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Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/08
  • G01N-027/00
  • G01N-030/76
  • G08B-017/10
출원번호 US-0081957 (1998-05-19)
발명자 / 주소
  • Tom Glenn M.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hulquist
인용정보 피인용 횟수 : 34  인용 특허 : 42

초록 ▼

A hydrogen sensor including a piezoelectric device with a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered frequency response characteristic, relative to the frequency response in the absence of hydrogen. The piezoelectric device may be for

대표청구항 ▼

[ I claim:] [1.] A hydrogen gas sensor, comprising:a piezoelectric device that is arranged for contacting gas from a monitored environment to detect the presence of hydrogen therein and that is electrically excitable to exhibit a frequency response;a metal layer on a surface of the piezoelectric dev

이 특허에 인용된 특허 (42)

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  2. Pfeifer Kent B. ; Hoyt Andrea E. ; Frye Gregory C., Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent.
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  3. DiLeo Anthony J. (Westford MA) Snow James T. (Nashua NH) Cote Daniel A. (Nashua NH), Apparatus for monitoring impurities in a gas stream.
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  4. Snow James T. (Nashua NH), Apparatus for monitoring moisture in a gas stream.
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  5. Tom Glenn M. (New Milford CT), Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor.
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  6. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT) Luxon Bruce A. (Stamford CT), Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements.
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  7. Pyke Stephen C. (Sisters OR), Detection of fluids with metal-insulator-semiconductor sensors.
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  8. Loesch Muriel (Paris FRX) Menil Francis (La Brede FRX) Lucat Claude (Cestas FRX) Dutronc Pascale (Paris FRX) Marteau Veronique (Survilliers FRX), Device for selective detection of gas.
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  9. McGowan Raymond C. (Neptune NJ) Mariani Elio A. (Hamilton Square NJ), Dual-channel flexural acoustic wave chemical sensor.
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  10. Hepher Michael J. (Coylton GB6) Hides Jonathan N. (Glasgow GB6), Dust monitors and dust monitoring.
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  11. Neuburger Glen G. (Jackson Township ; Hudson County NJ), Early warning reactive gas detection system.
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  13. Furuki Makoto (Kanagawa JPX) Pu Lyong S. (Kanagawa JPX), Gas detector.
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  14. Kindlund Alf R. (Linkping SEX) Lundstrm Kurt I. (Linkping SEX), Gas detector.
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  15. Minten Karl (La Hoya CA) Krug William (Hoffman Estates IL), Gas monitoring device and method.
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  16. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
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  17. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
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  18. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
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  19. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
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  20. Luoma Gregory A. (Victoria CAX) Yee Lannie K. (Saanichton CAX) Turnham Barrie D. (Victoria CAX), Method and apparatus for detecting presence and concentration of vapors in gaseous fluids.
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  21. Sinclair Ian (Loughborough GB2), Method and apparatus for detecting the presence of a contaminant in a gaseous carrier.
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  22. White Richard Manning (Berkeley CA) Hsu Tzu-Hwa (San Jose CA), Method and apparatus for extracting derivatives from surface acoustic waves.
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  23. Pillion John E., Method and apparatus for measuring moisture content in a gas.
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  24. Osborne Michael W. (Lilburn GA) England William G. (Suwanee GA) Zhang Xiuyi (Shandong CNX), Method and apparatus for monitoring corrosion.
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  25. Vig John R. (Colts Neck NJ), Method of sensing contamination in the atmosphere.
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  26. Wachter Eric A. (Oak Ridge TN) Thundat Thomas G. (Knoxville TN), Microbar sensor.
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  27. Thundat Thomas G. ; Wachter Eric A., Microcantilever sensor.
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  28. Bein Thomas (Albuquerque NM) Brown Kelly D. (Albuquerque NM) Frye Gregory C. (Albuquerque NM) Brinker Charles J. (Albuquerque NM), Molecular sieve sensors for selective detection at the nanogram level.
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  29. Bonne Ulrich (Hopkins MN) Matthys Robert J. (Minneapolis MN) Kubisiak David (Chanhassen MN), Multiple gas property sensor.
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  30. Martin Stephen J. (Albuquerque NM) Ricco Antonio J. (Albuquerque NM), Multiple-frequency acoustic wave devices for chemical sensing and materials characterization in both gas and liquid phas.
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  31. Blakemore Colin B. (Wilmington DE), Piezoelectric moisture analyzers.
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  32. Josse Fabien J. ; Everhart Dennis S., Piezoelectric resonator chemical sensing device.
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  33. White Richard M. (Berkeley CA) Wenzel Stuart W. (Kensington CA), Plate-mode ultrasonic sensor.
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  35. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom.
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  36. Hardwick, Steven; McManus, James V., Process for sorption of hazardous waste products from exhaust gas streams.
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  37. Lokshin Anatole (Claremont CA) Burchfield David E. (Rancho Cucamonga CA) Tracy David H. (Norwalk CT), Saw vapor sensor apparatus and multicomponent signal processing.
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  38. Oehler Oscar (Streulistrasse 24 8032 Zrich CHX), Selective gas detection by field separation and velocity of sound determination, especially O2 detection 상세보기
  • Larue Rebecca A., Sensor and method for detecting predetermined chemical species in solution.
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  • Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
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    30. Pavlovsky, Igor, Sono-photonic gas sensor.
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    31. Bhethanabotla,Venkat R.; Bhansali,Shekhar, Surface acoustic wave hydrogen sensor.
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    33. Vig John R. ; Ballato Arthur, Techniques for sensing the properties of fluids with resonators.
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    34. Zinck, Jennifer J.; Kirby, Deborah J., Thin film metal hydride hydrogen sensor.
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