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Strain-based control of crystal anisotropy for perovskite oxides on semiconductor-based material 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/78
  • H01L-029/04
출원번호 US-0126526 (1998-07-30)
발명자 / 주소
  • McKee Rodney Allen
  • Walker Frederick Joseph
출원인 / 주소
  • Lockheed Martin Energy Research Corporation
대리인 / 주소
    McKee
인용정보 피인용 횟수 : 51  인용 특허 : 5

초록

A crystalline structure and a semiconductor device includes a substrate of a semiconductor-based material and a thin film of an anisotropic crystalline material epitaxially arranged upon the surface of the substrate so that the thin film couples to the underlying substrate and so that the geometries

대표청구항

[ We claim:] [1.] A structure comprising:a substrate of semiconductor-based material having a surface; anda thin film of anisotropic crystalline oxide epitaxially overlying the substrate surface wherein the anisotropic crystalline oxide includes unit cells wherein each unit cell possesses a directio

이 특허에 인용된 특허 (5)

  1. Fork David K. (Palo Alto CA), Epitaxial magnesium oxide as a buffer layer on (111) tetrahedral semiconductors.
  2. Nashimoto Keiichi (Kanagawa JPX) Masuda Atsushi (Kanagawa JPX), Oriented ferroelectric thin-film element and manufacturing method therefor.
  3. Summerfelt Scott R. (Dallas TX), Pb/Bi-containing high-dielectric constant oxides using a non-Pb/Bi-containing perovskite as a buffer layer.
  4. McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for depositing an oxide epitaxially onto a silicon substrate and structures prepared with the process.
  5. McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for growing a film epitaxially upon an oxide surface and structures formed with the process.

이 특허를 인용한 특허 (51)

