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Infrared focal plane array 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01J-005/20
출원번호 US-0927407 (1997-09-10)
우선권정보 JP-0012269 (1997-01-27)
발명자 / 주소
  • Kimata Masafumi,JPX
  • Ishikawa Tomohiro,JPX
  • Tsutsumi Kazuhiko,JPX
  • Hata Hisatoshi,JPX
출원인 / 주소
  • Mitsubishi Denki Kabushiki Kaisha, JPX
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 42  인용 특허 : 7

초록

A two-dimensional infrared focal plane array of temperature detecting units is provided with the temperature detecting units being arranged for every pixel in a two-dimensional arrangement on a semiconductor substrate. Each temperature detecting unit is formed integrally with readout circuitry. Each

대표청구항

[ What is claimed is:] [1.] A two-dimensional infrared focal plane array comprising temperature detecting units arranged for every pixel of a corresponding two-dimensional arrangement on a semiconductor substrate, each of said temperature detecting units being formed integrally with signal readout c

이 특허에 인용된 특허 (7)

  1. Hornbeck Larry J. (Van Alstyne TX), Infrared detector.
  2. Ishikawa Tomohiro (Amagasaki JPX) Ueno Masashi (Amagasaki JPX) Kaneda Osamu (Amagasaki JPX), Infrared sensor having a heat sensitive semiconductor portion that detects and absorbs infrared rays.
  3. Shelton Gail D. (Mesquite TX) Belcher James F. (Plano TX) Frank Steven N. (McKinney TX) Hanson Charles M. (Richardson TX) Meissner Edward G. (Dallas TX) Owen Robert A. (Rowlett TX), Inter-pixel thermal isolation for hybrid thermal detectors.
  4. Johnson Robert G. (Minnetonka MN) Higashi Robert E. (Minneapolis MN), Method of making semiconductor device.
  5. Liddiard Kevin C. (Adelaide AUX), Semiconductor film bolometer thermal infrared detector.
  6. Kruse ; Jr. Paul W. (Edina MN), Thin film pyroelectric imaging array.
  7. Wood R. Andrew (Bloomington MN), Use of vanadium oxide in microbolometer sensors.

이 특허를 인용한 특허 (42)

