초록 ▼

Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selectiv

Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of a polygon (nickel) mirror on a polysilicon, electrostatic micromotor rotor for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micromotor constructions.

대표청구항 ▼

[ We claim:] [1.] In a method of fabricating a surface micromachined micromotor having a rotor and a stator, the rotor being fabricated in-place and thereafter freed, an improvement comprising:fabricating the motor with a plurality of component layers, one of said layers being a topmost layer most r

[ We claim:] [1.] In a method of fabricating a surface micromachined micromotor having a rotor and a stator, the rotor being fabricated in-place and thereafter freed, an improvement comprising:fabricating the motor with a plurality of component layers, one of said layers being a topmost layer most remote from a substrate, another of said layers being an intermediate layer disposed between the topmost layer and the substrate; andforming a utilitarian feature on said rotor, said intermediate layer comprising said rotor;wherein the utilitarian feature extends from said intermediate layer, away from said substrate and beyond the topmost layer.