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Low vacuum vapor process for producing epitaxial layers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-025/18
출원번호 US-0007375 (1998-01-15)
발명자 / 주소
  • Fritzemeier Leslie G.
  • Buczek David M.
출원인 / 주소
  • American Superconductor Corporation
대리인 / 주소
    Fish & Richardson P.C.
인용정보 피인용 횟수 : 35  인용 특허 : 66

초록 ▼

A method for fabricating composite articles with an epitaxial layer is described. The method can be performed under conditions of relatively high pressure and low substrate surface temperature. The resulting epitaxial layers can demonstrate various advantageous properties, such as low pore density a

대표청구항 ▼

[ What is claimed is:] [1.] A method of forming an epitaxial layer of a desired material chemically comprising a first species on a deposition surface of a substrate chemically comprising one or more substrate species including at least one species different from the first species, at a predetermine

이 특허에 인용된 특허 (66)

  1. Shibata Akira (Yokohama JPX), Ag-SnO Alloy composite electrical contact.
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  2. Lambert Paul (Ste-Julie CAX) Glinas Claude (Boucherville CAX) Champagne Blaise (Boucherville CAX) Cave Julian (Westmount CAX), Alloy for HTSC composite conductors made of Au-Ag-Pd.
    상세보기
  3. Fiddes Neil G. (Columbia SC) King Christopher G. (Florence SC) Kobus Gerhard S. (Effingham SC) Mantone Anthony (Effingham SC) Shaffer Frank D. (Quimby SC), Apparatus for embossing superconducting tape for use in a superconducting magnet.
    상세보기
  4. Char Kookrin (Palo Alto CA) Geballe Theodore H. (Woodside CA) Moeckly Brian H. (Palo Alto CA), Barrier layers for oxide superconductor devices and circuits.
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  5. Ovshinsky Stanford R. (Bloomfield Hills MI) Young Rosa (Troy MI), Continuous or semi-continuous laser ablation method for depositing fluorinated superconducting thin film having basal pl.
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  6. Rose Bernard R. (Gloucester MA) Willis John K. (Salem NH), Diffusion coating process.
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  7. Witanachchi Sarath (Tampa FL) Mukherjee Pritish (Tampa FL), Dual-laser process for film deposition.
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  8. Tanaka Saburo (Itami JPX) Itozaki Hideo (Itami JPX) Yazu Shuji (Itami JPX), Electrode for electrical connection to oxide superconductor and method for forming the same.
    상세보기
  9. Halpern Bret (Bethany CT), Electron jet vapor deposition system.
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  10. Schmitt Jerome J. (New Haven CT) Halpern Bret L. (Bethany CT), Evaporation system and method for gas jet deposition of thin film materials.
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  11. Wu Xin D. (Greenbelt MD) Muenchausen Ross E. (Espanola NM), Free-standing oxide superconducting articles.
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  12. Cabanel Rgis (Paris FRX) Garry Guy (Rueil Malmaison FRX) Schuhl Alain (Clamart FRX) Ghyselen Bruno (Meulun FRX), Josephson junction structure.
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  13. Shiga Shoji (Utsunomiya JPX) Ozaki Masanori (Utsunomiya JPX) Chang Ton-Chi (Yokohama JPX) Harada Nakahiro (Yokohama JPX) Mimura Masanao (Yokohama JPX), Laminated layers of a substrate, noble metal, and interlayer underneath an oxide superconductor.
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  14. Yoshida Noriyuki (Osaka JPX) Takano Satoshi (Osaka JPX) Hara Tsukushi (Chofu JPX) Okaniwa Kiyoshi (Chofu JPX) Yamamoto Takahiko (Chofu JPX), Laser ablation method of preparing oxide superconducting films on elongated substrates.
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  15. Balooch Mehdi (Berkeley CA) Olander Donald K. (Berkeley CA) Russo Richard E. (Walnut Creek CA), Long-laser-pulse method of producing thin films.
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  16. Steele John W. (Chandler AZ) Stein Cliff (Gilbert AZ), Low temperature silicon epitaxy with germanium doping.
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  17. Borchert ; Lothar ; Stenzel ; Karl-Jorg, Low-current contact construction.
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  18. Johnson David C. (Eugene OR), Making amorphous and crystalline alloys by solid state interdiffusion.
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  19. Wu Xin D. (Los Alamos NM) Tiwari Prabhat (Los Alamos NM), Metal oxide films on metal.
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  20. Schmitt Jerome J. (265 College St. (12N) New Haven CT 06510), Method and apparatus for the deposition of solid films of a material from a jet stream entraining the gaseous phase of s.
