초록 ▼

A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe

A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system.

대표청구항 ▼

[ What is claimed is:] [1.] A method of processing semiconductor workpieces, comprising:loading processed workpieces from a stack for workpieces in an evacuated holding chamber into a first cassette in an evacuated first chamber;unloading unprocessed workpieces from a second cassette in an evacuated

[ What is claimed is:] [1.] A method of processing semiconductor workpieces, comprising:loading processed workpieces from a stack for workpieces in an evacuated holding chamber into a first cassette in an evacuated first chamber;unloading unprocessed workpieces from a second cassette in an evacuated second chamber into a stack for workpieces in said holding chamber;sealing said second chamber from said holding chamber;venting said second chamber after said second chamber is sealed from said holding chamber; andremoving workpieces from said holding chamber and processing said removed workpieces while said second chamber is vented.