초록 ▼

A cold-cathode ion source with a closed-loop ion-emitting slit which is provided with means for generating a cyclically-variable, e.g., alternating or pulsating electric or magnetic field in an anode-cathode space. These means may be made in the form of an alternating-voltage generator which generat

A cold-cathode ion source with a closed-loop ion-emitting slit which is provided with means for generating a cyclically-variable, e.g., alternating or pulsating electric or magnetic field in an anode-cathode space. These means may be made in the form of an alternating-voltage generator which generates alternating voltage on one of the cathode parts that form the ion-emitting slit, whereas the other slit-forming part is grounded. The alternating voltage deviates the ion beam in the slit with the same frequency of the alternating voltage. In accordance with another embodiment, the aforementioned means may be an electromagnetic coil which generates a magnetic field which passes through the ion-emitting slit, thus acting on the condition of the spatial-charge formation and, hence, on concentration of ions in the ion beam. The cold-cathode ion source may be of any type, i.e., with the ion beam emitted in the direction perpendicular to the direction of drift of electrons in the ion-emitting slit or with the direction of emission of the beam which coincides with the direction of electron drift.

대표청구항 ▼

[ We claim:] [1.] A method for controlling position of an ion beam on the surface of an object to be treated with said ion beam, comprising:providing a cold-cathode ion source with crossed electrical and magnetic fields and with at least one ion-emitting slit, said ion source having a voltage source

[ We claim:] [1.] A method for controlling position of an ion beam on the surface of an object to be treated with said ion beam, comprising:providing a cold-cathode ion source with crossed electrical and magnetic fields and with at least one ion-emitting slit, said ion source having a voltage source,an anode connected to a positive potential of said voltage source; and acathode which comprises at least two parts which are electrically isolated from each other and form said ion-emitting slit; at least one of said two parts being connected to said voltage source;activating said ion source and generating an ion beam which is emitted through said at least one ion-emitting slit toward said object, said ion beam being charged positively with respect to said at least one part of said cathode which is connected to said voltage source;applying a potential to said at least one part of said cathode from said voltage source for generating an electric field across said at least one ion-emitting slit;acting by said electric field onto said ion beam; anddeviating said ion beam in a direction transverse to said direction of said ion beam.