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In a process and apparatus for delivering a processing substance from a storage vessel to a processing station, the storage vessel enclosing a processing substance storage space and being coupled to conduits which communicate with the storage space, the storage vessel and the conduits enclosing a vo

In a process and apparatus for delivering a processing substance from a storage vessel to a processing station, the storage vessel enclosing a processing substance storage space and being coupled to conduits which communicate with the storage space, the storage vessel and the conduits enclosing a volume which includes the storage space, a method and system for determining the quantity of processing substance in the storage space by: closing the volume enclosed by the storage vessel and the conduits; performing first and second pressure measurements for measuring the gas pressure in the volume when the volume contains respectively first and second quantities of gas; determining the difference between the first and second quantities of gas; and calculating the quantity of processing substance in the storage space on the basis of the volume, the difference between the first and second quantities of gas and the gas pressures measured during the first and second pressure measurements.

대표청구항 ▼

[ What is claimed is:] [1.] In a process which includes delivering a processing substance from a storage vessel to a processing station, said storage vessel enclosing a processing substance storage space and being coupled to conduits which communicate with said storage space, the improvement compris

[ What is claimed is:] [1.] In a process which includes delivering a processing substance from a storage vessel to a processing station, said storage vessel enclosing a processing substance storage space and being coupled to conduits which communicate with said storage space, the improvement comprising a method for determining the quantity of processing substance in said storage space, which method comprises:determining the volume occupied by a gas within a measurement volume which includes said storage space, including:performing first and second pressure measurement for measuring the gas pressure in said measurement volume when said measurement volume contains respectively first and second quantities of gas; anddetermining the difference between said first and second quantities of gas;wherein said gas volume determining is calculated as follows: ]EQU2 ] where V.sub.g is said gas volume;k is a constant;T.sub.k is the absolute temperature of said storage vessel in .degree.K.; andP.sub.2 and P.sub.1 are said first and second pressure measurements at ending time t.sub.2 and starting time t.sub.1, respectively.