초록 ▼

A temperature control apparatus for a sample susceptor has a cooling unit for cooling a sample susceptor on which a wafer W is mounted, an electric heater for heating the sample susceptor, a temperature detecting unit for detecting the temperature of the sample susceptor, and a temperature adjusting

A temperature control apparatus for a sample susceptor has a cooling unit for cooling a sample susceptor on which a wafer W is mounted, an electric heater for heating the sample susceptor, a temperature detecting unit for detecting the temperature of the sample susceptor, and a temperature adjusting unit for controlling the cooling unit and the heating unit based on a detection signal of the temperature detecting unit. The cooling unit has an electro-pneumatic regulator for generating a high-pressure gas of a predetermined pressure from a received gas and supplying the generated high-pressure gas by an electric control, and a vortex tube for generating a low-temperature gas based on a vortex flow generated by receiving a high-pressure gas in the tangent direction within the tube and for supplying this low-temperature gas, so that the low-temperature gas is supplied from the vortex tube to a gas flow path formed within the sample susceptor.

대표청구항 ▼

[ I claim:] [1.] A temperature control apparatus, comprising:a susceptor for mounting a sample thereon, said susceptor having a plurality of gas flow paths, said gas flow paths allowing low-temperature air for cooling to pass therethrough, said gas flow paths having a common low-temperature air rece

[ I claim:] [1.] A temperature control apparatus, comprising:a susceptor for mounting a sample thereon, said susceptor having a plurality of gas flow paths, said gas flow paths allowing low-temperature air for cooling to pass therethrough, said gas flow paths having a common low-temperature air receiving section provided on a center portion of the susceptor and respective exhaust ports, said gas flow paths extending in a zig zag fashion between said common low temperature air receiving section and said respective exhaust ports, and said gas flow paths being provided in respective fan-shaped regions;a cooling unit configured to cool said susceptor, said cooling unit including an electro-pneumatic regulator for generating high-pressure air of a predetermined pressure from received air and a vortex tube supplied with said high-pressure air from said electro-pneumatic regulator in a tangent direction and, as a result, generating a low-temperature air flow based on a vortex flow generated within said vortex tube and outputting said low-temperature air flow to said common low-temperature air receiving section of said susceptor;a heater configured to heat said susceptor;a temperature detector configured to detect a temperature of said susceptor; anda temperature adjusting unit configured to control said cooling unit and said heater based on a detection signal from said temperature detector.