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  21. Lowndes Douglas H. (Knoxville TN) Pedraza Anthony J. (Oak Ridge TN) DeSilva Melvin J. (Ithaca NY) Kumar Rajagopalan A. (Knoxville TN), Method for adhesion of metal films to ceramics.
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  22. Amato Richard A. (Cincinnati OH) Woodfield Andrew P. (Fairfield OH) Gigliotti ; Jr. Michael F. X. (Scotia NY) Hughes John R. (Scotia NY) Perocchi Lee C. (Schenectady NY), Method for developing enhanced texture in titanium alloys, and articles made thereby.
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  23. Yoshida Noriyuki (Osaka JPX), Method for fabricating oxide superconducting wires by laser ablation.
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  24. Tanaka Saburo (Itami JPX) Itozaki Hideo (Itami JPX) Yazu Shuji (Itami JPX), Method for forming electrode for electrical connections to oxide super-conductor.
    상세보기
  25. Kimura Toshio (Saitama JPX) Takeshita Takuo (Saitama JPX) Suzuki Motokazu (Saitama JPX), Method for manufacturing an oxide superconducting tape.
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  26. Roas Bernhard (Erlangen DEX) Endres Gerhard (Forchheim DEX) Schultz Ludwig (Bubenreuth DEX), Method for manufacturing oxide superconducting films by laser evaporation.
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  27. Schmitt ; III Jerome J. (New Haven CT) Halpern Bret L. (Bethany CT), Method for microwave plasma assisted supersonic gas jet deposition of thin films.
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  28. Wilhelm Manfred (Nuremberg DEX), Method for the manufacture of a superconductor containing an intermetallic compounds.
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  29. Ovshinsky Stanford R. (Bloomfield Hills MI) Young Rosa (Troy MI), Method of aligning the discrete grains of a multi-grained super-conducting material.
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  30. McCormick, Harold E., Method of applying a refractory coating to metal substrate.
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  31. Rickerby David S. (Derby GB2) Bell Stanley R. (Herts GB2) Wing Rodney G. (Nottingham GB2), Method of applying a thermal barrier coating to a superalloy article and a thermal barrier coating.
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  32. Petitbon Alain (Saint Arnould Enyvelines FRX) Queriaud Roland (Orsay FRX), Method of fabricating a superconductive flexible ceramic conductor having a high critical temperature.
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  33. Gehring Karl A. (Oly GB2), Method of fabricating grain boundary Josephson junction.
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  34. Maxfield MacRae (Plainfield NJ) Baughman Ray H. (Morris Plains NJ) Igbal Zafar (Morristown NJ) Eckhardt Helmut (Madison NJ), Method of forming crystallite-oriented superconducting ceramics by electrodeposition and thin film superconducting ceram.
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  35. Yoshida Noriyuki (Osaka JPX) Takano Satoshi (Osaka JPX) Fujino Kousou (Osaka JPX) Okuda Shigeru (Osaka JPX) Hara Tsukushi (Chofu JPX) Ishii Hideo (Chofu JPX), Method of forming single-crystalline thin film.
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  36. Gould Lawrence J. (Wellesley MA) Shen Yuan-Shou (Reading MA), Method of making multi-bonded silver-cadmium oxide material.
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  37. Iijima Yasuhiro (Tokyo JPX) Tanabe Nobuo (Tokyo JPX), Method of making polycrystalline thin film and superconducting oxide body.
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  38. Saito, Shigeo; Nagata, Masayuki, Method of manufacturing Al-stabilized superconductor.
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  39. Hayashi Noriki (Osaka JPX) Takano Satoshi (Osaka JPX), Method of preparing 2223 phase (Bi,Pb)-Sr-Ca-Cu-O superconducting films.
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  40. Hikata Takeshi (Osaka JPX) Sato Kenichi (Osaka JPX), Method of preparing oxide superconducting wire.
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  41. Yamazaki Shunpei (Tokyo JPX), Method of shaping superconducting oxide material.
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  42. Schmitt ; III Jerome J. (New Haven CT) Halpern Bret L. (Bethany CT), Microwave plasma assisted supersonic gas jet deposition of thin film materials.
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  43. Ahlert Richard H. (San Jose CA) Howard James K. (Morgan Hill CA) Lim Grace S. (San Jose CA), Multilayered vertical magnetic recording medium.
