초록 ▼

Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is rem

Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is removed once the liquid photoresist is fully solidified. These structures in solidified photoresist may serve as optical elements or may be accurately transferred into the substrate. The stamp may be for an entire wafer.

대표청구항 ▼

[ What is claimed is:] [1.] A method of making an optical replica comprising:contacting liquid photoresist with a stamp having a pattern therein, thereby replicating the pattern in the photoresist;providing the liquid photoresist on a substrate opposite a side of the liquid photoresist contacting th

[ What is claimed is:] [1.] A method of making an optical replica comprising:contacting liquid photoresist with a stamp having a pattern therein, thereby replicating the pattern in the photoresist;providing the liquid photoresist on a substrate opposite a side of the liquid photoresist contacting the stamp;solidifying the liquid photoresist;removing the stamp; andsimultaneously etching solidified photoresist and the substrate.