초록 ▼

A fluid storage and dispensing system, comprising: a fluid storage and dispensing vessel constructed and arranged for selective dispensing of fluid therefrom; a solid-phase support in the vessel; and an affinity medium on the solid-phase support, wherein the affinity medium reversibly takes up the f

A fluid storage and dispensing system, comprising: a fluid storage and dispensing vessel constructed and arranged for selective dispensing of fluid therefrom; a solid-phase support in the vessel; and an affinity medium on the solid-phase support, wherein the affinity medium reversibly takes up the fluid when contacted therewith, and from which the fluid is disengagable under dispensing conditions. The affinity medium may be a liquid, oil, gel, or solid (porous solid, thin film solid, or bulk solid). The system of the invention may be employed for the storage and dispensing of fluids such as hydride, halide and dopant gases for manufacturing of semiconductor products.

대표청구항 ▼

[ What is claimed is:] [1.] A method of storing and dispensing a fluid, comprising:providing a vessel constructed and arranged for selective dispensing of fluid therefrom, containing a solid-phase support with an affinity medium thereon, wherein the affinity medium reversibly takes up the fluid when

[ What is claimed is:] [1.] A method of storing and dispensing a fluid, comprising:providing a vessel constructed and arranged for selective dispensing of fluid therefrom, containing a solid-phase support with an affinity medium thereon, wherein the affinity medium reversibly takes up the fluid when contacted therewith, and from which the fluid is disengagable under dispensing conditions;contacting said fluid with the affinity medium on the solid-phase support for take-up of the fluid by the affinity medium;disengaging the fluid from the affinity medium under dispensing conditions; anddispensing the fluid from the vessel;wherein said fluid comprises a fluid species selected from the group consisting of ammonia chlorine, HCl, H.sub.2 S, arsine, phosphine, ammonia, diborane, stibine, trichlorosilane, trimethylindium, dimethylaluminumhydroxide, tetrachlorotitanium, tetrakisdiethylamidotitanium, tetrakisdimethylamidotitanium, tetraethylorthosilicate, tungsten hexafluoride, copper hexafluoroacetylacetonate vinyl trimethylsilane, pentakisdiethylamidotantalum, dimethylamidotantalum, fluorinated derivatives of tetraethylorthosilicate, trimethylgallium, triethylindium, octamethylcyclotetrasiloxane, titaniumisopropoxide, iron pentacarbonyl isopropanol, trimethylaluminum, chlorine, BCl.sub.3 B.sub.2 D.sub.6, (CH.sub.3).sub.3 Sb, hydrogen fluoride, hydrogen chloride, GeF.sub.4, SiF.sub.4, deuterated hydrides, hydrogen iodide, hydrogen bromide, germane, hydrogen sulfide, hydrogen selenide, hydrogen telluride, NF.sub.3, 1,1,1-trichloroethane, trans-1,2-dichloroethane, silanes, chlorosilanes, disilane, titanium tetrachloride, tetrakisdimethylamidotitanium, tetrakisdiethylamidotitanium, borane, trimethylborate, trimethylborite, triethylborate, triethylborite phosphorous trichloride, trimethylphosphate, trimethylphosphite, triethylphosphate, triethlyphosphite, and tritiated hydrides.