufacturing an array of interferometric modulators.
    상세보기
  27. Wang, Chun-Ming; Lan, Jeffrey; Sasagawa, Teruo, Method of creating MEMS device cavities by a non-etching process.
    상세보기
  28. Wang, Chun-Ming; Lan, Jeffrey; Sasagawa, Teruo, Method of creating MEMS device cavities by a non-etching process.
    상세보기
  29. Chui,Clarence; Sampsell,Jeffrey B., Method of fabricating a free-standing microstructure.
    상세보기
  30. Chui, Clarence; Tung, Ming Hau, Method of fabricating interferometric devices using lift-off processing techniques.
    상세보기
  31. Chand, Ami, Method of forming semiconductor devices in wafer assembly.
    상세보기
  32. Lin, Wen Jian, Method of manufacturing optical interference color display.
    상세보기
  33. Tung,Ming Hau; Kogut,Lior, Methods for producing MEMS with protective coatings using multi-component sacrificial layers.
    상세보기
  34. Kothari, Manish; Sampsell, Jeffrey B., Methods for reducing surface charges during the manufacture of microelectromechanical systems devices.
    상세보기
  35. Sampsell, Jeffrey Brian; Gally, Brian James; Floyd, Philip Don, Methods of fabricating MEMS with spacers between plates and devices formed by same.
    상세보기
  36. Tung,Ming Hau; Floyd,Philip D.; Arbuckle,Brian W., Methods of fabricating interferometric modulators by selectively removing a material.
    상세보기
  37. Tung,Ming Hau; Kothari,Manish; Cummings,William J., Methods of fabricating interferometric modulators by selectively removing a material.
    상세보기
  38. Douglas, Joel S., Micro infusion drug delivery device.
    상세보기
  39. Douglas, Joel; Hugo, Jr., Robert, Micro infusion drug delivery device.
    상세보기
  40. Sasagawa, Teruo; Kogut, Lior, Microelectromechanical device and method utilizing a porous surface.
    상세보기
  41. Sasagawa,Teruo; Kogut,Lior, Microelectromechanical device and method utilizing a porous surface.
    상세보기
  42. Sasagawa, Teruo; Kogut, Lior, Microelectromechanical device and method utilizing nanoparticles.
    상세보기
  43. Miles, Mark W.; Batey, John; Chui, Clarence; Kothari, Manish, Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer.
    상세보기
  44. Chui,Clarence; Sampsell,Jeffrey B., Mirror and mirror layer for optical modulator and method.
    상세보기
  45. Moeck,Peter, Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use.
    상세보기
  46. Luo, Qi; Akella, Sriram; Kogut, Lior, Non-planar surface structures and process for microelectromechanical systems.
    상세보기
  47. Sasagawa, Teruo; Kogut, Lior; Tung, Ming Hau, Non-planar surface structures and process for microelectromechanical systems.
    상세보기
  48. Lin, Wen-Jian; Tsai, Hsiung-Kuang, Optical interference display cell and method of making the same.
    상세보기
  49. Beyder,Arthur; Sachs,Frederick, Oscillator and method of making for atomic force microscope and other applications.
    상세보기
  50. Beyder, Arthur; Sachs, Frederick, Oscillator for atomic force microscope and other applications.
    상세보기
  51. Tung,Ming Hau; Chung,Wonsuk, Patterning of mechanical layer in MEMS to reduce stresses at supports.
    상세보기
  52. Heald,David, Process and structure for fabrication of MEMS device having isolated edge posts.
    상세보기
  53. Chand, Ami, Scanning probe devices.
    상세보기
  54. Yan, Xiaoming; Arbuckle, Brian; Gousev, Evgeni; Tung, Ming Hau, Selective etching of MEMS using gaseous halides and reactive co-etchants.
    상세보기
  55. Chand, Ami, Semiconductor device in wafer assembly.
    상세보기
  56. Chung,Wonsuk; Zee,Steve; Sasagawa,Teruo, Silicon-rich silicon nitrides as etch stops in MEMS manufacture.
    상세보기
  57. Lin,Wen Jian, Structure of a micro electro mechanical system and the manufacturing method thereof.
    상세보기
  58. Sasagawa, Teruo; Chui, Clarence; Kothari, Manish; Ganti, SuryaPrakash; Sampsell, Jeffrey B., Support structure for MEMS device and methods therefor.
    상세보기
  59. Yang, Chin-Sheng, Suspended beam for use in MEMS device.
    상세보기
  60. Yu, Min-Feng; Minary-Jolandan, Majid, Ultra-low damping imaging mode related to scanning probe microscopy in liquid.
    상세보기

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