  1. Finder, Jeffrey M.; Eisenbeiser, Kurt; Ramdani, Jamal; Droopad, Ravindranath; Ooms, William Jay, Acoustic wave device and process for forming the same.
  2. Barbara M. Foley ; Gary W. Grube, Apparatus and method for measuring selected physical condition of an animate subject.
  3. Jamal Ramdani ; Lyndee Hilt ; Ravindranath Droopad ; William Jay Ooms, Electro-optic structure and process for fabricating same.
  4. Marshall Daniel S. ; Hallmark Jerald A. ; Ooms William J., Enhanced dielectric constant gate insulator.
  5. Vieira,Amarildo J. C.; Barenburg,Barbara F.; Brophy,Timothy J., Fabrication of a wavelength locker within a semiconductor structure.
  6. Liang, Yong; Droopad, Ravindranath; Li, Hao; Yu, Zhiyi, Ferromagnetic semiconductor structure and method for forming the same.
  7. Droopad, Ravindranath, Growth of compound semiconductor structures on patterned oxide films and process for fabricating same.
  8. El Zein,Nada; Ramdani,Jamal; Eisenbeiser,Kurt; Droopad,Ravindranath, Heterojunction tunneling diodes and process for fabricating same.
  9. Bosco, Bruce Allen; Emrick, Rudy M.; Franson, Steven James, Integrated impedance matching and stability network.
  10. Curless, Jay A., Method and apparatus for controlling anti-phase domains in semiconductor structures and devices.
  11. Jiao,Jinbao, Method and apparatus for increasing digital color imaging utilizing tandem RGB photodiodes.
  12. Ooms,William J.; Hallmark,Jerald A., Method and apparatus utilizing monocrystalline insulator.
  13. Yi Zhiyi ; Droopad Ravindranath ; Overgaard Corey Daniel ; Ramdani Jamal ; Curless Jay A. ; Hallmark Jerald A. ; Ooms William J. ; Wang Jun, Method for fabricating a semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  14. Yu Zhiyi ; Droopad Ravindranath ; Overgaard Corey Daniel ; Ramdani Jamal ; Curless Jay A. ; Hallmark Jerald A. ; Ooms William J. ; Wang Jun, Method for fabricating a semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  15. Ramdani, Jamal; Droopad, Ravindranath; Yu, Zhiyi, Method for fabricating a semiconductor structure including a metal oxide interface with silicon.
  16. Liang,Yong; Droopad,Ravindranath; Hu,Xiaoming; Wang,Jun; Wei,Yi; Yu,Zhiyi, Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process.
  17. Li, Hao; Droopad, Ravindranath; Marshall, Daniel S.; Wei, Yi; Hu, Xiao M.; Liang, Yong, Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate.
  18. Gorrell, Jonathan F.; Cornett, Kenneth D., Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials.
  19. Yu, Zhiyi; Droopad, Ravindranath; Overgaard, Corey, Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method.
  20. Yeo, Yee-Chia; Lee, Wen-Chin, Method of forming strained silicon on insulator substrate.
  21. Rona E. Belford, Method of producing strained microelectronic and/or optical integrated and discrete devices.
  22. Edwards, Jr., John L.; Wei, Yi; Jordan, Dirk C.; Hu, Xiaoming; Craigo, James Bradley; Droopad, Ravindranath; Yu, Zhiyi; Demkov, Alexander A., Method of removing an amorphous oxide from a monocrystalline surface.
  23. Herbots, Nicole; Bradley, James; Shaw, Justin Maurice; Culbertson, Robert J.; Atluri, Vasudeva, Methods for preparing semiconductor substrates and interfacial oxides thereon.
  24. Herbots, Nicole; Whaley, Shawn; Culbertson, Robert; Bennett-Kennett, Ross; Murphy, Ashlee; Bade, Matthew; Farmer, Sam; Hudzietz, Brance, Methods for wafer bonding and for nucleating bonding nanophases using wet and steam pressurization.
  25. Herbots, Nichole; Bennett-Kennett, Ross; Murphy, Ashlee; Hughes, Brett; Acharya, Ajjya; Watson, Clarizza; Culbertson, Robert, Methods for wafer bonding, and for nucleating bonding nanophases.
  26. Herbots, Nicole; Culbertson, Robert J.; Bradley, James; Hart, Murdock Allen; Sell, David Alexander; Whaley, Shawn David, Methods for wafer bonding, and for nucleating bonding nanophases.
  27. Talin,Albert Alec; Voight,Steven A., Optical waveguide structure and method for fabricating the same.
  28. Finder, Jeffrey M.; Ooms, William J., Quantum well infrared photodetector and method for fabricating same.
  29. Yeo, Yee-Chia; Hu, Chenming, SOI chip with recess-resistant buried insulator and method of manufacturing the same.
  30. Yeo,Yee Chia; Hu,Chenming, SOI chip with recess-resistant buried insulator and method of manufacturing the same.
  31. Eisenbeiser,Kurt; Wang,Jun; Droopad,Ravindranath, Semiconductor device and method.
  32. Zhiyi Yu ; Jamal Ramdani ; Ravindranath Droopad, Semiconductor structure.
  33. Yu,Zhiyi; Droopad,Ravindranath, Semiconductor structure exhibiting reduced leakage current and method of fabricating same.
  34. El-Zein, Nada; Ramdani, Jamal; Eisenbeiser, Kurt; Droopad, Ravindranath, Semiconductor structure for use with high-frequency signals.
  35. Ke, Chung-Hu; Lee, Wen-Chin; Hu, Chenming, Semiconductor structure having selective silicide-induced stress and a method of producing same.
  36. Eisenbeiser, Kurt; Foley, Barbara M.; Finder, Jeffrey M.; Thompson, Danny L., Semiconductor structure including a partially annealed layer and method of forming the same.
  37. Ramdani,Jamal; Droopad,Ravindranath; Hilt,Lyndee L.; Eisenbeiser,Kurt Williamson, Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same.
  38. Yeo, Yee-Chia; Yang, Fu-Liang, Silicon-on-insulator chip with multiple crystal orientations.
  39. Yeo,Yee Chia; Yang,Fu Liang, Silicon-on-insulator chip with multiple crystal orientations.
  40. Huang, Chien-Chao; Huang, Cheng-Chuan; Yang, Fu-Liang, Strained silicon device.
  41. Huang,Chien Chao; Huang,Cheng Chuan; Yang,Fu Liang, Strained silicon device manufacturing method.
  42. Rim, Kern, Strained silicon on insulator structures.
  43. Ramdani,Jamal; Hilt,Lyndee L., Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate.
  44. Lawrence E. Lach ; Robert Lempkowski ; Tomasz L. Klosowiak ; Keryn Lian, Structure and method for fabricating an electro-optic system having an electrochromic diffraction grating.
  45. Emrick, Rudy M.; Bosco, Bruce Allen; Holmes, John E.; Franson, Steven James; Rockwell, Stephen Kent, Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same.
  46. Eisenbeiser, Kurt W.; Yu, Zhiyi; Droopad, Ravindranath, Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same.
  47. Holm, Paige M.; Barenburg, Barbara Foley; Yamamoto, Joyce K.; Richard, Fred V., Structure and method for fabricating semiconductor microresonator devices.
  48. Lempkowski,Robert; Chason,Marc, Structure and method for fabricating semiconductor structures and devices for detecting an object.
  49. Tungare,Aroon; Klosowiak,Tomasz L., Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials.
  50. Valliath, George, Structure and method for fabrication for a solid-state lighting device.
  51. Emrick, Rudy M.; Rockwell, Stephen Kent; Holmes, John E., Structure for fabricating high electron mobility transistors utilizing the formation of complaint substrates.
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