초록 ▼

A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the response data to reference data, which may represent an uncoated substrate or an ideal film. In the former cas

A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the response data to reference data, which may represent an uncoated substrate or an ideal film. In the former case, the attenuation of the response signal is used to indicate film thickness. In the former case, the peak characteristics of the film can be used to indicate its chemical properties. The processor may be further programmed to compare deposition rates, reaction rates, and transport rates to model data. The processor makes decisions regarding equipment control based on these comparisons. It may access heuristic rules to aid in decision making where several factors are involved.

대표청구항 ▼

[ What is claimed is:] [1.] A method of using a computer to measure the thickness of any non-metallic film coated upon a substrate, comprising the steps of:storing substrate reference data derived from a waveform representing the Raman response of said substrate;acquiring substrate response data rep

[ What is claimed is:] [1.] A method of using a computer to measure the thickness of any non-metallic film coated upon a substrate, comprising the steps of:storing substrate reference data derived from a waveform representing the Raman response of said substrate;acquiring substrate response data representing the Raman response of said substrate, said substrate having said film with unknown thickness;comparing the frequency shift peak intensity of said substrate reference data and said substrate response data;determining the attenuation of the waveform represented by said substrate reference data; andestimating the thickness of said film, using the results of said comparing and determining steps.