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  44. Cupolo Dennis A. (Suffern NY) Fonseca Geoffrey P. (Pomona NY) Fernandez Fernando (Raimey Base PR) Greenbaum Jean (New York NY) Brown Jeffrey M. (Suffern NY), Multiple-layered article and method of making same.
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  45. Woolf Lawrence D. (Carlsbad CA) Elsner Frederick H. (Cardiff CA) Raggio William A. (Del Mar CA), Nickel-based substrate for ceramic superconductor.
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  46. Woolf Lawrence D. (Carlsbad CA) Elsner Frederick H. (Cardiff CA) Raggio William A. (Del Mar CA), Nickel-based substrate for ceramic superconductor.
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  47. Nagaraj Bangalore A. (W. Chester OH) Connor William B. (Clifton Park NY) Jendrix Richard W. (Cincinnati OH) Wortman David J. (Hamilton OH) Plemmons Larry W. (Fairfield OH), Platinum, rhodium, or palladium protective coatings in thermal barrier coating systems.
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  48. Cima Michael J. (Lexington MA) McIntyre Paul (Cambridge MA), Preparation of highly textured oxide superconducting films from MOD precursor solutions.
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  49. McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for depositing an oxide epitaxially onto a silicon substrate and structures prepared with the process.
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  50. Nakamura Takao (Osaka JPX) Inada Hiroshi (Osaka JPX) Iiyama Michitomo (Osaka JPX), Process for fabricating a superconducting circuit.
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  51. McKee Rodney Allen (Kingston TN) Walker Frederick Joseph (Oak Ridge TN), Process for growing a film epitaxially upon a MgO surface.
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  52. Nazmy Mohamed (Fislisbach CHX) Rydstad Hans (Birmenstorf CHX), Process for increasing the oxidation resistance and corrosion resistance of a component made of a dispersion strengthene.
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  53. Russo Richard E. (Walnut Creek CA) Reade Ronald P. (Berkeley CA) Garrison Stephen M. (Palo Alto CA) Berdahl Paul (Oakland CA), Process for ion-assisted laser deposition of biaxially textured layer on substrate.
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  54. Keating Kenneth B. (Wilmington DE) The\ Stephens S. (Newark DE), Process for making oxide superconducting films by pulsed excimer laser ablation.
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  55. Bednorz Johannes Georg (Wolfhausen CHX) Catana Andrei (Preverenges CHX) Locquet Jean Pierre (Kilchberg CHX) Maechler Erich (Siebnen CHX) Mueller Carl Alexander (Hedingen CHX), Process for manufacturing thin films by multi-layer deposition.
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  56. Tanaka So (Osaka JPX) Nakamura Takao (Osaka JPX) Iiyama Michitomo (Osaka JPX), Process for preparing a layered superconducting structure.
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  58. Lelental Mark (Rochester) Romanofsky Henry J. (Rochester NY), Process of forming a high temperature superconductor on a metal substrate surface.
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  59. Woolf Lawrence D. (Carlsbad CA) Elsner Frederick H. (Cardiff CA) Raggio William A. (Del Mar CA), Substrate for ceramic superconductor with improved barrier.
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  60. Hodge James D. (Lincolnwood IL) Klemptner Lori J. (Lincolnwood IL), Superconducting YBa2Cu3O7-x produced at low temperatures.
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  61. Feenstra Roeland (Oak Ridge TN) Boatner Lynn A. (Oak Ridge TN), Superconducting thin films on potassium tantalate substrates.
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  62. Mizushima Koichi (Kamakura JPX) Yoshida Jiro (Yokohama JPX) Kubo Koh-ichi (Yokohama JPX), Superconductor element and method of manufacturing the same.
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  63. Chung Deborah D. L. (Pittsburgh PA), Superconductor-metal laminates and method of making.
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  64. Rickerby David S. (Derby GB2) White Daniel K. (Garnerville NY) Bell Stanley R. (Herts GB2), Thermal barrier coating for a superalloy article and method of application.
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  65. Duderstadt Edward C. (Fairfield OH) Nagaraj Bangalore A. (West Chester OH), Thermal barrier coating system with intermetallic overlay bond coat.
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  66. Aykan Kamran (Monmouth Beach NJ) Farrauto Robert J. (Westfield NJ) Jefferson Clinton F. (Millburn NJ) Lanam Richard D. (Westfield NJ), Thin film solar energy collector.
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