  1. Wood,Roland Andrew, Camera having distortion correction.
  2. Ikushima, Kimiya, Electronic device.
  3. Emadi, Arvin; Barnett, Stanley, Formation of a thermopile sensor utilizing CMOS fabrication techniques.
  4. Ishikawa, Tomohiro; Yagi, Hirofumi, Infrared detector.
  5. Sone, Takanori; Ishikawa, Tomohiro; Nakaki, Yoshiyuki, Infrared detector and method of making the infrared detector.
  6. Meshii, Ryosuke; Noda, Toshinari; Kamiguchi, Hiroki; Kubo, Takashi; Sashinaka, Nobuo; Taji, Shoichi; Ota, Naoki; Onodera, Naoto, Infrared ray detecting element and infrared ray detector including the same.
  7. Ikegawa,Sumio; Nakayama,Kohei; Funaki,Hideyuki; Iida,Yoshinori; Shigenaka,Keitaro, Infrared ray detecting type imaging device.
  8. Ikegawa,Sumio; Nakayama,Kohei; Funaki,Hideyuki; Iida,Yoshinori; Shigenaka,Keitaro, Infrared ray detecting type imaging device.
  9. Ryu,Sang Ouk; Cho,Seong Mok; Kim,Kwi Dong; Yu,Byoung Gon, Infrared ray sensor using silicon oxide film as infrared ray absorption layer and method of fabricating the same.
  10. Lee,Han Sheng; Chilcott,Dan W.; Logsdon,James H., Infrared sensor package.
  11. Masafumi Kimata JP, Infrared solid-state imaging sensing device.
  12. Wood, Roland Andrew, Lightweight infrared camera.
  13. Jing, Errong, MEMS double-layer suspension microstructure manufacturing method, and MEMS infrared detector.
  14. Yon, Jean-Jacques; Dumont, Geoffroy; Imperinetti, Pierre; Pocas, Stephane, Method for making an infrared detection device.
  15. Ikegawa,Sumio; Nakayama,Kohei; Funaki,Hideyuki; Iida,Yoshinori; Shigenaka,Keitaro, Method of manufacturing an image device.
  16. Kimata, Masafumi; Nakaki, Yoshiyuki, Method of manufacturing semiconductor device and method of manufacturing infrared image sensor.
  17. Wood, Roland Andrew, Microbolometer operating system.
  18. Wood, Roland Andrew, Microbolometer operating system.
  19. William J. Hamilton, Jr. ; Michael Ray ; Eli E. Gordon ; Christopher L. Fletcher ; Ronald W. Berry, Monolithic microelectronic array structure having substrate islands and its fabrication.
  20. De Bruyker, Dirk; Torres, Francisco E.; Wolkin, Michal V.; Anderson, Gregory B.; Chow, Eugene M., Nanocalorimeter based on thermal probes.
  21. Weick, Jürgen-Michael; Horn, Armin; Hammann, Gerhard; Laitenberger, Peter; Collier, Nick; Jones, Ross Peter, Optical guide with temperature sensing matrix.
  22. Fitzgibbons Eugene T. ; Han Chien-Jih, Pixel structure having a bolometer with spaced apart absorber and transducer layers and an associated fabrication method.
  23. Bender, Daniel A., Precise annealing of focal plane arrays for optical detection.
  24. Bender, Daniel A., Precise annealing of focal plane arrays for optical detection.
  25. Andrew Duncan Parsons GB; Nicholas Martin Shorrocks GB; Joanne Hurley GB; Matthew Dale Holme GB, Radiation detectors.
  26. Ohkubo, Hiroaki; Nakashiba, Yasutaka, Semiconductor device including vanadium oxide sensor element with restricted current density.
  27. Ansari, Adil; Chillar, Rahul Jaikaran, System and method for adjusting compressor inlet fluid temperature.
  28. Chillar, Rahul Jaikaran; Mestroni, Julio E.; Kauffman, Eric J.; Ansari, Adil, System and method for measuring temperature within a turbine system.
  29. Chillar, Rahul Jaikaran; Mestroni, Julio E.; Kauffman, Eric J.; Ansari, Adil, Thermal control system for fault detection and mitigation within a power generation system.
  30. Takizawa, Jun; Noda, Takafumi; Kamikawa, Taketomi; Yamamura, Mitsuhiro, Thermal detector, thermal detection device, and electronic instrument.
  31. Tsuchiya, Yasushi, Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method.
  32. Mashio,Naoya; Shigenaka,Keitaro; Funaki,Hideyuki; Iida,Yoshinori; Fujiwara,Ikuo, Thermal infrared detector and infrared image sensor using the same.
  33. Naoki Oda JP, Thermal infrared detector provided with shield for high fill factor.
  34. Nakaki,Yoshiyuki; Fujii,Yoshio; Hata,Hisatoshi; Inoue,Hiromoto, Thermal infrared sensor device and thermal infrared sensor array.
  35. Ueno, Masashi, Thermal infrared solid state imaging device and infrared camera.
  36. Ansari, Adil; Chillar, Rahul Jaikaran, Thermal measurement system and method for leak detection.
  37. Chillar, Rahul Jaikaran; Kauffman, Eric J.; Ansari, Adil, Thermal measurement system for fault detection within a power generation system.
  38. Masini, Paolo; Devitt, John William, Thermal protection mechanisms for uncooled microbolometers.
  39. Shigenaka,Keitaro; Mashio,Naoya, Thermal type infrared imaging device and fabrication method thereof.
  40. Shigenaka,Keitaro; Mashio,Naoya, Thermal type infrared ray imaging device and fabrication method thereof.
  41. Moresco, Larry L.; Mansingh, Vivek; Murase, Teruo, Thermo-electric signal coupler.
  42. Barnett, Stanley; Pei, Cheng-Wei; Emadi, Arvin; Bhat, Jerome C., Thermopile temperature sensor field of view narrowing using integrated light blocking layer and lens.
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