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Apparatus and method for determining whether to load a workpiece into a working device using stored and updated status flags 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-019/00
  • G06G-007/66
  • B29C-039/00
출원번호 US-0654906 (1996-05-29)
우선권정보 JP-0139166 (1995-06-06)
발명자 / 주소
  • Hashimoto Makoto,JPX
출원인 / 주소
  • Sony Corporation, JPX
대리인 / 주소
    Rader, Fishman & GrauerKananen
인용정보 피인용 횟수 : 12  인용 특허 : 14

초록

An apparatus and a method for production control whereby checks for cross contamination removal are made automatically to control whether to load a workpiece into a given working device depending on the work status of that workpiece. A storage unit stores status flags each indicating the work status

대표청구항

[ What is claimed is:] [1.] A production control apparatus for controlling whether to load a workpiece into a working device depending on the work status of said workpiece, said production control apparatus comprising:storage means for storing status flags each indicating the work status of said wor

이 특허에 인용된 특허 (14)

  1. Imahashi Issei (Yamanashi-ken JPX) Hama Kiichi (Chino JPX) Hata Jiro (Yamanashi-ken JPX), Apparatus for manufacturing a liquid crystal display substrate, and apparatus for evaluating semiconductor crystals.
  2. Loffel Fritz (Erlangen DEX) Arnoldt Claudius (Hessdorf DEX), Automatic control for a power plant.
  3. Kinkead Devon A. (10 Hector Ave. Cumberland RI 02864) Rezuke Robert W. (127 Worcester Rd. North Grafton MA 01536) Higley John K. (14 Saddlebrook Rd. Sherborn MA 01770), Clean room air filtering.
  4. Bristol Edgar H. (Foxboro MA), Computer language structure for process control applications, and translator therefor.
  5. Goossens Dirk (Sint Niklaas BEX) Boeglin Herman J. (South Meriden CT), Computer-controlled chemical dispensing with alternative operating modes.
  6. Yamashita Teppei (Ise JPX) Murata Masanao (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Kawano Hitoshi (Ise JPX) Hayashi Mitsuhiro (Ise JPX) Okuno Atsushi (Ise JPX) Nakamura Akio (Ise J, Electronic substrate processing system using portable closed containers and its equipments.
  7. Turner Virgil Q. (Sugarland TX) Light William D. (Richmond TX) Trevino Hilario T. (Needville TX) Guldi Richard L. (Dallas TX) Poag Frank (Plano TX) Paradis Douglas E. (Richardson TX), Enhanced cleansing process for wafer handling implements.
  8. Sparer Ronald M. (Madeira OH) Werle Dale P. (Batavia OH), Logic controlled plastic molding machine with programmable operator interface.
  9. Frey Jeffrey (5511 Center St. Chevy Chase MD 20815), Method for manufacturing semiconductor devices.
  10. Kotani Norihiko (Itami JPX), Method for producing semiconductor devices.
  11. Berenz John J. (San Pedro CA), Process of making semiconductor device using focused ion beam for resistless in situ etching, deposition, and nucleation.
  12. Wu Hong J. (Hsin-chu TWX), Single semiconductor wafer transfer method and manufacturing system.
  13. Murata Masanao (Ise JPX) Yamashita Teppei (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Hoshiko Takahide (Ise JPX) Karita Mitsuji (Ise JPX) Kawano Hitoshi (Ise JPX) Shinya Tutomu (Ise JPX), Wafer conveying system in a clean room.
  14. Botten Ronald S. (Gurnee IL) DeCamp Larry R. (Wauconda IL) Stoick Calla K. (Des Plaines IL) Ellingson Eric D. (Mount Prospect IL), Wafer having adhesive skin barrier layer.

이 특허를 인용한 특허 (12)

  1. Phan,Khoi A.; Templeton,Michael K.; Singh,Bhanwar, Barcode marking of wafer products for inventory control.
  2. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus.
  3. Bonser Douglas ; Toprac Anthony J. ; Purdy Matthew ; Behnke John R. ; Hussey ; Jr. James H., Method and apparatus for control of critical dimension using feedback etch control.
  4. Speier,Thomas Philip; Dieffenderfer,James Norris; Sartorius,Thomas Andrew; Ganasan,Jaya Prakash Subramaniam, Method and apparatus to clear semaphore reservation for exclusive access to shared memory.
  5. Haanstra,Kornelius; van der Pol,Marinus Jan; Zinger,Jan, Method and system to process semiconductor wafers.
  6. Nering, Eric A., Methods and apparatus for positive wafer process status identification during semiconductor wafer processing.
  7. Blackman Jeffrey R. ; Ruhe Thomas W. ; Jackson Larry A. ; McCue ; Jr. Thomas E. ; O'Hara Kevin, Print recording apparatus having modular autoduplex mechanism.
  8. Blackman Jeffrey R. ; Ruhe Thomas W. ; Jackson Larry A. ; McCue ; Jr. Thomas E. ; O'Hara Kevin, Print recording apparatus having modular autoduplex mechanism.
  9. Yamaguchi, Shingo, Production management method.
  10. Lee, Chang-Jun; Seo, Kyoung-Jin, Semiconductor factory automation system and method for monitoring operational failure of stocker.
  11. Takeshi Kawazome JP, Semiconductor process system, its control method, computer readable memory, and device manufacturing method.
  12. Underwood, John Anthony; Keys, Christopher Edward; Kero, Markku; Leinonen, Rainer, System and method for facilitating the growth of a mobile community.
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